TWI899138B - 處理基板表面之方法、設備以及經處理的玻璃物件 - Google Patents

處理基板表面之方法、設備以及經處理的玻璃物件

Info

Publication number
TWI899138B
TWI899138B TW110101075A TW110101075A TWI899138B TW I899138 B TWI899138 B TW I899138B TW 110101075 A TW110101075 A TW 110101075A TW 110101075 A TW110101075 A TW 110101075A TW I899138 B TWI899138 B TW I899138B
Authority
TW
Taiwan
Prior art keywords
texture
substrate
etchant
axis
roller
Prior art date
Application number
TW110101075A
Other languages
English (en)
Chinese (zh)
Other versions
TW202140397A (zh
Inventor
賈伯瑞皮爾思 艾格奈羅
喬伊 班納吉
艾澤 李
羅伯喬治 曼利
桓宏 盛
希發 汎卡塔加蘭
Original Assignee
美商康寧公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 美商康寧公司 filed Critical 美商康寧公司
Publication of TW202140397A publication Critical patent/TW202140397A/zh
Application granted granted Critical
Publication of TWI899138B publication Critical patent/TWI899138B/zh

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/001—General methods for coating; Devices therefor
    • C03C17/002—General methods for coating; Devices therefor for flat glass, e.g. float glass
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/28—Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material
    • C03C17/32—Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material with synthetic or natural resins
    • C03C17/322—Polyurethanes or polyisocyanates
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K13/00—Etching, surface-brightening or pickling compositions
    • C09K13/04—Etching, surface-brightening or pickling compositions containing an inorganic acid
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K13/00—Etching, surface-brightening or pickling compositions
    • C09K13/04—Etching, surface-brightening or pickling compositions containing an inorganic acid
    • C09K13/08—Etching, surface-brightening or pickling compositions containing an inorganic acid containing a fluorine compound
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/30—Aspects of methods for coating glass not covered above
    • C03C2218/34—Masking

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Inorganic Chemistry (AREA)
  • Surface Treatment Of Glass (AREA)
TW110101075A 2020-01-17 2021-01-12 處理基板表面之方法、設備以及經處理的玻璃物件 TWI899138B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US202062962529P 2020-01-17 2020-01-17
US62/962,529 2020-01-17

Publications (2)

Publication Number Publication Date
TW202140397A TW202140397A (zh) 2021-11-01
TWI899138B true TWI899138B (zh) 2025-10-01

Family

ID=76864629

Family Applications (1)

Application Number Title Priority Date Filing Date
TW110101075A TWI899138B (zh) 2020-01-17 2021-01-12 處理基板表面之方法、設備以及經處理的玻璃物件

Country Status (6)

Country Link
US (1) US12275666B2 (https=)
JP (1) JP7708770B2 (https=)
KR (1) KR102873518B1 (https=)
CN (1) CN115151516A (https=)
TW (1) TWI899138B (https=)
WO (1) WO2021146075A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023552727A (ja) * 2020-11-24 2023-12-19 コーニング インコーポレイテッド マイクロｌｅｄ及びマイクロエレクトロニクス転写用基板
US12170436B2 (en) * 2022-01-05 2024-12-17 Modulight Oy Method for fabricating semiconductor device

Citations (3)

* Cited by examiner, † Cited by third party
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US20160223206A1 (en) * 2015-01-29 2016-08-04 Schott Ag Glass ceramic with specially designed surface and method for producing same
TW201727735A (zh) * 2015-10-14 2017-08-01 艾克索傑尼席斯公司 用於使用基於氣體簇離子束技術之中性束處理的超淺蝕刻之方法及藉其製造之物件
US20200002224A1 (en) * 2017-02-16 2020-01-02 Corning Incorporated Methods of making a glass article with a structured surface

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US4256533A (en) * 1980-01-14 1981-03-17 Modern Controls, Inc. Method of constructing layered glass display panels
EP0853528A4 (en) 1995-08-22 2002-01-30 Seagate Technology Llc SURFACE TREATMENT BY LASER RADIATION OF RECEIVING CARRIERS
JP2002072922A (ja) 2000-06-13 2002-03-12 Asahi Glass Co Ltd ディスプレイ用ガラス基板およびその選別方法
JP4540361B2 (ja) 2004-02-18 2010-09-08 日本板硝子株式会社 凹凸のある表面を有するガラス基材の製造方法
JP4071220B2 (ja) * 2004-03-17 2008-04-02 西山ステンレスケミカル株式会社 ガラス基板の製造方法
US8608972B2 (en) 2006-12-05 2013-12-17 Nano Terra Inc. Method for patterning a surface
WO2011032218A1 (en) * 2009-09-18 2011-03-24 Newsouth Innovations Pty Limited Method for texturing surfaces
TWI523088B (zh) 2010-02-11 2016-02-21 校際微電子中心 用於單側粗糙化之方法
JP5687088B2 (ja) 2011-02-21 2015-03-18 ＡｖａｎＳｔｒａｔｅ株式会社 ガラス基板の製造方法
BE1020735A3 (fr) 2012-05-29 2014-04-01 Agc Glass Europe Substrat verrier texture a proprietes optiques ameliorees pour dispositif optoelectronique.
JP2014009124A (ja) 2012-06-29 2014-01-20 Avanstrate Inc ディスプレイ用ガラス基板の製造方法、および、ディスプレイ用ガラス基板の製造装置
BE1020793A3 (fr) 2012-07-18 2014-05-06 Agc Glass Europe Feuille de verre depolie.
BE1024032B1 (fr) 2013-02-27 2017-10-31 Agc Glass Europe Feuille de verre texturee a motifs rectilignes
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EP3181531A1 (fr) 2015-12-16 2017-06-21 AGC Glass Europe Procédé de fabrication d'une feuille de verre dépolie
KR20170077967A (ko) 2015-12-29 2017-07-07 박철 표면 산란구조와 반대면 코팅이 된 금속구조를 가지는 유리 데코레이션
JP6299784B2 (ja) 2016-02-17 2018-03-28 旭硝子株式会社 ガラス板、及びガラス板の製造方法
JP6836699B2 (ja) 2016-09-21 2021-03-03 Ａｇｃ株式会社 ガラス板
DE102017124625A1 (de) 2016-12-22 2018-06-28 Schott Ag Dünnglassubstrat, Verfahren und Vorrichtung zu dessen Herstellung
TW202233538A (zh) * 2017-02-16 2022-09-01 美商康寧公司 製造具有結構化表面之玻璃物件的方法
TWI745566B (zh) 2017-03-29 2021-11-11 美商康寧公司 基板塗覆設備和方法
JP6908487B2 (ja) 2017-09-28 2021-07-28 積水化学工業株式会社 表面処理方法及び装置
JP2019134075A (ja) 2018-01-31 2019-08-08 進和工業株式会社 半導体用リードフレームの製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20160223206A1 (en) * 2015-01-29 2016-08-04 Schott Ag Glass ceramic with specially designed surface and method for producing same
TW201727735A (zh) * 2015-10-14 2017-08-01 艾克索傑尼席斯公司 用於使用基於氣體簇離子束技術之中性束處理的超淺蝕刻之方法及藉其製造之物件
US20200002224A1 (en) * 2017-02-16 2020-01-02 Corning Incorporated Methods of making a glass article with a structured surface

Also Published As

Publication number Publication date
CN115151516A (zh) 2022-10-04
US12275666B2 (en) 2025-04-15
KR102873518B1 (ko) 2025-10-17
US20230103045A1 (en) 2023-03-30
JP2023512488A (ja) 2023-03-27
JP7708770B2 (ja) 2025-07-15
TW202140397A (zh) 2021-11-01
KR20220129048A (ko) 2022-09-22
WO2021146075A1 (en) 2021-07-22

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