JP2023109734A5 - - Google Patents
Info
- Publication number
- JP2023109734A5 JP2023109734A5 JP2023010455A JP2023010455A JP2023109734A5 JP 2023109734 A5 JP2023109734 A5 JP 2023109734A5 JP 2023010455 A JP2023010455 A JP 2023010455A JP 2023010455 A JP2023010455 A JP 2023010455A JP 2023109734 A5 JP2023109734 A5 JP 2023109734A5
- Authority
- JP
- Japan
- Prior art keywords
- formula
- group
- integer
- carbon atoms
- independently represent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022011254 | 2022-01-27 | ||
| JP2022011254 | 2022-01-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2023109734A JP2023109734A (ja) | 2023-08-08 |
| JP2023109734A5 true JP2023109734A5 (https=) | 2025-12-02 |
Family
ID=87522455
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023010455A Pending JP2023109734A (ja) | 2022-01-27 | 2023-01-26 | カルボン酸塩、カルボン酸発生剤、レジスト組成物及びレジストパターンの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2023109734A (https=) |
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2023
- 2023-01-26 JP JP2023010455A patent/JP2023109734A/ja active Pending