JPWO2020185415A5 - - Google Patents

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Publication number
JPWO2020185415A5
JPWO2020185415A5 JP2021552810A JP2021552810A JPWO2020185415A5 JP WO2020185415 A5 JPWO2020185415 A5 JP WO2020185415A5 JP 2021552810 A JP2021552810 A JP 2021552810A JP 2021552810 A JP2021552810 A JP 2021552810A JP WO2020185415 A5 JPWO2020185415 A5 JP WO2020185415A5
Authority
JP
Japan
Prior art keywords
diaphragm
reciprocating
reciprocating member
valve seat
coupling member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021552810A
Other languages
English (en)
Japanese (ja)
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JP2022523569A5 (https=
JP7176130B2 (ja
JP2022523569A (ja
Publication date
Priority claimed from US16/297,542 external-priority patent/US11236834B2/en
Application filed filed Critical
Publication of JP2022523569A publication Critical patent/JP2022523569A/ja
Publication of JP2022523569A5 publication Critical patent/JP2022523569A5/ja
Publication of JPWO2020185415A5 publication Critical patent/JPWO2020185415A5/ja
Application granted granted Critical
Publication of JP7176130B2 publication Critical patent/JP7176130B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2021552810A 2019-03-08 2020-02-27 ダイヤフラム弁及びその動作方法 Active JP7176130B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US16/297,542 2019-03-08
US16/297,542 US11236834B2 (en) 2019-03-08 2019-03-08 Diaphragm valves and methods of operating same
PCT/US2020/020210 WO2020185415A1 (en) 2019-03-08 2020-02-27 Diaphragm valves and methods of operating same

Publications (4)

Publication Number Publication Date
JP2022523569A JP2022523569A (ja) 2022-04-25
JP2022523569A5 JP2022523569A5 (https=) 2022-05-25
JPWO2020185415A5 true JPWO2020185415A5 (https=) 2022-05-25
JP7176130B2 JP7176130B2 (ja) 2022-11-21

Family

ID=72334898

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021552810A Active JP7176130B2 (ja) 2019-03-08 2020-02-27 ダイヤフラム弁及びその動作方法

Country Status (7)

Country Link
US (1) US11236834B2 (https=)
JP (1) JP7176130B2 (https=)
KR (1) KR102496563B1 (https=)
CN (1) CN113544420B (https=)
SG (1) SG11202109126WA (https=)
TW (1) TWI804718B (https=)
WO (1) WO2020185415A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102849824B1 (ko) * 2021-04-01 2025-08-25 가부시키가이샤 후지킨 제어기 및 기화 공급 장치
US12533771B2 (en) * 2021-10-21 2026-01-27 Applied Materials, Inc. Polishing slurry dispense nozzle

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4475711A (en) 1982-08-30 1984-10-09 Honeywell Inc. High pressure gas valve
JPS63115970A (ja) * 1986-10-31 1988-05-20 Motoyama Seisakusho:Kk ダイヤフラム弁
JPH0875017A (ja) * 1994-09-05 1996-03-19 Motoyama Seisakusho:Kk ダイヤフラム弁
JPH09217843A (ja) * 1995-12-05 1997-08-19 T H I Syst Kk 二方弁構造
US6026836A (en) 1998-06-26 2000-02-22 Honeywell Inc. High pressure diaphragm valve
US6241213B1 (en) 2000-03-07 2001-06-05 Itt Manufacturing Enterprises, Inc. Diaphragm valve
JP4418571B2 (ja) 2000-04-11 2010-02-17 シーケーディ株式会社 高温対応ガス制御バルブ
US6786231B2 (en) 2002-02-01 2004-09-07 Emerson Electric Co. Fluid flow regulator with restrictor pin
US6941963B2 (en) 2003-06-26 2005-09-13 Planar Systems, Inc. High-speed diaphragm valve for atomic layer deposition
CN1796844A (zh) * 2004-09-28 2006-07-05 诺信公司 隔膜阀
KR100694666B1 (ko) 2005-08-24 2007-03-13 삼성전자주식회사 원자층 증착 챔버의 에어 밸브 장치
WO2009114841A2 (en) * 2008-03-14 2009-09-17 Martin Dreyer Balancing cage and proportioning disc valves
JP2013117241A (ja) * 2011-12-01 2013-06-13 Haruo Kamino ダイヤフラム弁、ダイヤフラム弁のダイヤフラム破損検出方法およびプロセス制御システム
JP5462325B2 (ja) * 2012-07-06 2014-04-02 株式会社リケン 鉄基焼結合金製バルブシート
US9157534B2 (en) 2012-07-20 2015-10-13 Itt Manufacturing Enterprises Llc. Two-stud diaphragm for diaphragm valves
JP2016509242A (ja) * 2013-03-11 2016-03-24 メカニック・アナリティック・インコーポレーテッド 密封組立体を備えるダイヤフラム弁、これを含むクロマトグラフシステム、及びその作動方法
US9587759B2 (en) * 2013-09-20 2017-03-07 Itt Manufacturing Enterprises Llc Quick release valve compressor
US10006664B2 (en) 2015-05-11 2018-06-26 Emerson Electric Co. Slow opening and fast closing gas valves and related methods
US10453721B2 (en) 2016-03-15 2019-10-22 Applied Materials, Inc. Methods and assemblies for gas flow ratio control
US10269600B2 (en) 2016-03-15 2019-04-23 Applied Materials, Inc. Methods and assemblies for gas flow ratio control
US10684159B2 (en) 2016-06-27 2020-06-16 Applied Materials, Inc. Methods, systems, and apparatus for mass flow verification based on choked flow
JP6995047B2 (ja) 2016-08-25 2022-01-14 株式会社キッツエスシーティー ダイヤフラムバルブと半導体製造装置用流量制御機器

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