JP2023100005A5 - - Google Patents
Info
- Publication number
- JP2023100005A5 JP2023100005A5 JP2022211604A JP2022211604A JP2023100005A5 JP 2023100005 A5 JP2023100005 A5 JP 2023100005A5 JP 2022211604 A JP2022211604 A JP 2022211604A JP 2022211604 A JP2022211604 A JP 2022211604A JP 2023100005 A5 JP2023100005 A5 JP 2023100005A5
- Authority
- JP
- Japan
- Prior art keywords
- formula
- group
- integer
- carbon atoms
- independently represent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022000186 | 2022-01-04 | ||
| JP2022000186 | 2022-01-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2023100005A JP2023100005A (ja) | 2023-07-14 |
| JP2023100005A5 true JP2023100005A5 (https=) | 2025-10-27 |
Family
ID=87114001
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022211604A Pending JP2023100005A (ja) | 2022-01-04 | 2022-12-28 | 樹脂、レジスト組成物及びレジストパターンの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2023100005A (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024190204A1 (ja) * | 2023-03-14 | 2024-09-19 | Jsr株式会社 | 感放射線性組成物及びパターン形成方法 |
| WO2025057562A1 (ja) * | 2023-09-14 | 2025-03-20 | Jsr株式会社 | 感放射線性組成物、パターン形成方法、及び重合体 |
| WO2025069728A1 (ja) * | 2023-09-27 | 2025-04-03 | Jsr株式会社 | 感放射線性組成物及びレジストパターン形成方法 |
| JP2025101805A (ja) * | 2023-12-26 | 2025-07-08 | 東京応化工業株式会社 | レジスト組成物、レジストパターン形成方法、化合物及び高分子化合物 |
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2022
- 2022-12-28 JP JP2022211604A patent/JP2023100005A/ja active Pending