JP2023081830A5 - - Google Patents

Info

Publication number
JP2023081830A5
JP2023081830A5 JP2022141506A JP2022141506A JP2023081830A5 JP 2023081830 A5 JP2023081830 A5 JP 2023081830A5 JP 2022141506 A JP2022141506 A JP 2022141506A JP 2022141506 A JP2022141506 A JP 2022141506A JP 2023081830 A5 JP2023081830 A5 JP 2023081830A5
Authority
JP
Japan
Prior art keywords
superstrate
inclined surface
substrate
edge
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2022141506A
Other languages
English (en)
Japanese (ja)
Other versions
JP2023081830A (ja
Filing date
Publication date
Priority claimed from US17/457,146 external-priority patent/US12195382B2/en
Application filed filed Critical
Publication of JP2023081830A publication Critical patent/JP2023081830A/ja
Publication of JP2023081830A5 publication Critical patent/JP2023081830A5/ja
Withdrawn legal-status Critical Current

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JP2022141506A 2021-12-01 2022-09-06 スーパーストレート及びその使用方法 Withdrawn JP2023081830A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US17/457,146 US12195382B2 (en) 2021-12-01 2021-12-01 Superstrate and a method of using the same
US17/457,146 2021-12-01

Publications (2)

Publication Number Publication Date
JP2023081830A JP2023081830A (ja) 2023-06-13
JP2023081830A5 true JP2023081830A5 (https=) 2025-07-29

Family

ID=86500816

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022141506A Withdrawn JP2023081830A (ja) 2021-12-01 2022-09-06 スーパーストレート及びその使用方法

Country Status (4)

Country Link
US (1) US12195382B2 (https=)
JP (1) JP2023081830A (https=)
KR (1) KR20230082569A (https=)
TW (1) TW202333930A (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2026017866A (ja) 2024-07-24 2026-02-05 信越化学工業株式会社 ケイ素含有膜形成用組成物、膜形成方法、及びスーパーストレート

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