JP2023143845A5 - - Google Patents

Info

Publication number
JP2023143845A5
JP2023143845A5 JP2023045548A JP2023045548A JP2023143845A5 JP 2023143845 A5 JP2023143845 A5 JP 2023143845A5 JP 2023045548 A JP2023045548 A JP 2023045548A JP 2023045548 A JP2023045548 A JP 2023045548A JP 2023143845 A5 JP2023143845 A5 JP 2023143845A5
Authority
JP
Japan
Prior art keywords
formula
group
integer
carbon atoms
independently represent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023045548A
Other languages
English (en)
Japanese (ja)
Other versions
JP2023143845A (ja
Filing date
Publication date
Application filed filed Critical
Publication of JP2023143845A publication Critical patent/JP2023143845A/ja
Publication of JP2023143845A5 publication Critical patent/JP2023143845A5/ja
Pending legal-status Critical Current

Links

JP2023045548A 2022-03-24 2023-03-22 塩、酸発生剤、樹脂、レジスト組成物及びレジストパターンの製造方法 Pending JP2023143845A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022048529 2022-03-24
JP2022048529 2022-03-24

Publications (2)

Publication Number Publication Date
JP2023143845A JP2023143845A (ja) 2023-10-06
JP2023143845A5 true JP2023143845A5 (https=) 2026-01-22

Family

ID=88095675

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023045548A Pending JP2023143845A (ja) 2022-03-24 2023-03-22 塩、酸発生剤、樹脂、レジスト組成物及びレジストパターンの製造方法

Country Status (4)

Country Link
US (1) US20230305392A1 (https=)
JP (1) JP2023143845A (https=)
KR (1) KR20230141975A (https=)
TW (1) TW202337882A (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022164585A (ja) * 2021-04-15 2022-10-27 住友化学株式会社 塩、酸発生剤、レジスト組成物及びレジストパターンの製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8207444B2 (en) 2008-07-01 2012-06-26 Sunpower Corporation Front contact solar cell with formed electrically conducting layers on the front side and backside

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