JP2023160801A5 - - Google Patents
Info
- Publication number
- JP2023160801A5 JP2023160801A5 JP2023069379A JP2023069379A JP2023160801A5 JP 2023160801 A5 JP2023160801 A5 JP 2023160801A5 JP 2023069379 A JP2023069379 A JP 2023069379A JP 2023069379 A JP2023069379 A JP 2023069379A JP 2023160801 A5 JP2023160801 A5 JP 2023160801A5
- Authority
- JP
- Japan
- Prior art keywords
- formula
- group
- integer
- carbon atoms
- independently represent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022070855 | 2022-04-22 | ||
| JP2022070855 | 2022-04-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2023160801A JP2023160801A (ja) | 2023-11-02 |
| JP2023160801A5 true JP2023160801A5 (https=) | 2026-02-27 |
Family
ID=88516254
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023069379A Pending JP2023160801A (ja) | 2022-04-22 | 2023-04-20 | カルボン酸塩、カルボン酸発生剤、レジスト組成物及びレジストパターンの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2023160801A (https=) |
-
2023
- 2023-04-20 JP JP2023069379A patent/JP2023160801A/ja active Pending