JP2022523569A5 - - Google Patents
Info
- Publication number
- JP2022523569A5 JP2022523569A5 JP2021552810A JP2021552810A JP2022523569A5 JP 2022523569 A5 JP2022523569 A5 JP 2022523569A5 JP 2021552810 A JP2021552810 A JP 2021552810A JP 2021552810 A JP2021552810 A JP 2021552810A JP 2022523569 A5 JP2022523569 A5 JP 2022523569A5
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- reciprocating member
- valve seat
- coupling member
- open position
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US16/297,542 US11236834B2 (en) | 2019-03-08 | 2019-03-08 | Diaphragm valves and methods of operating same |
| US16/297,542 | 2019-03-08 | ||
| PCT/US2020/020210 WO2020185415A1 (en) | 2019-03-08 | 2020-02-27 | Diaphragm valves and methods of operating same |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2022523569A JP2022523569A (ja) | 2022-04-25 |
| JP2022523569A5 true JP2022523569A5 (https=) | 2022-05-25 |
| JP7176130B2 JP7176130B2 (ja) | 2022-11-21 |
Family
ID=72334898
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021552810A Active JP7176130B2 (ja) | 2019-03-08 | 2020-02-27 | ダイヤフラム弁及びその動作方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US11236834B2 (https=) |
| JP (1) | JP7176130B2 (https=) |
| KR (1) | KR102496563B1 (https=) |
| CN (1) | CN113544420B (https=) |
| SG (1) | SG11202109126WA (https=) |
| TW (1) | TWI804718B (https=) |
| WO (1) | WO2020185415A1 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2022209639A1 (ja) * | 2021-04-01 | 2022-10-06 | 株式会社フジキン | 制御器及び気化供給装置 |
| US12533771B2 (en) * | 2021-10-21 | 2026-01-27 | Applied Materials, Inc. | Polishing slurry dispense nozzle |
Family Cites Families (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4475711A (en) | 1982-08-30 | 1984-10-09 | Honeywell Inc. | High pressure gas valve |
| JPS63115970A (ja) * | 1986-10-31 | 1988-05-20 | Motoyama Seisakusho:Kk | ダイヤフラム弁 |
| JPH0875017A (ja) * | 1994-09-05 | 1996-03-19 | Motoyama Seisakusho:Kk | ダイヤフラム弁 |
| JPH09217843A (ja) * | 1995-12-05 | 1997-08-19 | T H I Syst Kk | 二方弁構造 |
| US6026836A (en) | 1998-06-26 | 2000-02-22 | Honeywell Inc. | High pressure diaphragm valve |
| US6241213B1 (en) | 2000-03-07 | 2001-06-05 | Itt Manufacturing Enterprises, Inc. | Diaphragm valve |
| JP4418571B2 (ja) | 2000-04-11 | 2010-02-17 | シーケーディ株式会社 | 高温対応ガス制御バルブ |
| US6786231B2 (en) | 2002-02-01 | 2004-09-07 | Emerson Electric Co. | Fluid flow regulator with restrictor pin |
| US6941963B2 (en) | 2003-06-26 | 2005-09-13 | Planar Systems, Inc. | High-speed diaphragm valve for atomic layer deposition |
| CN1796844A (zh) * | 2004-09-28 | 2006-07-05 | 诺信公司 | 隔膜阀 |
| KR100694666B1 (ko) | 2005-08-24 | 2007-03-13 | 삼성전자주식회사 | 원자층 증착 챔버의 에어 밸브 장치 |
| WO2009114841A2 (en) * | 2008-03-14 | 2009-09-17 | Martin Dreyer | Balancing cage and proportioning disc valves |
| JP2013117241A (ja) | 2011-12-01 | 2013-06-13 | Haruo Kamino | ダイヤフラム弁、ダイヤフラム弁のダイヤフラム破損検出方法およびプロセス制御システム |
| JP5462325B2 (ja) * | 2012-07-06 | 2014-04-02 | 株式会社リケン | 鉄基焼結合金製バルブシート |
| US9157534B2 (en) | 2012-07-20 | 2015-10-13 | Itt Manufacturing Enterprises Llc. | Two-stud diaphragm for diaphragm valves |
| JP2016509242A (ja) * | 2013-03-11 | 2016-03-24 | メカニック・アナリティック・インコーポレーテッド | 密封組立体を備えるダイヤフラム弁、これを含むクロマトグラフシステム、及びその作動方法 |
| US9587759B2 (en) * | 2013-09-20 | 2017-03-07 | Itt Manufacturing Enterprises Llc | Quick release valve compressor |
| US10006664B2 (en) | 2015-05-11 | 2018-06-26 | Emerson Electric Co. | Slow opening and fast closing gas valves and related methods |
| US10453721B2 (en) | 2016-03-15 | 2019-10-22 | Applied Materials, Inc. | Methods and assemblies for gas flow ratio control |
| US10269600B2 (en) | 2016-03-15 | 2019-04-23 | Applied Materials, Inc. | Methods and assemblies for gas flow ratio control |
| US10684159B2 (en) | 2016-06-27 | 2020-06-16 | Applied Materials, Inc. | Methods, systems, and apparatus for mass flow verification based on choked flow |
| KR102341512B1 (ko) | 2016-08-25 | 2021-12-21 | 가부시키가이샤 깃츠 에스시티 | 다이아프램 밸브와 반도체 제조 장치용 유량 제어 기기 |
-
2019
- 2019-03-08 US US16/297,542 patent/US11236834B2/en active Active
-
2020
- 2020-02-27 JP JP2021552810A patent/JP7176130B2/ja active Active
- 2020-02-27 CN CN202080019628.XA patent/CN113544420B/zh active Active
- 2020-02-27 WO PCT/US2020/020210 patent/WO2020185415A1/en not_active Ceased
- 2020-02-27 SG SG11202109126WA patent/SG11202109126WA/en unknown
- 2020-02-27 KR KR1020217032194A patent/KR102496563B1/ko active Active
- 2020-03-06 TW TW109107424A patent/TWI804718B/zh active
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