JP2023147265A5 - - Google Patents
Info
- Publication number
- JP2023147265A5 JP2023147265A5 JP2023050450A JP2023050450A JP2023147265A5 JP 2023147265 A5 JP2023147265 A5 JP 2023147265A5 JP 2023050450 A JP2023050450 A JP 2023050450A JP 2023050450 A JP2023050450 A JP 2023050450A JP 2023147265 A5 JP2023147265 A5 JP 2023147265A5
- Authority
- JP
- Japan
- Prior art keywords
- formula
- group
- integer
- carbon atoms
- independently represent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022054624 | 2022-03-29 | ||
| JP2022054624 | 2022-03-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2023147265A JP2023147265A (ja) | 2023-10-12 |
| JP2023147265A5 true JP2023147265A5 (https=) | 2026-01-22 |
Family
ID=88194106
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023050450A Pending JP2023147265A (ja) | 2022-03-29 | 2023-03-27 | カルボン酸塩、カルボン酸発生剤、樹脂、レジスト組成物及びレジストパターンの製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US20230314938A1 (https=) |
| JP (1) | JP2023147265A (https=) |
| KR (1) | KR20230140429A (https=) |
| TW (1) | TW202337880A (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022183077A (ja) * | 2021-05-28 | 2022-12-08 | 住友化学株式会社 | 塩、酸発生剤、レジスト組成物及びレジストパターンの製造方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011081107A (ja) | 2009-10-06 | 2011-04-21 | Suruga Production Platform Co Ltd | 光ファイバと光デバイスとの光軸調整方法 |
-
2023
- 2023-03-24 TW TW112111216A patent/TW202337880A/zh unknown
- 2023-03-27 US US18/190,286 patent/US20230314938A1/en active Pending
- 2023-03-27 JP JP2023050450A patent/JP2023147265A/ja active Pending
- 2023-03-28 KR KR1020230040629A patent/KR20230140429A/ko active Pending