JP2023118096A5 - - Google Patents
Info
- Publication number
- JP2023118096A5 JP2023118096A5 JP2023018647A JP2023018647A JP2023118096A5 JP 2023118096 A5 JP2023118096 A5 JP 2023118096A5 JP 2023018647 A JP2023018647 A JP 2023018647A JP 2023018647 A JP2023018647 A JP 2023018647A JP 2023118096 A5 JP2023118096 A5 JP 2023118096A5
- Authority
- JP
- Japan
- Prior art keywords
- formula
- group
- integer
- carbon atoms
- independently represent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022020709 | 2022-02-14 | ||
| JP2022020709 | 2022-02-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2023118096A JP2023118096A (ja) | 2023-08-24 |
| JP2023118096A5 true JP2023118096A5 (https=) | 2025-12-22 |
Family
ID=87654017
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023018647A Pending JP2023118096A (ja) | 2022-02-14 | 2023-02-09 | レジスト組成物及びレジストパターンの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2023118096A (https=) |
-
2023
- 2023-02-09 JP JP2023018647A patent/JP2023118096A/ja active Pending