JP2023121152A5 - - Google Patents
Info
- Publication number
- JP2023121152A5 JP2023121152A5 JP2023023277A JP2023023277A JP2023121152A5 JP 2023121152 A5 JP2023121152 A5 JP 2023121152A5 JP 2023023277 A JP2023023277 A JP 2023023277A JP 2023023277 A JP2023023277 A JP 2023023277A JP 2023121152 A5 JP2023121152 A5 JP 2023121152A5
- Authority
- JP
- Japan
- Prior art keywords
- formula
- group
- integer
- carbon atoms
- independently represent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022023919 | 2022-02-18 | ||
| JP2022023919 | 2022-02-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2023121152A JP2023121152A (ja) | 2023-08-30 |
| JP2023121152A5 true JP2023121152A5 (https=) | 2025-12-23 |
Family
ID=87797593
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023023277A Pending JP2023121152A (ja) | 2022-02-18 | 2023-02-17 | 塩、酸発生剤、レジスト組成物及びレジストパターンの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2023121152A (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2026079103A1 (ja) * | 2024-10-11 | 2026-04-16 | Jsr株式会社 | 感放射線性組成物、レジストパターン形成方法及び化合物 |
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2023
- 2023-02-17 JP JP2023023277A patent/JP2023121152A/ja active Pending