KR102496563B1 - 다이어프램 밸브들 및 이를 동작시키는 방법들 - Google Patents

다이어프램 밸브들 및 이를 동작시키는 방법들 Download PDF

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Publication number
KR102496563B1
KR102496563B1 KR1020217032194A KR20217032194A KR102496563B1 KR 102496563 B1 KR102496563 B1 KR 102496563B1 KR 1020217032194 A KR1020217032194 A KR 1020217032194A KR 20217032194 A KR20217032194 A KR 20217032194A KR 102496563 B1 KR102496563 B1 KR 102496563B1
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KR
South Korea
Prior art keywords
diaphragm
valve seat
coupling member
reciprocable
valve
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KR1020217032194A
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English (en)
Korean (ko)
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KR20210125610A (ko
Inventor
케네스 레
발라라베 모하메드
소흐랍 조카에이
밍 쑤
Original Assignee
어플라이드 머티어리얼스, 인코포레이티드
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/126—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a diaphragm, bellows, or the like
    • F16K31/1262—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a diaphragm, bellows, or the like one side of the diaphragm being spring loaded
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/02—Construction of housing; Use of materials therefor of lift valves
    • F16K27/0236—Diaphragm cut-off apparatus
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F16K31/1221—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston one side of the piston being spring-loaded
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F16K31/1226—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston the fluid circulating through the piston
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/16—Actuating devices; Operating means; Releasing devices actuated by fluid with a mechanism, other than pulling-or pushing-rod, between fluid motor and closure member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/06—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
    • F16K31/0686—Braking, pressure equilibration, shock absorbing
    • F16K31/0693—Pressure equilibration of the armature

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Details Of Valves (AREA)
  • Fluid-Driven Valves (AREA)
  • Lift Valve (AREA)
  • Multiple-Way Valves (AREA)
KR1020217032194A 2019-03-08 2020-02-27 다이어프램 밸브들 및 이를 동작시키는 방법들 Active KR102496563B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US16/297,542 2019-03-08
US16/297,542 US11236834B2 (en) 2019-03-08 2019-03-08 Diaphragm valves and methods of operating same
PCT/US2020/020210 WO2020185415A1 (en) 2019-03-08 2020-02-27 Diaphragm valves and methods of operating same

Publications (2)

Publication Number Publication Date
KR20210125610A KR20210125610A (ko) 2021-10-18
KR102496563B1 true KR102496563B1 (ko) 2023-02-06

Family

ID=72334898

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020217032194A Active KR102496563B1 (ko) 2019-03-08 2020-02-27 다이어프램 밸브들 및 이를 동작시키는 방법들

Country Status (7)

Country Link
US (1) US11236834B2 (https=)
JP (1) JP7176130B2 (https=)
KR (1) KR102496563B1 (https=)
CN (1) CN113544420B (https=)
SG (1) SG11202109126WA (https=)
TW (1) TWI804718B (https=)
WO (1) WO2020185415A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102849824B1 (ko) * 2021-04-01 2025-08-25 가부시키가이샤 후지킨 제어기 및 기화 공급 장치
US12533771B2 (en) * 2021-10-21 2026-01-27 Applied Materials, Inc. Polishing slurry dispense nozzle

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050011555A1 (en) * 2003-06-26 2005-01-20 Maula Jarmo Ilmari High-speed diaphragm valve for atomic layer deposition
WO2009114841A2 (en) 2008-03-14 2009-09-17 Martin Dreyer Balancing cage and proportioning disc valves
JP2014015645A (ja) 2012-07-06 2014-01-30 Riken Corp 鉄基焼結合金製バルブシート
US20160025688A1 (en) 2013-03-11 2016-01-28 Mecanique Analytique Inc. Diaphragm Valve with Sealing Assembly, Chromatographic System Including Same and Method of Operation Thereof

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4475711A (en) 1982-08-30 1984-10-09 Honeywell Inc. High pressure gas valve
JPS63115970A (ja) * 1986-10-31 1988-05-20 Motoyama Seisakusho:Kk ダイヤフラム弁
JPH0875017A (ja) * 1994-09-05 1996-03-19 Motoyama Seisakusho:Kk ダイヤフラム弁
JPH09217843A (ja) * 1995-12-05 1997-08-19 T H I Syst Kk 二方弁構造
US6026836A (en) 1998-06-26 2000-02-22 Honeywell Inc. High pressure diaphragm valve
US6241213B1 (en) 2000-03-07 2001-06-05 Itt Manufacturing Enterprises, Inc. Diaphragm valve
JP4418571B2 (ja) 2000-04-11 2010-02-17 シーケーディ株式会社 高温対応ガス制御バルブ
US6786231B2 (en) 2002-02-01 2004-09-07 Emerson Electric Co. Fluid flow regulator with restrictor pin
CN1796844A (zh) * 2004-09-28 2006-07-05 诺信公司 隔膜阀
KR100694666B1 (ko) 2005-08-24 2007-03-13 삼성전자주식회사 원자층 증착 챔버의 에어 밸브 장치
JP2013117241A (ja) * 2011-12-01 2013-06-13 Haruo Kamino ダイヤフラム弁、ダイヤフラム弁のダイヤフラム破損検出方法およびプロセス制御システム
US9157534B2 (en) 2012-07-20 2015-10-13 Itt Manufacturing Enterprises Llc. Two-stud diaphragm for diaphragm valves
US9587759B2 (en) * 2013-09-20 2017-03-07 Itt Manufacturing Enterprises Llc Quick release valve compressor
US10006664B2 (en) 2015-05-11 2018-06-26 Emerson Electric Co. Slow opening and fast closing gas valves and related methods
US10453721B2 (en) 2016-03-15 2019-10-22 Applied Materials, Inc. Methods and assemblies for gas flow ratio control
US10269600B2 (en) 2016-03-15 2019-04-23 Applied Materials, Inc. Methods and assemblies for gas flow ratio control
US10684159B2 (en) 2016-06-27 2020-06-16 Applied Materials, Inc. Methods, systems, and apparatus for mass flow verification based on choked flow
JP6995047B2 (ja) 2016-08-25 2022-01-14 株式会社キッツエスシーティー ダイヤフラムバルブと半導体製造装置用流量制御機器

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050011555A1 (en) * 2003-06-26 2005-01-20 Maula Jarmo Ilmari High-speed diaphragm valve for atomic layer deposition
WO2009114841A2 (en) 2008-03-14 2009-09-17 Martin Dreyer Balancing cage and proportioning disc valves
JP2014015645A (ja) 2012-07-06 2014-01-30 Riken Corp 鉄基焼結合金製バルブシート
US20160025688A1 (en) 2013-03-11 2016-01-28 Mecanique Analytique Inc. Diaphragm Valve with Sealing Assembly, Chromatographic System Including Same and Method of Operation Thereof

Also Published As

Publication number Publication date
CN113544420A (zh) 2021-10-22
TW202045843A (zh) 2020-12-16
CN113544420B (zh) 2023-12-08
JP7176130B2 (ja) 2022-11-21
TWI804718B (zh) 2023-06-11
US20200284360A1 (en) 2020-09-10
US11236834B2 (en) 2022-02-01
SG11202109126WA (en) 2021-09-29
JP2022523569A (ja) 2022-04-25
WO2020185415A1 (en) 2020-09-17
KR20210125610A (ko) 2021-10-18

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