JP2023057047A5 - - Google Patents

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Publication number
JP2023057047A5
JP2023057047A5 JP2022160497A JP2022160497A JP2023057047A5 JP 2023057047 A5 JP2023057047 A5 JP 2023057047A5 JP 2022160497 A JP2022160497 A JP 2022160497A JP 2022160497 A JP2022160497 A JP 2022160497A JP 2023057047 A5 JP2023057047 A5 JP 2023057047A5
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JP
Japan
Prior art keywords
substrate
elastic seal
shielding
shielding member
porous
Prior art date
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Granted
Application number
JP2022160497A
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English (en)
Japanese (ja)
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JP2023057047A (ja
JP7897768B2 (ja
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Publication date
Application filed filed Critical
Priority to US18/698,305 priority Critical patent/US20240416480A1/en
Priority to TW111138207A priority patent/TW202320156A/zh
Priority to CN202280067725.5A priority patent/CN118176088A/zh
Priority to KR1020247009890A priority patent/KR20240087743A/ko
Priority to EP22878618.2A priority patent/EP4414127A4/en
Priority to PCT/JP2022/037612 priority patent/WO2023058751A1/ja
Publication of JP2023057047A publication Critical patent/JP2023057047A/ja
Publication of JP2023057047A5 publication Critical patent/JP2023057047A5/ja
Application granted granted Critical
Publication of JP7897768B2 publication Critical patent/JP7897768B2/ja
Active legal-status Critical Current
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JP2022160497A 2021-10-08 2022-10-04 基板吸着部材、弾性シール組立体、トップリング、および基板処理装置 Active JP7897768B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
TW111138207A TW202320156A (zh) 2021-10-08 2022-10-07 基板吸附構件、彈性密封組合體、頂環、及基板處理裝置
CN202280067725.5A CN118176088A (zh) 2021-10-08 2022-10-07 基板吸附构件、弹性密封组装体、顶环及基板处理装置
KR1020247009890A KR20240087743A (ko) 2021-10-08 2022-10-07 기판 흡착 부재, 탄성 시일 조립체, 톱링 및 기판 처리 장치
EP22878618.2A EP4414127A4 (en) 2021-10-08 2022-10-07 SUBSTRATE SUCTION ELEMENT, ELASTIC SEAL ASSEMBLY, UPPER RING AND SUBSTRATE TREATMENT DEVICE
US18/698,305 US20240416480A1 (en) 2021-10-08 2022-10-07 Substrate suction member, elastic seal assembly, top ring, and substrate processing apparatus
PCT/JP2022/037612 WO2023058751A1 (ja) 2021-10-08 2022-10-07 基板吸着部材、弾性シール組立体、トップリング、および基板処理装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021166120 2021-10-08
JP2021166120 2021-10-08

Publications (3)

Publication Number Publication Date
JP2023057047A JP2023057047A (ja) 2023-04-20
JP2023057047A5 true JP2023057047A5 (cg-RX-API-DMAC7.html) 2025-06-27
JP7897768B2 JP7897768B2 (ja) 2026-07-30

Family

ID=86004786

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022160497A Active JP7897768B2 (ja) 2021-10-08 2022-10-04 基板吸着部材、弾性シール組立体、トップリング、および基板処理装置

Country Status (1)

Country Link
JP (1) JP7897768B2 (cg-RX-API-DMAC7.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7830186B2 (ja) * 2022-03-23 2026-03-16 株式会社ディスコ 保持パッド及び搬送装置
JP2025088032A (ja) 2023-11-30 2025-06-11 株式会社荏原製作所 トップリング、および、基板研磨装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7300297B2 (ja) 2019-04-02 2023-06-29 株式会社荏原製作所 積層メンブレン、積層メンブレンを備える基板保持装置および基板処理装置
JP7328874B2 (ja) 2019-11-19 2023-08-17 株式会社荏原製作所 基板を保持するためのトップリングおよび基板処理装置

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