JP2023512488A5 - - Google Patents

Info

Publication number
JP2023512488A5
JP2023512488A5 JP2022543652A JP2022543652A JP2023512488A5 JP 2023512488 A5 JP2023512488 A5 JP 2023512488A5 JP 2022543652 A JP2022543652 A JP 2022543652A JP 2022543652 A JP2022543652 A JP 2022543652A JP 2023512488 A5 JP2023512488 A5 JP 2023512488A5
Authority
JP
Japan
Prior art keywords
texture
axis
approximately
glass substrate
spatial period
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2022543652A
Other languages
English (en)
Japanese (ja)
Other versions
JP2023512488A (ja
JP7708770B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/US2021/012155 external-priority patent/WO2021146075A1/en
Publication of JP2023512488A publication Critical patent/JP2023512488A/ja
Publication of JP2023512488A5 publication Critical patent/JP2023512488A5/ja
Application granted granted Critical
Publication of JP7708770B2 publication Critical patent/JP7708770B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2022543652A 2020-01-17 2021-01-05 基板面を処理する方法、そのための装置、及び処理されたガラス物品 Active JP7708770B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202062962529P 2020-01-17 2020-01-17
US62/962,529 2020-01-17
PCT/US2021/012155 WO2021146075A1 (en) 2020-01-17 2021-01-05 Method of treating a substrate surface, apparatus therefor, and treated glass articles

Publications (3)

Publication Number Publication Date
JP2023512488A JP2023512488A (ja) 2023-03-27
JP2023512488A5 true JP2023512488A5 (https=) 2023-11-20
JP7708770B2 JP7708770B2 (ja) 2025-07-15

Family

ID=76864629

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022543652A Active JP7708770B2 (ja) 2020-01-17 2021-01-05 基板面を処理する方法、そのための装置、及び処理されたガラス物品

Country Status (6)

Country Link
US (1) US12275666B2 (https=)
JP (1) JP7708770B2 (https=)
KR (1) KR102873518B1 (https=)
CN (1) CN115151516A (https=)
TW (1) TWI899138B (https=)
WO (1) WO2021146075A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023552727A (ja) * 2020-11-24 2023-12-19 コーニング インコーポレイテッド マイクロled及びマイクロエレクトロニクス転写用基板
US12170436B2 (en) * 2022-01-05 2024-12-17 Modulight Oy Method for fabricating semiconductor device

Family Cites Families (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4256533A (en) * 1980-01-14 1981-03-17 Modern Controls, Inc. Method of constructing layered glass display panels
EP0853528A4 (en) 1995-08-22 2002-01-30 Seagate Technology Llc SURFACE TREATMENT BY LASER RADIATION OF RECEIVING CARRIERS
JP2002072922A (ja) 2000-06-13 2002-03-12 Asahi Glass Co Ltd ディスプレイ用ガラス基板およびその選別方法
JP4540361B2 (ja) 2004-02-18 2010-09-08 日本板硝子株式会社 凹凸のある表面を有するガラス基材の製造方法
JP4071220B2 (ja) * 2004-03-17 2008-04-02 西山ステンレスケミカル株式会社 ガラス基板の製造方法
US8608972B2 (en) 2006-12-05 2013-12-17 Nano Terra Inc. Method for patterning a surface
WO2011032218A1 (en) * 2009-09-18 2011-03-24 Newsouth Innovations Pty Limited Method for texturing surfaces
TWI523088B (zh) 2010-02-11 2016-02-21 校際微電子中心 用於單側粗糙化之方法
JP5687088B2 (ja) 2011-02-21 2015-03-18 AvanStrate株式会社 ガラス基板の製造方法
BE1020735A3 (fr) 2012-05-29 2014-04-01 Agc Glass Europe Substrat verrier texture a proprietes optiques ameliorees pour dispositif optoelectronique.
JP2014009124A (ja) 2012-06-29 2014-01-20 Avanstrate Inc ディスプレイ用ガラス基板の製造方法、および、ディスプレイ用ガラス基板の製造装置
BE1020793A3 (fr) 2012-07-18 2014-05-06 Agc Glass Europe Feuille de verre depolie.
BE1024032B1 (fr) 2013-02-27 2017-10-31 Agc Glass Europe Feuille de verre texturee a motifs rectilignes
BE1021974B1 (fr) 2013-09-03 2016-02-01 Agc Glass Europe Feuille de verre texturee a motifs rectilignes
KR102396551B1 (ko) 2013-12-19 2022-05-12 코닝 인코포레이티드 디스플레이 응용을 위한 텍스쳐링된 표면
US10189117B2 (en) 2013-12-31 2019-01-29 The United States Of America, As Represented By The Secretary Of The Navy Adhesion improvement via material nanostructuring or texturizing
US10479063B2 (en) 2014-12-19 2019-11-19 PDS IG Holding LLC Roller masking system and method
DE102015101332A1 (de) 2015-01-29 2016-08-04 Schott Ag Glaskeramik mit besonders ausgestalteter Oberfläche sowie Verfahren zu deren Herstellung
CN114899096A (zh) 2015-10-14 2022-08-12 艾克索乔纳斯公司 使用基于气体团簇离子束技术的中性射束处理的超浅蚀刻方法以及由此产生的物品
WO2017073580A1 (ja) 2015-10-29 2017-05-04 旭硝子株式会社 ディスプレイ用ガラス基板、及びディスプレイ用ガラス基板の製造方法
EP3181531A1 (fr) 2015-12-16 2017-06-21 AGC Glass Europe Procédé de fabrication d'une feuille de verre dépolie
KR20170077967A (ko) 2015-12-29 2017-07-07 박철 표면 산란구조와 반대면 코팅이 된 금속구조를 가지는 유리 데코레이션
JP6299784B2 (ja) 2016-02-17 2018-03-28 旭硝子株式会社 ガラス板、及びガラス板の製造方法
JP6836699B2 (ja) 2016-09-21 2021-03-03 Agc株式会社 ガラス板
DE102017124625A1 (de) 2016-12-22 2018-06-28 Schott Ag Dünnglassubstrat, Verfahren und Vorrichtung zu dessen Herstellung
US11186518B2 (en) 2017-02-16 2021-11-30 Corning Incorporated Methods of making a glass article with a structured surface
TW202233538A (zh) * 2017-02-16 2022-09-01 美商康寧公司 製造具有結構化表面之玻璃物件的方法
TWI745566B (zh) 2017-03-29 2021-11-11 美商康寧公司 基板塗覆設備和方法
JP6908487B2 (ja) 2017-09-28 2021-07-28 積水化学工業株式会社 表面処理方法及び装置
JP2019134075A (ja) 2018-01-31 2019-08-08 進和工業株式会社 半導体用リードフレームの製造方法

Similar Documents

Publication Publication Date Title
US7538040B2 (en) Techniques for precision pattern transfer of carbon nanotubes from photo mask to wafers
US20120135159A1 (en) System and method for imprint-guided block copolymer nano-patterning
JP6849858B2 (ja) 2段階成膜プロセスにおける接合抵抗の変動の低減
TWI539490B (zh) 基板背面變形加工
JP2023512488A5 (https=)
WO2009099713A3 (en) Elimination of photoresist material collapse and poisoning in 45-nm feature size using dry or immersion lithography
CN101331624A (zh) 布图传导层的方法和装置及其生产的部件
US20150060392A1 (en) Three-dimensional nanostructures and method for fabricating the same
JP2008540167A5 (https=)
CN104459854B (zh) 金属光栅的制备方法
HK1052559A1 (zh) 衬底及与该结构的制造相关的工艺
CN105271103B (zh) 一种纳米结构阵列及其制备方法和用途
JP2001345294A5 (https=)
US20120238097A1 (en) Method for fabricating fine line
CN105565260A (zh) 嵌段共聚物自组装制造纳米结构的方法
JP2019510366A5 (https=)
JP2012056093A5 (https=)
Seeger et al. Fabrication of ordered arrays of silicon nanopillars
CN105502281B (zh) 一种金属图形化方法
CN116322283B (zh) 一种约瑟夫森结制备方法
Mao et al. Nanopatterning using a simple bi-layer lift-off process for the fabrication of a photonic crystal nanostructure
KR20100050699A (ko) 나노임프린트 리소그래피를 이용한 기판상의 금속선 패터닝방법
US8703276B2 (en) Apparatus, system, and method for DNA shadow nanolithography
Gao et al. Template-assisted patterning of nanoscale self-assembled monolayer arrays on surfaces
CN101382733B (zh) 一种纳米尺度图形的制作方法