JP2023171277A5 - - Google Patents

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Publication number
JP2023171277A5
JP2023171277A5 JP2023074798A JP2023074798A JP2023171277A5 JP 2023171277 A5 JP2023171277 A5 JP 2023171277A5 JP 2023074798 A JP2023074798 A JP 2023074798A JP 2023074798 A JP2023074798 A JP 2023074798A JP 2023171277 A5 JP2023171277 A5 JP 2023171277A5
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JP
Japan
Prior art keywords
film
plasma processing
processing method
gas
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023074798A
Other languages
English (en)
Japanese (ja)
Other versions
JP2023171277A (ja
Filing date
Publication date
Application filed filed Critical
Priority to CN202310564019.8A priority Critical patent/CN117096027A/zh
Priority to KR1020230064244A priority patent/KR20230162551A/ko
Priority to US18/199,734 priority patent/US20230377899A1/en
Priority to TW112118687A priority patent/TW202412058A/zh
Publication of JP2023171277A publication Critical patent/JP2023171277A/ja
Publication of JP2023171277A5 publication Critical patent/JP2023171277A5/ja
Pending legal-status Critical Current

Links

JP2023074798A 2022-05-20 2023-04-28 プラズマ処理方法及びプラズマ処理装置 Pending JP2023171277A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
CN202310564019.8A CN117096027A (zh) 2022-05-20 2023-05-18 等离子体处理方法以及等离子体处理系统
KR1020230064244A KR20230162551A (ko) 2022-05-20 2023-05-18 플라즈마 처리 방법 및 플라즈마 처리 시스템
US18/199,734 US20230377899A1 (en) 2022-05-20 2023-05-19 Plasma processing method and plasma processing apparatus
TW112118687A TW202412058A (zh) 2022-05-20 2023-05-19 電漿處理方法及電漿處理系統

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022082706 2022-05-20
JP2022082706 2022-05-20

Publications (2)

Publication Number Publication Date
JP2023171277A JP2023171277A (ja) 2023-12-01
JP2023171277A5 true JP2023171277A5 (https=) 2026-02-12

Family

ID=88928300

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023074798A Pending JP2023171277A (ja) 2022-05-20 2023-04-28 プラズマ処理方法及びプラズマ処理装置

Country Status (1)

Country Link
JP (1) JP2023171277A (https=)

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