JP2023098698A5 - - Google Patents
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- Publication number
- JP2023098698A5 JP2023098698A5 JP2022209865A JP2022209865A JP2023098698A5 JP 2023098698 A5 JP2023098698 A5 JP 2023098698A5 JP 2022209865 A JP2022209865 A JP 2022209865A JP 2022209865 A JP2022209865 A JP 2022209865A JP 2023098698 A5 JP2023098698 A5 JP 2023098698A5
- Authority
- JP
- Japan
- Prior art keywords
- formula
- group
- integer
- carbon atoms
- independently represent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021215002 | 2021-12-28 | ||
| JP2021215002 | 2021-12-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2023098698A JP2023098698A (ja) | 2023-07-10 |
| JP2023098698A5 true JP2023098698A5 (https=) | 2025-10-23 |
Family
ID=87071961
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022209865A Pending JP2023098698A (ja) | 2021-12-28 | 2022-12-27 | 樹脂、レジスト組成物及びレジストパターンの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2023098698A (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2024179674A (ja) | 2023-06-15 | 2024-12-26 | キオクシア株式会社 | 露光装置、露光方法、及び半導体装置の製造方法 |
| WO2025037476A1 (ja) * | 2023-08-14 | 2025-02-20 | Jsr株式会社 | 感放射線性組成物、レジストパターン形成方法及び重合体 |
| WO2025057562A1 (ja) * | 2023-09-14 | 2025-03-20 | Jsr株式会社 | 感放射線性組成物、パターン形成方法、及び重合体 |
| WO2025062850A1 (ja) * | 2023-09-21 | 2025-03-27 | Jsr株式会社 | 感放射線性組成物、パターン形成方法、及び重合体 |
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2022
- 2022-12-27 JP JP2022209865A patent/JP2023098698A/ja active Pending