JP7176130B2 - ダイヤフラム弁及びその動作方法 - Google Patents

ダイヤフラム弁及びその動作方法 Download PDF

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Publication number
JP7176130B2
JP7176130B2 JP2021552810A JP2021552810A JP7176130B2 JP 7176130 B2 JP7176130 B2 JP 7176130B2 JP 2021552810 A JP2021552810 A JP 2021552810A JP 2021552810 A JP2021552810 A JP 2021552810A JP 7176130 B2 JP7176130 B2 JP 7176130B2
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JP
Japan
Prior art keywords
diaphragm
valve
coupling member
valve seat
reciprocatable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2021552810A
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English (en)
Japanese (ja)
Other versions
JP2022523569A5 (https=
JPWO2020185415A5 (https=
JP2022523569A (ja
Inventor
ケネス ル，
バララベ モハメッド，
ソーラブ ゾカエイ，
ミン シュイ，
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
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Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of JP2022523569A publication Critical patent/JP2022523569A/ja
Publication of JP2022523569A5 publication Critical patent/JP2022523569A5/ja
Publication of JPWO2020185415A5 publication Critical patent/JPWO2020185415A5/ja
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Publication of JP7176130B2 publication Critical patent/JP7176130B2/ja
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/126—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a diaphragm, bellows, or the like
    • F16K31/1262—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a diaphragm, bellows, or the like one side of the diaphragm being spring loaded
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/02—Construction of housing; Use of materials therefor of lift valves
    • F16K27/0236—Diaphragm cut-off apparatus
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F16K31/1221—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston one side of the piston being spring-loaded
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F16K31/1226—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston the fluid circulating through the piston
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/16—Actuating devices; Operating means; Releasing devices actuated by fluid with a mechanism, other than pulling-or pushing-rod, between fluid motor and closure member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/06—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
    • F16K31/0686—Braking, pressure equilibration, shock absorbing
    • F16K31/0693—Pressure equilibration of the armature

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Details Of Valves (AREA)
  • Fluid-Driven Valves (AREA)
  • Lift Valve (AREA)
  • Multiple-Way Valves (AREA)
JP2021552810A 2019-03-08 2020-02-27 ダイヤフラム弁及びその動作方法 Active JP7176130B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US16/297,542 2019-03-08
US16/297,542 US11236834B2 (en) 2019-03-08 2019-03-08 Diaphragm valves and methods of operating same
PCT/US2020/020210 WO2020185415A1 (en) 2019-03-08 2020-02-27 Diaphragm valves and methods of operating same

Publications (4)

Publication Number Publication Date
JP2022523569A JP2022523569A (ja) 2022-04-25
JP2022523569A5 JP2022523569A5 (https=) 2022-05-25
JPWO2020185415A5 JPWO2020185415A5 (https=) 2022-05-25
JP7176130B2 true JP7176130B2 (ja) 2022-11-21

Family

ID=72334898

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021552810A Active JP7176130B2 (ja) 2019-03-08 2020-02-27 ダイヤフラム弁及びその動作方法

Country Status (7)

Country Link
US (1) US11236834B2 (https=)
JP (1) JP7176130B2 (https=)
KR (1) KR102496563B1 (https=)
CN (1) CN113544420B (https=)
SG (1) SG11202109126WA (https=)
TW (1) TWI804718B (https=)
WO (1) WO2020185415A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102849824B1 (ko) * 2021-04-01 2025-08-25 가부시키가이샤 후지킨 제어기 및 기화 공급 장치
US12533771B2 (en) * 2021-10-21 2026-01-27 Applied Materials, Inc. Polishing slurry dispense nozzle

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050011555A1 (en) 2003-06-26 2005-01-20 Maula Jarmo Ilmari High-speed diaphragm valve for atomic layer deposition
WO2009114841A2 (en) 2008-03-14 2009-09-17 Martin Dreyer Balancing cage and proportioning disc valves
JP2013117241A (ja) 2011-12-01 2013-06-13 Haruo Kamino ダイヤフラム弁、ダイヤフラム弁のダイヤフラム破損検出方法およびプロセス制御システム
US20160025688A1 (en) 2013-03-11 2016-01-28 Mecanique Analytique Inc. Diaphragm Valve with Sealing Assembly, Chromatographic System Including Same and Method of Operation Thereof

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4475711A (en) 1982-08-30 1984-10-09 Honeywell Inc. High pressure gas valve
JPS63115970A (ja) * 1986-10-31 1988-05-20 Motoyama Seisakusho:Kk ダイヤフラム弁
JPH0875017A (ja) * 1994-09-05 1996-03-19 Motoyama Seisakusho:Kk ダイヤフラム弁
JPH09217843A (ja) * 1995-12-05 1997-08-19 T H I Syst Kk 二方弁構造
US6026836A (en) 1998-06-26 2000-02-22 Honeywell Inc. High pressure diaphragm valve
US6241213B1 (en) 2000-03-07 2001-06-05 Itt Manufacturing Enterprises, Inc. Diaphragm valve
JP4418571B2 (ja) 2000-04-11 2010-02-17 シーケーディ株式会社 高温対応ガス制御バルブ
US6786231B2 (en) 2002-02-01 2004-09-07 Emerson Electric Co. Fluid flow regulator with restrictor pin
CN1796844A (zh) * 2004-09-28 2006-07-05 诺信公司 隔膜阀
KR100694666B1 (ko) 2005-08-24 2007-03-13 삼성전자주식회사 원자층 증착 챔버의 에어 밸브 장치
JP5462325B2 (ja) * 2012-07-06 2014-04-02 株式会社リケン 鉄基焼結合金製バルブシート
US9157534B2 (en) 2012-07-20 2015-10-13 Itt Manufacturing Enterprises Llc. Two-stud diaphragm for diaphragm valves
US9587759B2 (en) * 2013-09-20 2017-03-07 Itt Manufacturing Enterprises Llc Quick release valve compressor
US10006664B2 (en) 2015-05-11 2018-06-26 Emerson Electric Co. Slow opening and fast closing gas valves and related methods
US10453721B2 (en) 2016-03-15 2019-10-22 Applied Materials, Inc. Methods and assemblies for gas flow ratio control
US10269600B2 (en) 2016-03-15 2019-04-23 Applied Materials, Inc. Methods and assemblies for gas flow ratio control
US10684159B2 (en) 2016-06-27 2020-06-16 Applied Materials, Inc. Methods, systems, and apparatus for mass flow verification based on choked flow
JP6995047B2 (ja) 2016-08-25 2022-01-14 株式会社キッツエスシーティー ダイヤフラムバルブと半導体製造装置用流量制御機器

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050011555A1 (en) 2003-06-26 2005-01-20 Maula Jarmo Ilmari High-speed diaphragm valve for atomic layer deposition
WO2009114841A2 (en) 2008-03-14 2009-09-17 Martin Dreyer Balancing cage and proportioning disc valves
JP2013117241A (ja) 2011-12-01 2013-06-13 Haruo Kamino ダイヤフラム弁、ダイヤフラム弁のダイヤフラム破損検出方法およびプロセス制御システム
US20160025688A1 (en) 2013-03-11 2016-01-28 Mecanique Analytique Inc. Diaphragm Valve with Sealing Assembly, Chromatographic System Including Same and Method of Operation Thereof

Also Published As

Publication number Publication date
CN113544420A (zh) 2021-10-22
TW202045843A (zh) 2020-12-16
CN113544420B (zh) 2023-12-08
KR102496563B1 (ko) 2023-02-06
TWI804718B (zh) 2023-06-11
US20200284360A1 (en) 2020-09-10
US11236834B2 (en) 2022-02-01
SG11202109126WA (en) 2021-09-29
JP2022523569A (ja) 2022-04-25
WO2020185415A1 (en) 2020-09-17
KR20210125610A (ko) 2021-10-18

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