JP2023101396A5 - - Google Patents
Info
- Publication number
- JP2023101396A5 JP2023101396A5 JP2022211557A JP2022211557A JP2023101396A5 JP 2023101396 A5 JP2023101396 A5 JP 2023101396A5 JP 2022211557 A JP2022211557 A JP 2022211557A JP 2022211557 A JP2022211557 A JP 2022211557A JP 2023101396 A5 JP2023101396 A5 JP 2023101396A5
- Authority
- JP
- Japan
- Prior art keywords
- formula
- group
- integer
- carbon atoms
- independently represent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022001858 | 2022-01-07 | ||
| JP2022001858 | 2022-01-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2023101396A JP2023101396A (ja) | 2023-07-20 |
| JP2023101396A5 true JP2023101396A5 (https=) | 2025-10-28 |
Family
ID=87201819
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022211557A Pending JP2023101396A (ja) | 2022-01-07 | 2022-12-28 | 有機溶剤現像用レジスト組成物及びレジストパターンの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2023101396A (https=) |
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2022
- 2022-12-28 JP JP2022211557A patent/JP2023101396A/ja active Pending