JP2022514180A5 - - Google Patents

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Publication number
JP2022514180A5
JP2022514180A5 JP2021524017A JP2021524017A JP2022514180A5 JP 2022514180 A5 JP2022514180 A5 JP 2022514180A5 JP 2021524017 A JP2021524017 A JP 2021524017A JP 2021524017 A JP2021524017 A JP 2021524017A JP 2022514180 A5 JP2022514180 A5 JP 2022514180A5
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stage
measurement system
light source
sample holder
sample
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JP2021524017A
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JP2022514180A (ja
JP7786946B2 (ja
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Priority claimed from PCT/US2019/058313 external-priority patent/WO2020096794A1/en
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JP2021524017A 2018-11-07 2019-10-28 導波計測のための方法及び装置 Active JP7786946B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201862756964P 2018-11-07 2018-11-07
US62/756,964 2018-11-07
US201862772887P 2018-11-29 2018-11-29
US62/772,887 2018-11-29
PCT/US2019/058313 WO2020096794A1 (en) 2018-11-07 2019-10-28 Methods and apparatus for waveguide metrology

Publications (3)

Publication Number Publication Date
JP2022514180A JP2022514180A (ja) 2022-02-10
JP2022514180A5 true JP2022514180A5 (https=) 2022-11-08
JP7786946B2 JP7786946B2 (ja) 2025-12-16

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JP2021524017A Active JP7786946B2 (ja) 2018-11-07 2019-10-28 導波計測のための方法及び装置

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US (1) US11029206B2 (https=)
EP (1) EP3877739A4 (https=)
JP (1) JP7786946B2 (https=)
KR (1) KR102848264B1 (https=)
CN (1) CN112997058B (https=)
TW (1) TWI841622B (https=)
WO (1) WO2020096794A1 (https=)

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