JP2022541417A5 - - Google Patents

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Publication number
JP2022541417A5
JP2022541417A5 JP2022501217A JP2022501217A JP2022541417A5 JP 2022541417 A5 JP2022541417 A5 JP 2022541417A5 JP 2022501217 A JP2022501217 A JP 2022501217A JP 2022501217 A JP2022501217 A JP 2022501217A JP 2022541417 A5 JP2022541417 A5 JP 2022541417A5
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JP
Japan
Prior art keywords
coating
multilayer structure
structure according
adhesion
functionalized
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Pending
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JP2022501217A
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English (en)
Japanese (ja)
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JP2022541417A (ja
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Priority claimed from PCT/US2020/041577 external-priority patent/WO2021011367A1/en
Publication of JP2022541417A publication Critical patent/JP2022541417A/ja
Publication of JP2022541417A5 publication Critical patent/JP2022541417A5/ja
Priority to JP2024108182A priority Critical patent/JP2024153658A/ja
Pending legal-status Critical Current

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JP2022501217A 2019-07-12 2020-07-10 基板上の無機放射線パターン形成組成物の安定化界面 Pending JP2022541417A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2024108182A JP2024153658A (ja) 2019-07-12 2024-07-04 基板上の無機放射線パターン形成組成物の安定化界面

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201962873489P 2019-07-12 2019-07-12
US62/873,489 2019-07-12
PCT/US2020/041577 WO2021011367A1 (en) 2019-07-12 2020-07-10 Stabilized interfaces of inorganic radiation patterning compositions on substrates

Related Child Applications (1)

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JP2024108182A Division JP2024153658A (ja) 2019-07-12 2024-07-04 基板上の無機放射線パターン形成組成物の安定化界面

Publications (2)

Publication Number Publication Date
JP2022541417A JP2022541417A (ja) 2022-09-26
JP2022541417A5 true JP2022541417A5 (https=) 2022-10-12

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ID=74103060

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JP2022501217A Pending JP2022541417A (ja) 2019-07-12 2020-07-10 基板上の無機放射線パターン形成組成物の安定化界面
JP2024108182A Pending JP2024153658A (ja) 2019-07-12 2024-07-04 基板上の無機放射線パターン形成組成物の安定化界面

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JP2024108182A Pending JP2024153658A (ja) 2019-07-12 2024-07-04 基板上の無機放射線パターン形成組成物の安定化界面

Country Status (6)

Country Link
US (2) US12360454B2 (https=)
EP (1) EP3997516A4 (https=)
JP (2) JP2022541417A (https=)
KR (1) KR20220035149A (https=)
TW (1) TWI838557B (https=)
WO (1) WO2021011367A1 (https=)

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