JP2022538161A5 - - Google Patents

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Publication number
JP2022538161A5
JP2022538161A5 JP2021577083A JP2021577083A JP2022538161A5 JP 2022538161 A5 JP2022538161 A5 JP 2022538161A5 JP 2021577083 A JP2021577083 A JP 2021577083A JP 2021577083 A JP2021577083 A JP 2021577083A JP 2022538161 A5 JP2022538161 A5 JP 2022538161A5
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JP
Japan
Prior art keywords
carrier
movement
reference axis
path
moving device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021577083A
Other languages
English (en)
Japanese (ja)
Other versions
JP7539935B2 (ja
JP2022538161A (ja
Filing date
Publication date
Priority claimed from EP19182628.8A external-priority patent/EP3758049B8/en
Application filed filed Critical
Publication of JP2022538161A publication Critical patent/JP2022538161A/ja
Publication of JP2022538161A5 publication Critical patent/JP2022538161A5/ja
Application granted granted Critical
Publication of JP7539935B2 publication Critical patent/JP7539935B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2021577083A 2019-06-26 2020-06-24 処理ステーションに物体を移動させるためのデバイスおよび方法、ならびに運搬システムおよび処理装置 Active JP7539935B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP19182628.8A EP3758049B8 (en) 2019-06-26 2019-06-26 Device and method for moving an object into a processing station, conveying system and processing apparatus
EP19182628.8 2019-06-26
PCT/EP2020/067697 WO2020260389A1 (en) 2019-06-26 2020-06-24 Device and method for moving an object into a processing station, conveying system and processing apparatus

Publications (3)

Publication Number Publication Date
JP2022538161A JP2022538161A (ja) 2022-08-31
JP2022538161A5 true JP2022538161A5 (https=) 2023-06-29
JP7539935B2 JP7539935B2 (ja) 2024-08-26

Family

ID=67105738

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021577083A Active JP7539935B2 (ja) 2019-06-26 2020-06-24 処理ステーションに物体を移動させるためのデバイスおよび方法、ならびに運搬システムおよび処理装置

Country Status (9)

Country Link
US (1) US12205838B2 (https=)
EP (1) EP3758049B8 (https=)
JP (1) JP7539935B2 (https=)
KR (1) KR102845027B1 (https=)
CN (1) CN114144870B (https=)
PH (1) PH12021553206A1 (https=)
PT (1) PT3758049T (https=)
TW (1) TWI811554B (https=)
WO (1) WO2020260389A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4332277A1 (en) 2022-08-29 2024-03-06 Atotech Deutschland GmbH & Co. KG Apparatus and method for non-immersive wet-chemical treatment of a planar substrate and device for holding the substrate
WO2024046871A1 (en) 2022-08-29 2024-03-07 Atotech Deutschland GmbH & Co. KG Device and system for delivering a stream of liquid and apparatus and method for non-immersive wet-chemical treatment of a planar substrate
EP4679496A1 (en) 2024-07-12 2026-01-14 Atotech Deutschland GmbH & Co. KG Apparatus and method for non-immersive wet-chemical treatment of a substrate and device for holding the substrate
EP4715086A1 (en) 2024-09-23 2026-03-25 Atotech Deutschland GmbH & Co. KG Method and apparatus for non-immersive plating of a surface of a workpiece

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8531723D0 (en) * 1985-12-24 1986-02-05 Vg Instr Group Wafer transfer apparatus
US6558750B2 (en) * 2001-07-16 2003-05-06 Technic Inc. Method of processing and plating planar articles
US20030077396A1 (en) * 2001-10-23 2003-04-24 Lecompte Robert S. Dip coating system
JP3827627B2 (ja) 2002-08-13 2006-09-27 株式会社荏原製作所 めっき装置及びめっき方法
JP2007056350A (ja) 2005-08-26 2007-03-08 Akebono Brake Ind Co Ltd メッキ装置
JP2012195562A (ja) * 2011-02-28 2012-10-11 Hitachi Kokusai Electric Inc 異径基板用アタッチメントおよび基板処理装置ならびに基板若しくは半導体デバイスの製造方法
US9449862B2 (en) 2011-06-03 2016-09-20 Tel Nexx, Inc. Parallel single substrate processing system
WO2014116681A2 (en) * 2013-01-22 2014-07-31 Brooks Automation, Inc. Substrate transport
JP6077886B2 (ja) * 2013-03-04 2017-02-08 株式会社荏原製作所 めっき装置
JP6018961B2 (ja) * 2013-03-26 2016-11-02 株式会社荏原製作所 めっき装置およびめっき方法
JP6239417B2 (ja) * 2014-03-24 2017-11-29 株式会社荏原製作所 基板処理装置
EP3176288A1 (en) 2015-12-03 2017-06-07 ATOTECH Deutschland GmbH Method for galvanic metal deposition
JP6865613B2 (ja) 2017-03-28 2021-04-28 株式会社荏原製作所 基板搬送装置、基板搬送装置の制御装置、基板搬送装置における変位補償方法、当該方法を実施するプログラムおよび当該プログラムが記録された記録媒体

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