JP2022527553A5 - - Google Patents

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Publication number
JP2022527553A5
JP2022527553A5 JP2021559230A JP2021559230A JP2022527553A5 JP 2022527553 A5 JP2022527553 A5 JP 2022527553A5 JP 2021559230 A JP2021559230 A JP 2021559230A JP 2021559230 A JP2021559230 A JP 2021559230A JP 2022527553 A5 JP2022527553 A5 JP 2022527553A5
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JP
Japan
Prior art keywords
flow
pulse
control valve
fluid
controller
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021559230A
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English (en)
Japanese (ja)
Other versions
JP2022527553A (ja
JP7561760B2 (ja
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Priority claimed from US16/376,861 external-priority patent/US11404290B2/en
Application filed filed Critical
Publication of JP2022527553A publication Critical patent/JP2022527553A/ja
Publication of JP2022527553A5 publication Critical patent/JP2022527553A5/ja
Priority to JP2024164991A priority Critical patent/JP2024178348A/ja
Application granted granted Critical
Publication of JP7561760B2 publication Critical patent/JP7561760B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2021559230A 2019-04-05 2020-03-26 パルスガス供給方法および装置 Active JP7561760B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2024164991A JP2024178348A (ja) 2019-04-05 2024-09-24 パルスガス供給方法および装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US16/376,861 2019-04-05
US16/376,861 US11404290B2 (en) 2019-04-05 2019-04-05 Method and apparatus for pulse gas delivery
PCT/US2020/024980 WO2020205434A1 (en) 2019-04-05 2020-03-26 Method and apparatus for pulse gas delivery

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2024164991A Division JP2024178348A (ja) 2019-04-05 2024-09-24 パルスガス供給方法および装置

Publications (3)

Publication Number Publication Date
JP2022527553A JP2022527553A (ja) 2022-06-02
JP2022527553A5 true JP2022527553A5 (https=) 2023-03-22
JP7561760B2 JP7561760B2 (ja) 2024-10-04

Family

ID=72663380

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2021559230A Active JP7561760B2 (ja) 2019-04-05 2020-03-26 パルスガス供給方法および装置
JP2024164991A Pending JP2024178348A (ja) 2019-04-05 2024-09-24 パルスガス供給方法および装置

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2024164991A Pending JP2024178348A (ja) 2019-04-05 2024-09-24 パルスガス供給方法および装置

Country Status (8)

Country Link
US (1) US11404290B2 (https=)
EP (1) EP3947770A4 (https=)
JP (2) JP7561760B2 (https=)
KR (1) KR102919935B1 (https=)
CN (1) CN113574204A (https=)
SG (1) SG11202110015XA (https=)
TW (1) TWI839497B (https=)
WO (1) WO2020205434A1 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7122334B2 (ja) * 2020-03-30 2022-08-19 Ckd株式会社 パルスショット式流量調整装置、パルスショット式流量調整方法、及び、プログラム
JP7670437B2 (ja) 2021-03-12 2025-04-30 東京エレクトロン株式会社 処理装置及びガス供給方法
CN115933463B (zh) * 2022-11-23 2025-02-07 中国工程物理研究院材料研究所 一种闭环反馈控制的数控阀门控制系统
KR20250123783A (ko) * 2022-12-16 2025-08-18 엠케이에스 인코포레이티드 질량 흐름 제어를 위한 방법 및 장치
US12393209B2 (en) * 2024-01-19 2025-08-19 Mks, Inc. Methods and apparatus for reporting inlet pressure in mass flow controllers

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US6887521B2 (en) 2002-08-15 2005-05-03 Micron Technology, Inc. Gas delivery system for pulsed-type deposition processes used in the manufacturing of micro-devices
US7335396B2 (en) * 2003-04-24 2008-02-26 Micron Technology, Inc. Methods for controlling mass flow rates and pressures in passageways coupled to reaction chambers and systems for depositing material onto microfeature workpieces in reaction chambers
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CN101495190B (zh) 2005-03-16 2013-05-01 高级技术材料公司 用于从固体源递送试剂的系统
US7474968B2 (en) * 2005-03-25 2009-01-06 Mks Instruments, Inc. Critical flow based mass flow verifier
JP4788920B2 (ja) 2006-03-20 2011-10-05 日立金属株式会社 質量流量制御装置、その検定方法及び半導体製造装置
US7891228B2 (en) * 2008-11-18 2011-02-22 Mks Instruments, Inc. Dual-mode mass flow verification and mass flow delivery system and method
KR101263856B1 (ko) * 2008-12-31 2013-05-13 어플라이드 머티어리얼스, 인코포레이티드 비저항이 감소되고 표면 형태가 개선된 텅스텐 필름을 증착하는 방법
TWI435196B (zh) 2009-10-15 2014-04-21 派伏塔系統公司 氣體流量控制方法及裝置
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