CN115151516A - 处理基板表面的方法、设备以及经处理的玻璃制品 - Google Patents

处理基板表面的方法、设备以及经处理的玻璃制品 Download PDF

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Publication number
CN115151516A
CN115151516A CN202180014557.9A CN202180014557A CN115151516A CN 115151516 A CN115151516 A CN 115151516A CN 202180014557 A CN202180014557 A CN 202180014557A CN 115151516 A CN115151516 A CN 115151516A
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CN
China
Prior art keywords
texture
axis
etchant
masking material
substrate
Prior art date
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Pending
Application number
CN202180014557.9A
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English (en)
Chinese (zh)
Inventor
加布里埃尔·P·阿格尼欧
乔伊·班纳吉
李艾泽
罗伯特·乔治·曼利
黄鸿生
西瓦·文卡塔查拉姆
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Corning Inc
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Corning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Inc filed Critical Corning Inc
Publication of CN115151516A publication Critical patent/CN115151516A/zh
Pending legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/001—General methods for coating; Devices therefor
    • C03C17/002—General methods for coating; Devices therefor for flat glass, e.g. float glass
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/28—Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material
    • C03C17/32—Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material with synthetic or natural resins
    • C03C17/322—Polyurethanes or polyisocyanates
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K13/00—Etching, surface-brightening or pickling compositions
    • C09K13/04—Etching, surface-brightening or pickling compositions containing an inorganic acid
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K13/00—Etching, surface-brightening or pickling compositions
    • C09K13/04—Etching, surface-brightening or pickling compositions containing an inorganic acid
    • C09K13/08—Etching, surface-brightening or pickling compositions containing an inorganic acid containing a fluorine compound
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/30—Aspects of methods for coating glass not covered above
    • C03C2218/34—Masking

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Inorganic Chemistry (AREA)
  • Surface Treatment Of Glass (AREA)
CN202180014557.9A 2020-01-17 2021-01-05 处理基板表面的方法、设备以及经处理的玻璃制品 Pending CN115151516A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202062962529P 2020-01-17 2020-01-17
US62/962,529 2020-01-17
PCT/US2021/012155 WO2021146075A1 (en) 2020-01-17 2021-01-05 Method of treating a substrate surface, apparatus therefor, and treated glass articles

Publications (1)

Publication Number Publication Date
CN115151516A true CN115151516A (zh) 2022-10-04

Family

ID=76864629

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202180014557.9A Pending CN115151516A (zh) 2020-01-17 2021-01-05 处理基板表面的方法、设备以及经处理的玻璃制品

Country Status (6)

Country Link
US (1) US12275666B2 (https=)
JP (1) JP7708770B2 (https=)
KR (1) KR102873518B1 (https=)
CN (1) CN115151516A (https=)
TW (1) TWI899138B (https=)
WO (1) WO2021146075A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023552727A (ja) * 2020-11-24 2023-12-19 コーニング インコーポレイテッド マイクロｌｅｄ及びマイクロエレクトロニクス転写用基板
US12170436B2 (en) * 2022-01-05 2024-12-17 Modulight Oy Method for fabricating semiconductor device

Citations (7)

* Cited by examiner, † Cited by third party
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CN1669967A (zh) * 2004-03-17 2005-09-21 西山不锈化学股份有限公司 玻璃板表面蚀刻方法和装置、及玻璃板和平面显示器
US20090302001A1 (en) * 2006-12-05 2009-12-10 Nano Terra Inc. Method for Patterning a Surface
JP2014009124A (ja) * 2012-06-29 2014-01-20 Avanstrate Inc ディスプレイ用ガラス基板の製造方法、および、ディスプレイ用ガラス基板の製造装置
US20160176171A1 (en) * 2014-12-19 2016-06-23 PDS IG Holding LLC Roller masking system and method
US20180247831A1 (en) * 2015-10-14 2018-08-30 Exogenesis Corporation Method for ultra-shallow etching using neutral beam processing based on gas cluster ion beam technology
JP2019134075A (ja) * 2018-01-31 2019-08-08 進和工業株式会社 半導体用リードフレームの製造方法
US20200002224A1 (en) * 2017-02-16 2020-01-02 Corning Incorporated Methods of making a glass article with a structured surface

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US4256533A (en) * 1980-01-14 1981-03-17 Modern Controls, Inc. Method of constructing layered glass display panels
EP0853528A4 (en) 1995-08-22 2002-01-30 Seagate Technology Llc SURFACE TREATMENT BY LASER RADIATION OF RECEIVING CARRIERS
JP2002072922A (ja) 2000-06-13 2002-03-12 Asahi Glass Co Ltd ディスプレイ用ガラス基板およびその選別方法
JP4540361B2 (ja) 2004-02-18 2010-09-08 日本板硝子株式会社 凹凸のある表面を有するガラス基材の製造方法
WO2011032218A1 (en) * 2009-09-18 2011-03-24 Newsouth Innovations Pty Limited Method for texturing surfaces
TWI523088B (zh) 2010-02-11 2016-02-21 校際微電子中心 用於單側粗糙化之方法
JP5687088B2 (ja) 2011-02-21 2015-03-18 ＡｖａｎＳｔｒａｔｅ株式会社 ガラス基板の製造方法
BE1020735A3 (fr) 2012-05-29 2014-04-01 Agc Glass Europe Substrat verrier texture a proprietes optiques ameliorees pour dispositif optoelectronique.
BE1020793A3 (fr) 2012-07-18 2014-05-06 Agc Glass Europe Feuille de verre depolie.
BE1024032B1 (fr) 2013-02-27 2017-10-31 Agc Glass Europe Feuille de verre texturee a motifs rectilignes
BE1021974B1 (fr) 2013-09-03 2016-02-01 Agc Glass Europe Feuille de verre texturee a motifs rectilignes
KR102396551B1 (ko) 2013-12-19 2022-05-12 코닝 인코포레이티드 디스플레이 응용을 위한 텍스쳐링된 표면
US10189117B2 (en) 2013-12-31 2019-01-29 The United States Of America, As Represented By The Secretary Of The Navy Adhesion improvement via material nanostructuring or texturizing
DE102015101332A1 (de) 2015-01-29 2016-08-04 Schott Ag Glaskeramik mit besonders ausgestalteter Oberfläche sowie Verfahren zu deren Herstellung
WO2017073580A1 (ja) 2015-10-29 2017-05-04 旭硝子株式会社 ディスプレイ用ガラス基板、及びディスプレイ用ガラス基板の製造方法
EP3181531A1 (fr) 2015-12-16 2017-06-21 AGC Glass Europe Procédé de fabrication d'une feuille de verre dépolie
KR20170077967A (ko) 2015-12-29 2017-07-07 박철 표면 산란구조와 반대면 코팅이 된 금속구조를 가지는 유리 데코레이션
JP6299784B2 (ja) 2016-02-17 2018-03-28 旭硝子株式会社 ガラス板、及びガラス板の製造方法
JP6836699B2 (ja) 2016-09-21 2021-03-03 Ａｇｃ株式会社 ガラス板
DE102017124625A1 (de) 2016-12-22 2018-06-28 Schott Ag Dünnglassubstrat, Verfahren und Vorrichtung zu dessen Herstellung
TW202233538A (zh) * 2017-02-16 2022-09-01 美商康寧公司 製造具有結構化表面之玻璃物件的方法
TWI745566B (zh) 2017-03-29 2021-11-11 美商康寧公司 基板塗覆設備和方法
JP6908487B2 (ja) 2017-09-28 2021-07-28 積水化学工業株式会社 表面処理方法及び装置

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1669967A (zh) * 2004-03-17 2005-09-21 西山不锈化学股份有限公司 玻璃板表面蚀刻方法和装置、及玻璃板和平面显示器
US20090302001A1 (en) * 2006-12-05 2009-12-10 Nano Terra Inc. Method for Patterning a Surface
JP2014009124A (ja) * 2012-06-29 2014-01-20 Avanstrate Inc ディスプレイ用ガラス基板の製造方法、および、ディスプレイ用ガラス基板の製造装置
US20160176171A1 (en) * 2014-12-19 2016-06-23 PDS IG Holding LLC Roller masking system and method
US20180247831A1 (en) * 2015-10-14 2018-08-30 Exogenesis Corporation Method for ultra-shallow etching using neutral beam processing based on gas cluster ion beam technology
US20200002224A1 (en) * 2017-02-16 2020-01-02 Corning Incorporated Methods of making a glass article with a structured surface
JP2019134075A (ja) * 2018-01-31 2019-08-08 進和工業株式会社 半導体用リードフレームの製造方法

Also Published As

Publication number Publication date
US12275666B2 (en) 2025-04-15
KR102873518B1 (ko) 2025-10-17
US20230103045A1 (en) 2023-03-30
JP2023512488A (ja) 2023-03-27
JP7708770B2 (ja) 2025-07-15
TWI899138B (zh) 2025-10-01
TW202140397A (zh) 2021-11-01
KR20220129048A (ko) 2022-09-22
WO2021146075A1 (en) 2021-07-22

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