JP2023110900A5 - - Google Patents

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Publication number
JP2023110900A5
JP2023110900A5 JP2023010393A JP2023010393A JP2023110900A5 JP 2023110900 A5 JP2023110900 A5 JP 2023110900A5 JP 2023010393 A JP2023010393 A JP 2023010393A JP 2023010393 A JP2023010393 A JP 2023010393A JP 2023110900 A5 JP2023110900 A5 JP 2023110900A5
Authority
JP
Japan
Prior art keywords
forming
insulated gate
aluminum
layer
gate structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023010393A
Other languages
English (en)
Japanese (ja)
Other versions
JP2023110900A (ja
Filing date
Publication date
Priority claimed from IT102022000001478A external-priority patent/IT202200001478A1/it
Application filed filed Critical
Publication of JP2023110900A publication Critical patent/JP2023110900A/ja
Publication of JP2023110900A5 publication Critical patent/JP2023110900A5/ja
Pending legal-status Critical Current

Links

JP2023010393A 2022-01-28 2023-01-26 ナノラミネート絶縁ゲート構造を有するワイドバンドギャップトランジスタ及びワイドバンドギャップトランジスタの製造方法 Pending JP2023110900A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IT102022000001478 2022-01-28
IT102022000001478A IT202200001478A1 (it) 2022-01-28 2022-01-28 Transistore ad ampia banda proibita con struttura isolante di porta nanolaminata e procedimento per fabbricare un transistore ad ampia banda proibita

Publications (2)

Publication Number Publication Date
JP2023110900A JP2023110900A (ja) 2023-08-09
JP2023110900A5 true JP2023110900A5 (https=) 2026-01-20

Family

ID=80933659

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023010393A Pending JP2023110900A (ja) 2022-01-28 2023-01-26 ナノラミネート絶縁ゲート構造を有するワイドバンドギャップトランジスタ及びワイドバンドギャップトランジスタの製造方法

Country Status (4)

Country Link
US (1) US20230246086A1 (https=)
EP (1) EP4220734B1 (https=)
JP (1) JP2023110900A (https=)
IT (1) IT202200001478A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117995661B (zh) * 2024-01-23 2025-02-07 安徽大学 基于SiC衬底的开关器件栅氧层的制备方法及开关器件
WO2026009769A1 (ja) * 2024-07-04 2026-01-08 東京エレクトロン株式会社 成膜方法、成膜装置及び半導体デバイス

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