JP2022520971A5 - - Google Patents
Info
- Publication number
- JP2022520971A5 JP2022520971A5 JP2021547729A JP2021547729A JP2022520971A5 JP 2022520971 A5 JP2022520971 A5 JP 2022520971A5 JP 2021547729 A JP2021547729 A JP 2021547729A JP 2021547729 A JP2021547729 A JP 2021547729A JP 2022520971 A5 JP2022520971 A5 JP 2022520971A5
- Authority
- JP
- Japan
- Prior art keywords
- illumination
- air
- volume portion
- intensity
- scattered
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2023219602A JP7639111B2 (ja) | 2019-02-19 | 2023-12-26 | 検査システム及び方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US16/279,395 US11016024B2 (en) | 2019-02-19 | 2019-02-19 | Air scattering standard for light scattering based optical instruments and tools |
| US16/279,395 | 2019-02-19 | ||
| PCT/US2020/017415 WO2020171991A1 (en) | 2019-02-19 | 2020-02-10 | Air scattering standard for light scattering based optical instruments and tools |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023219602A Division JP7639111B2 (ja) | 2019-02-19 | 2023-12-26 | 検査システム及び方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2022520971A JP2022520971A (ja) | 2022-04-04 |
| JP2022520971A5 true JP2022520971A5 (https=) | 2023-02-16 |
Family
ID=72040596
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021547729A Pending JP2022520971A (ja) | 2019-02-19 | 2020-02-10 | 光散乱に基づく光学器械および器具に対する空気散乱基準 |
| JP2023219602A Active JP7639111B2 (ja) | 2019-02-19 | 2023-12-26 | 検査システム及び方法 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023219602A Active JP7639111B2 (ja) | 2019-02-19 | 2023-12-26 | 検査システム及び方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US11016024B2 (https=) |
| JP (2) | JP2022520971A (https=) |
| KR (1) | KR102597965B1 (https=) |
| CN (1) | CN113383228A (https=) |
| TW (1) | TWI829866B (https=) |
| WO (1) | WO2020171991A1 (https=) |
Family Cites Families (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4249244A (en) * | 1978-05-03 | 1981-02-03 | Ppm, Inc. | Electro-optical system and method and apparatus for providing automatically-compensating, traceable calibration and zeroing for light scattering devices |
| US4226533A (en) * | 1978-09-11 | 1980-10-07 | General Electric Company | Optical particle detector |
| US4362387A (en) * | 1980-08-22 | 1982-12-07 | Rockwell International Corporation | Method and apparatus for measuring visibility from the polarization properties of the daylight sky |
| US4854705A (en) * | 1988-04-05 | 1989-08-08 | Aerometrics, Inc. | Method and apparatus to determine the size and velocity of particles using light scatter detection from confocal beams |
| JP2722362B2 (ja) * | 1992-03-27 | 1998-03-04 | 三井金属鉱業株式会社 | 粒子または欠陥の大きさ情報の測定方法および装置 |
| US5741298A (en) | 1995-04-28 | 1998-04-21 | Macleod; Cathel | Method and devices for video-assisted surgical techniques |
| US6091494A (en) * | 1999-05-25 | 2000-07-18 | Venturedyne, Ltd. | Particle sensor with cooled light trap and related method |
| US6326608B1 (en) | 1999-07-09 | 2001-12-04 | Chung-Shan Institute Of Science And Technology | Polarization-type laser detection system |
| US6633831B2 (en) * | 2000-09-20 | 2003-10-14 | Kla Tencor Technologies | Methods and systems for determining a critical dimension and a thin film characteristic of a specimen |
| US6825437B2 (en) * | 2001-01-17 | 2004-11-30 | Hitachi, Ltd. | Apparatus enabling particle detection utilizing wide view lens |
| US8072584B2 (en) | 2002-08-02 | 2011-12-06 | Ophir Corporation | Optical air data systems and methods |
| JP3720799B2 (ja) * | 2002-10-02 | 2005-11-30 | 神栄株式会社 | 花粉センサ |
| JP2004233078A (ja) * | 2003-01-28 | 2004-08-19 | Japan Atom Energy Res Inst | 大気中に浮遊する微粒子等の個数、粒径分布等を遠隔において計測するリモートパーティクルカウンター装置 |
| KR100576364B1 (ko) | 2003-11-21 | 2006-05-03 | 삼성전자주식회사 | 시편 검사장치의 기준값설정장치 및 이를 이용한 기준값설정방법 |
| US7623234B2 (en) * | 2004-03-22 | 2009-11-24 | Quantaspec, Inc. | System and method for detecting and identifying an analyte |
| CA2883638C (en) * | 2004-11-12 | 2017-06-20 | Xtralis Technologies Ltd | Particle detector, system and method |
| KR100684903B1 (ko) * | 2005-07-15 | 2007-02-20 | 삼성전자주식회사 | 반도체 제조 장치 및 파티클 모니터링 방법 |
| CA2993208C (en) * | 2007-11-15 | 2021-01-26 | Garrett Thermal Systems Limited | Particle detection |
| EP2252871A2 (en) * | 2008-02-01 | 2010-11-24 | Cambridge Consultants Limited | Device and method for measuring scattering of radiation |
| WO2010124347A1 (en) * | 2009-05-01 | 2010-11-04 | Xtralis Technologies Ltd | Improvements to particle detectors |
| US8351035B2 (en) * | 2009-05-12 | 2013-01-08 | Thermo Fisher Scientific Inc. | Particulate detection and calibration of sensors |
| US8988673B2 (en) * | 2010-03-23 | 2015-03-24 | Ophir-Spiricon, Llc | Beam scattering laser monitor |
| JP2012137350A (ja) * | 2010-12-27 | 2012-07-19 | Hitachi High-Technologies Corp | 欠陥検査方法および欠陥検査装置 |
| US8960909B2 (en) * | 2012-01-20 | 2015-02-24 | Canon Kabushiki Kaisha | Control apparatus and control method |
| WO2017060164A1 (en) * | 2015-10-08 | 2017-04-13 | Koninklijke Philips N.V. | Optical sensor for particle detection |
| JP6862255B2 (ja) | 2017-04-12 | 2021-04-21 | キヤノン株式会社 | 撮像装置、撮像方法および撮像プログラム |
-
2019
- 2019-02-19 US US16/279,395 patent/US11016024B2/en active Active
-
2020
- 2020-02-10 CN CN202080012505.3A patent/CN113383228A/zh active Pending
- 2020-02-10 KR KR1020217029680A patent/KR102597965B1/ko active Active
- 2020-02-10 WO PCT/US2020/017415 patent/WO2020171991A1/en not_active Ceased
- 2020-02-10 JP JP2021547729A patent/JP2022520971A/ja active Pending
- 2020-02-19 TW TW109105274A patent/TWI829866B/zh active
-
2023
- 2023-12-26 JP JP2023219602A patent/JP7639111B2/ja active Active
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