JP2023521251A - 刺激応答性ポリマー膜の制御された分解 - Google Patents
刺激応答性ポリマー膜の制御された分解 Download PDFInfo
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- JP2023521251A JP2023521251A JP2022568696A JP2022568696A JP2023521251A JP 2023521251 A JP2023521251 A JP 2023521251A JP 2022568696 A JP2022568696 A JP 2022568696A JP 2022568696 A JP2022568696 A JP 2022568696A JP 2023521251 A JP2023521251 A JP 2023521251A
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
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- H01L21/3105—After-treatment
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Abstract
Description
本出願の一部として、本明細書と同時にPCT出願願書が提出される。この同時出願されたPCT出願願書に明記され、本出願が利益または優先権を主張する各出願は、参照によりその全体が、あらゆる目的で本明細書に組み込まれる。
(a)第1の反応物がTtotal未満の深さのみ間隙内に拡散するように、第1の反応物をチャンバにパルス化し、
(b)(a)の後、チャンバをパージし、
(c)(b)の後、第2の反応物がTtotal未満の深さのみその間隙内に拡散するように、第2の反応物をチャンバにパルス化し、
(d)SRPを分解する化合物を形成するために、第1の反応物と第2の反応物とを反応させ、
(e)SRPの厚さをTtotal未満まで分解し、
(f)分解されたSRPを除去すること
を含む方法に関する。
(a)第1の反応物が間隙内に深さDfirst reactantまで拡散するように、第1の反応物をチャンバにパルス化し、
(b)(a)の後、チャンバをパージし、
(c)(b)の後、第2の反応物が深さDsecond reactantのみその間隙内に拡散するように、第2の反応物をチャンバにパルス化し、Dsecond reactantは、Dfirst reactant未満であり、
(d)SRPを分解する化合物を形成するために、第1の反応物と第2の反応物とを反応させ、
(e)SRPを深さDsecond reactantまで分解し、
(f)分解されたSRPを除去すること
を含む、方法に関する。
刺激応答性ポリマー(SRP)をその上に有する基板を提供し、
複数回の除去サイクルを実行し、各サイクルは、
SRPの上部のみを、SRPを分解できる化合物に曝露し、それによって、SRPの上部を分解し、
SRPの上部のみを除去すること
を含む方法に関する。
SRPsを分解するために使用可能な化合物の例は、酸(例えば、7未満のpKa、およびいくつかの実施形態では、4未満、または2未満のpKaを有する)および塩基(例えば、7未満のpKb、およびいくつかの実施形態では、4未満または2未満のpKbを有する)を含む。
SRPs
説明した除去プロセスは、基板処理システムの一部であり得るチャンバ内で実施されてもよい。基板処理システムは、SRPsの堆積と上流および下流処理とを含む基板を処理するために使用される1つまたは複数の追加の基板処理ツールをさらに含んでもよい。ここで図8を参照すると、基板処理システム800は、1つまたは複数の基板処理ツール802(基板処理ツール802aおよび802bは、例示目的で示されている)および基板バッファ830または他の基板保管装置を含む。基板処理ツール802aおよび802bの各々は、複数の処理チャンバ804a、804b、804cなど(総称して処理チャンバ804)を含む。ほんの一例として、処理チャンバ804の各々は、基板処理を実行するように構成されてもよい。いくつかの例では、基板は、処理チャンバ804のうちの1つに搬入され、処理され、その後、処理チャンバ804のうちの1つまたは複数の他の処理チャンバに移動し、かつ/あるいは(例えば、全てが同じ処理を実行する場合)基板処理ツール800から除去されてもよい。
Claims (38)
- 高アスペクト比(HAR)構造のフィーチャ間に形成されている高アスペクト比の間隙に刺激応答性ポリマー(SRP)を有する前記HAR構造をチャンバに提供し、前記高アスペクト比の間隙が、全厚Ttotalを有し、
前記間隙から前記SRPを除去する1回または複数回のサイクルを実行することを備え、各サイクルは、
(a)第1の反応物がTtotal未満の深さのみ前記間隙内に拡散するように、前記第1の反応物を前記チャンバにパルス化し、
(b)(a)の後、前記チャンバをパージし、
(c)(b)の後、第2の反応物がTtotal未満の深さのみ前記間隙内に拡散するように、前記第2の反応物を前記チャンバにパルス化し、前記
(d)前記SRPを分解する化合物を形成するために前記第1の反応物と前記第2の反応物とを反応させ、
(e)SRPの厚さをTtotal未満まで分解し、
(f)前記分解されたSRPを除去すること
を備える、方法。 - 請求項1に記載の方法であって、
前記SRPは、ホモポリマーとして、もしくはコポリマーの前記ポリマーのうちの1つとして、ポリ(フタルアルデヒド)またはその誘導体を含む、方法。 - 請求項1に記載の方法であって、
前記SRPは、ホモポリマーとして、もしくはコポリマーの前記ポリマーのうちの1つとして、ポリ(アルデヒド)またはその誘導体を含む、方法。 - 請求項1から3のいずれか一項に記載の方法であって、
前記第1または第2の反応物は、水蒸気である、方法。 - 請求項4に記載の方法であって、
前記第1または第2の反応物の他方は、前記水蒸気と反応して酸性もしくは塩基性の種になる気体酸化物である、方法。 - 請求項5に記載の方法であって、
前記気体酸化物は、二酸化窒素である、方法。 - 請求項5に記載の方法であって、
前記気体酸化物は、二酸化硫黄である、方法。 - 請求項5に記載の方法であって、
前記気体酸化物は、二酸化炭素である、方法。 - 請求項4に記載の方法であって、
前記第1または第2の反応物の他方は、アンモニアである、方法。 - 請求項1から9のいずれか一項に記載の方法であって、
(a)および(c)の目標拡散深さは、同じである、方法。 - 請求項1から9のいずれか一項に記載の方法であって、
(a)および(c)の目標拡散深さは、異なる、方法。 - 請求項1から11のいずれか一項に記載の方法であって、
(d)の前記反応は、無触媒である、方法。 - 請求項1から3のいずれか一項に記載の方法であって、
前記化合物は、酸または塩基である、方法。 - 高アスペクト比(HAR)構造のフィーチャ間に形成されている高アスペクト比の間隙に刺激応答性ポリマー(SRP)を有する前記HAR構造をチャンバに提供し、前記SRP膜は、全厚Ttotalを有し、
前記間隙から前記SRPを除去する1回または複数回のサイクルを実行することを備え、各サイクルは、
(a)第1の反応物が前記間隙内に深さDfirst reactantまで拡散するように、前記第1の反応物を前記チャンバにパルス化し、
(b)(a)の後、前記チャンバをパージし、
(c)(b)の後、第2の反応物が深さDsecond reactantのみ前記間隙内に拡散するように前記第2の反応物を前記チャンバにパルス化し、Dsecond reactantは、Dfirst reactant未満であり、
(d)前記SRPを分解する化合物を形成するために、前記第1の反応物と前記第2の反応物とを反応させ、
(e)前記SRPを深さDsecond reactantまで分解し、
(f)前記分解されたSRPを除去すること
を備える、方法。 - 請求項13に記載の方法であって、
前記SRPは、ホモポリマーとして、もしくはコポリマーの前記ポリマーのうちの1つとしてポリ(フタルアルデヒド)またはその誘導体を含む、方法。 - 請求項13に記載の方法であって、
前記SRPは、ホモポリマーとして、もしくはコポリマーの前記ポリマーのうちの1つとしてポリ(アルデヒド)またはその誘導体を含む、方法。 - 請求項13から15のいずれか一項に記載の方法であって、
前記第1または第2の反応物は、水蒸気である、方法。 - 請求項16に記載の方法であって、
前記第1または第2の反応物の他方は、前記水蒸気と反応して酸性もしくは塩基性の種になる気体酸化物である、方法。 - 請求項17に記載の方法であって、
前記気体酸化物は、二酸化窒素である、方法。 - 請求項17に記載の方法であって、
前記気体酸化物は、二酸化硫黄である、方法。 - 請求項17に記載の方法であって、
前記気体酸化物は、二酸化炭素である、方法。 - 請求項17に記載の方法であって、
前記第1または第2の反応物の他方は、アンモニアである、方法。 - 請求項13から21のいずれか一項に記載の方法であって、
Dfirst reactantは、前記第1の反応物が1回のサイクルで前記SRP膜の前記全厚にわたって拡散されるように、Ttotalに等しい、方法。 - 請求項13から21のいずれか一項に記載の方法であって、
Dfirst reactantは、Ttotal未満であり、複数回のサイクルが実行される、方法。 - 請求項13から23のいずれか一項に記載の方法であって、
(d)の前記反応は、無触媒である、方法。 - 請求項13から15のいずれか一項に記載の方法であって、
前記化合物は、亜硫酸、硝酸、炭酸、および水酸化アンモニウムのうちの1つである、方法。 - 刺激応答性ポリマー(SRP)をその上に有する基板を提供し、
複数回の除去サイクルを実行することを備え、各サイクルは、
前記SRPの上部のみを、前記SRPを分解できる化合物に曝露し、それによって、前記SRPの前記上部を分解し、
前記SRPの前記上部のみを除去すること
を備える、方法。 - 請求項26に記載の方法であって、
前記SRPは、触媒を用いることなく提供される、方法。 - 請求項26または27に記載の方法であって、
前記SRPの前記上部を化合物に曝露することは、前記基板を収容するチャンバ内に気相中の前記化合物をパルス化することを含む、方法。 - 請求項28に記載の方法であって、
前記化合物は、臭化水素(HBr)、塩化水素(HCl)、フッ化水素(HF)、ヨウ化水素(HI)、硝酸(HNO3)、ギ酸(CH2O2)、酢酸(CH3COOH)、シアン化水素(HCN)、またはアンモニア(NH3)、およびアルキルアミンガスのうちの1つである、方法。 - 請求項26から29のいずれか一項に記載の方法であって、
前記SRPの前記上部を曝露することは、第1の反応物および第2の反応物を順次パルス化することを含み、前記第1の反応物および前記第2の反応物が反応して、前記化合物を形成する、方法。 - 請求項30に記載の方法であって、
前記第1の反応物および前記第2の反応物は、前記SRP膜の前記上部で反応する、方法。 - 請求項26または27に記載の方法であって、
前記SRPの前記上部を曝露することは、第1の反応物の第1のパルスに続いて、第2の反応物の複数回の連続したパルスを含み、前記第1の反応物および前記第2の反応物が反応して、前記化合物を形成する、方法。 - 請求項30から32のいずれか一項に記載の方法であって、
連続したパルスは、不活性ガスのパージによって分離される、方法。 - 請求項26から33のいずれか一項に記載の方法であって、
前記SRPは、ホモポリマーとして、もしくはコポリマーの前記ポリマーのうちの1つとしてポリ(フタルアルデヒド)またはその誘導体を含む、方法。 - 請求項26から34のいずれか一項に記載の方法であって、
前記SRPは、ホモポリマーとして、もしくはコポリマーの前記ポリマーのうちの1つとしてポリ(アルデヒド)またはその誘導体を含む、方法。 - 請求項26から35のいずれか一項に記載の方法であって、
前記SRPは、高アスペクト比(HAR)構造のフィーチャ間に提供される、方法。 - 請求項26から35のいずれか一項に記載の方法であって、
前記SRPは、基板上の保護コーティングとして提供される、方法。
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Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005251901A (ja) * | 2004-03-03 | 2005-09-15 | Ulvac Japan Ltd | 層間絶縁膜のドライエッチング方法 |
JP2013021208A (ja) * | 2011-07-13 | 2013-01-31 | Dainippon Screen Mfg Co Ltd | 基板処理方法および基板処理装置 |
JP2015106645A (ja) * | 2013-11-29 | 2015-06-08 | 株式会社東芝 | 半導体装置の製造方法 |
US20160086829A1 (en) * | 2014-09-18 | 2016-03-24 | Lam Research Corporation | Systems and methods for drying high aspect ratio structures without collapse using stimuli-responsive sacrificial bracing material |
US20190088470A1 (en) * | 2017-09-21 | 2019-03-21 | Honeywell International Inc. | Fill material to mitigate pattern collapse |
WO2020161879A1 (ja) * | 2019-02-08 | 2020-08-13 | 株式会社 日立ハイテクノロジーズ | ドライエッチング方法及びドライエッチング装置 |
Family Cites Families (52)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1027419C (zh) | 1990-08-08 | 1995-01-18 | 李久成 | 醋酸钙的制备方法及用途 |
US5571447A (en) | 1995-03-20 | 1996-11-05 | Ashland Inc. | Stripping and cleaning composition |
JPH09275085A (ja) | 1996-04-05 | 1997-10-21 | Hitachi Ltd | 半導体基板の洗浄方法ならびに洗浄装置および半導体基板製造用成膜方法および成膜装置 |
JPH1121496A (ja) | 1997-06-30 | 1999-01-26 | Nippon Shokubai Co Ltd | 保護被膜形成材および基材の一時的保護処理方法 |
JP2000012648A (ja) | 1998-06-17 | 2000-01-14 | Ebara Corp | 素子製造工程における基材表面保護方法及び装置 |
KR100327577B1 (ko) | 1999-06-28 | 2002-03-14 | 박종섭 | 저유전율 절연막 형성방법 |
US6337277B1 (en) | 2000-06-28 | 2002-01-08 | Lam Research Corporation | Clean chemistry low-k organic polymer etch |
US6660459B2 (en) | 2001-03-14 | 2003-12-09 | Advanced Micro Devices, Inc. | System and method for developing a photoresist layer with reduced pattern collapse |
US6852474B2 (en) | 2002-04-30 | 2005-02-08 | Brewer Science Inc. | Polymeric antireflective coatings deposited by plasma enhanced chemical vapor deposition |
US6805809B2 (en) | 2002-08-28 | 2004-10-19 | Board Of Trustees Of University Of Illinois | Decal transfer microfabrication |
US7223352B2 (en) * | 2002-10-31 | 2007-05-29 | Advanced Technology Materials, Inc. | Supercritical carbon dioxide/chemical formulation for ashed and unashed aluminum post-etch residue removal |
US7011716B2 (en) * | 2003-04-29 | 2006-03-14 | Advanced Technology Materials, Inc. | Compositions and methods for drying patterned wafers during manufacture of integrated circuitry products |
KR101032670B1 (ko) | 2002-11-01 | 2011-05-06 | 조지아 테크 리서치 코오포레이션 | 희생 조성물, 그의 사용 방법 및 그의 분해 방법 |
US6911400B2 (en) | 2002-11-05 | 2005-06-28 | International Business Machines Corporation | Nonlithographic method to produce self-aligned mask, articles produced by same and compositions for same |
US7033735B2 (en) | 2003-11-17 | 2006-04-25 | Taiwan Semiconductor Manufacturing Co., Ltd. | Water soluble negative tone photoresist |
JP2005183751A (ja) | 2003-12-22 | 2005-07-07 | Sony Chem Corp | 配線板の表面処理方法及び電気装置の製造方法 |
US7119025B2 (en) | 2004-04-08 | 2006-10-10 | Micron Technology, Inc. | Methods of eliminating pattern collapse on photoresist patterns |
US7199059B2 (en) | 2004-10-26 | 2007-04-03 | United Microelectronics Corp. | Method for removing polymer as etching residue |
JP5224228B2 (ja) | 2006-09-15 | 2013-07-03 | Nltテクノロジー株式会社 | 薬液を用いた基板処理方法 |
KR100931195B1 (ko) | 2007-07-12 | 2009-12-10 | 주식회사 실트론 | 웨이퍼의 표면처리방법 |
US7666754B2 (en) | 2007-10-18 | 2010-02-23 | Tokyo Electron Limited | Method and system for forming an air gap structure |
US8282842B2 (en) | 2007-11-29 | 2012-10-09 | United Microelectronics Corp. | Cleaning method following opening etch |
JP5101541B2 (ja) | 2008-05-15 | 2012-12-19 | 信越化学工業株式会社 | パターン形成方法 |
RU2011127203A (ru) | 2008-12-03 | 2013-01-10 | Массачусетс Инститьют Оф Текнолоджи | Многофункциональные композиты на основе покрытых наноструктур |
US8617993B2 (en) | 2010-02-01 | 2013-12-31 | Lam Research Corporation | Method of reducing pattern collapse in high aspect ratio nanostructures |
WO2012005806A2 (en) | 2010-05-10 | 2012-01-12 | The Penn State Research Foundation | Signal-responsive plastics |
US9018758B2 (en) | 2010-06-02 | 2015-04-28 | Taiwan Semiconductor Manufacturing Company, Ltd. | Cu pillar bump with non-metal sidewall spacer and metal top cap |
JP2012049446A (ja) | 2010-08-30 | 2012-03-08 | Toshiba Corp | 超臨界乾燥方法及び超臨界乾燥システム |
JP5622675B2 (ja) | 2011-07-05 | 2014-11-12 | 株式会社東芝 | 基板処理方法及び基板処理装置 |
US20140253137A1 (en) | 2013-03-08 | 2014-09-11 | Macronix International Co., Ltd. | Test pattern design for semiconductor devices and method of utilizing thereof |
AU2014246657A1 (en) | 2013-04-02 | 2015-11-19 | University Of South Australia | Stimulus responsive substrates |
US9666427B2 (en) | 2013-06-21 | 2017-05-30 | Lam Research Corporation | Method of collapse-free drying of high aspect ratio structures |
JP6117711B2 (ja) | 2014-02-06 | 2017-04-19 | 信越化学工業株式会社 | 半導体基板の洗浄乾燥方法 |
JP6275578B2 (ja) | 2014-07-30 | 2018-02-07 | 株式会社東芝 | 処理装置、処理方法、および電子デバイスの製造方法 |
JP2015092619A (ja) | 2015-01-08 | 2015-05-14 | 東京エレクトロン株式会社 | 基板乾燥方法及び基板処理装置 |
JP5925928B1 (ja) | 2015-02-26 | 2016-05-25 | 日本航空電子工業株式会社 | 電気接続構造および電気接続部材 |
WO2017062135A1 (en) | 2015-10-04 | 2017-04-13 | Applied Materials, Inc. | Drying process for high aspect ratio features |
JP6703858B2 (ja) | 2016-02-26 | 2020-06-03 | 株式会社Screenホールディングス | 基板処理装置および基板処理方法 |
KR102008566B1 (ko) | 2016-05-24 | 2019-08-07 | 가부시키가이샤 스크린 홀딩스 | 기판 처리 장치 및 기판 처리 방법 |
US10662274B2 (en) | 2016-12-02 | 2020-05-26 | Georgia Tech Research Corporation | Self-immolative polymers, articles thereof, and methods of making and using same |
US10276440B2 (en) | 2017-01-19 | 2019-04-30 | Honeywell International Inc. | Removable temporary protective layers for use in semiconductor manufacturing |
JP7140110B2 (ja) * | 2017-04-13 | 2022-09-21 | Jsr株式会社 | 半導体基板洗浄用組成物 |
US10832909B2 (en) * | 2017-04-24 | 2020-11-10 | Lam Research Corporation | Atomic layer etch, reactive precursors and energetic sources for patterning applications |
US20180315725A1 (en) | 2017-04-26 | 2018-11-01 | Nanya Technology Corporation | Package structure having bump with protective anti-oxidation coating |
US10394123B2 (en) | 2017-05-17 | 2019-08-27 | Taiwan Semiconductor Manufacturing Co., Ltd. | Blocking layer material composition and methods thereof in semiconductor manufacturing |
US11065654B2 (en) | 2017-07-17 | 2021-07-20 | Lam Research Corporation | In situ vapor deposition polymerization to form polymers as precursors to viscoelastic fluids for particle removal from substrates |
US20210163731A1 (en) | 2018-03-26 | 2021-06-03 | Georgia Tech Research Corporation | Transient polymer formulations, articles thereof, and methods of making and using same |
US10861739B2 (en) | 2018-06-15 | 2020-12-08 | Tokyo Electron Limited | Method of patterning low-k materials using thermal decomposition materials |
US10388513B1 (en) | 2018-07-03 | 2019-08-20 | Asm Ip Holding B.V. | Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition |
WO2021030252A1 (en) | 2019-08-09 | 2021-02-18 | Georgia Tech Research Corporation | Rapid synthesis of polyaldehydes |
WO2021046572A1 (en) | 2019-09-04 | 2021-03-11 | Lam Research Corporation | Stimulus responsive polymer films and formulations |
JP2022547281A (ja) | 2019-09-04 | 2022-11-11 | ラム リサーチ コーポレーション | 犠牲ブレーシング、表面保護、および、キュータイム管理のための小分子膜 |
-
2021
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Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005251901A (ja) * | 2004-03-03 | 2005-09-15 | Ulvac Japan Ltd | 層間絶縁膜のドライエッチング方法 |
JP2013021208A (ja) * | 2011-07-13 | 2013-01-31 | Dainippon Screen Mfg Co Ltd | 基板処理方法および基板処理装置 |
JP2015106645A (ja) * | 2013-11-29 | 2015-06-08 | 株式会社東芝 | 半導体装置の製造方法 |
US20160086829A1 (en) * | 2014-09-18 | 2016-03-24 | Lam Research Corporation | Systems and methods for drying high aspect ratio structures without collapse using stimuli-responsive sacrificial bracing material |
US20190088470A1 (en) * | 2017-09-21 | 2019-03-21 | Honeywell International Inc. | Fill material to mitigate pattern collapse |
WO2020161879A1 (ja) * | 2019-02-08 | 2020-08-13 | 株式会社 日立ハイテクノロジーズ | ドライエッチング方法及びドライエッチング装置 |
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US20230136036A1 (en) | 2023-05-04 |
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