JP2023147263A5 - - Google Patents
Info
- Publication number
- JP2023147263A5 JP2023147263A5 JP2023050381A JP2023050381A JP2023147263A5 JP 2023147263 A5 JP2023147263 A5 JP 2023147263A5 JP 2023050381 A JP2023050381 A JP 2023050381A JP 2023050381 A JP2023050381 A JP 2023050381A JP 2023147263 A5 JP2023147263 A5 JP 2023147263A5
- Authority
- JP
- Japan
- Prior art keywords
- formula
- group
- integer
- carbon atoms
- independently represent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022054623 | 2022-03-29 | ||
| JP2022054623 | 2022-03-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2023147263A JP2023147263A (ja) | 2023-10-12 |
| JP2023147263A5 true JP2023147263A5 (https=) | 2026-01-23 |
Family
ID=88194114
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023050381A Pending JP2023147263A (ja) | 2022-03-29 | 2023-03-27 | カルボン酸塩、カルボン酸発生剤、樹脂、レジスト組成物及びレジストパターンの製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US20230314939A1 (https=) |
| JP (1) | JP2023147263A (https=) |
| KR (1) | KR20230140428A (https=) |
| TW (1) | TW202337879A (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US12578639B2 (en) * | 2021-11-09 | 2026-03-17 | Sumitomo Chemical Company, Limited | Carboxylate, carboxylic acid generator, resin, resist composition and method for producing resist pattern |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011081107A (ja) | 2009-10-06 | 2011-04-21 | Suruga Production Platform Co Ltd | 光ファイバと光デバイスとの光軸調整方法 |
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2023
- 2023-03-24 TW TW112111202A patent/TW202337879A/zh unknown
- 2023-03-27 US US18/190,650 patent/US20230314939A1/en active Pending
- 2023-03-27 JP JP2023050381A patent/JP2023147263A/ja active Pending
- 2023-03-28 KR KR1020230040627A patent/KR20230140428A/ko active Pending