CN112997058B - 用于波导计量的方法与设备 - Google Patents

用于波导计量的方法与设备 Download PDF

Info

Publication number
CN112997058B
CN112997058B CN201980073431.1A CN201980073431A CN112997058B CN 112997058 B CN112997058 B CN 112997058B CN 201980073431 A CN201980073431 A CN 201980073431A CN 112997058 B CN112997058 B CN 112997058B
Authority
CN
China
Prior art keywords
stage
waveguide
light
metrology system
sample waveguide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201980073431.1A
Other languages
English (en)
Chinese (zh)
Other versions
CN112997058A (zh
Inventor
傅晋欣
罗格·梅耶·蒂默曼·蒂杰森
卢多维克·戈代
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of CN112997058A publication Critical patent/CN112997058A/zh
Application granted granted Critical
Publication of CN112997058B publication Critical patent/CN112997058B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/01—Head-up displays
    • G02B27/017—Head mounted
    • G02B27/0172—Head mounted characterised by optical features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0207—Details of measuring devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0207—Details of measuring devices
    • G01M11/0214—Details of devices holding the object to be tested
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
    • G01M11/0278—Detecting defects of the object to be tested, e.g. scratches or dust
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0285—Testing optical properties by measuring material or chromatic transmission properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/04—Optical benches therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/30—Testing of optical devices, constituted by fibre optics or optical waveguides
    • G01M11/33—Testing of optical devices, constituted by fibre optics or optical waveguides with a light emitter being disposed at one fibre or waveguide end-face, and a light receiver at the other end-face
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/30—Testing of optical devices, constituted by fibre optics or optical waveguides
    • G01M11/35—Testing of optical devices, constituted by fibre optics or optical waveguides in which light is transversely coupled into or out of the fibre or waveguide, e.g. using integrating spheres
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0081—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 with means for altering, e.g. enlarging, the entrance or exit pupil
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
    • G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
    • G02B6/12019—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by the optical interconnection to or from the AWG devices, e.g. integration or coupling with lasers or photodiodes
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/0304—Detection arrangements using opto-electronic means
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T19/00—Manipulating three-dimensional [3D] models or images for computer graphics
    • G06T19/006—Mixed reality
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00—Auxiliary devices
    • H01P1/16—Auxiliary devices for mode selection, e.g. mode suppression or mode promotion; for mode conversion

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Geometry (AREA)
  • Human Computer Interaction (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
CN201980073431.1A 2018-11-07 2019-10-28 用于波导计量的方法与设备 Active CN112997058B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201862756964P 2018-11-07 2018-11-07
US62/756,964 2018-11-07
US201862772887P 2018-11-29 2018-11-29
US62/772,887 2018-11-29
PCT/US2019/058313 WO2020096794A1 (en) 2018-11-07 2019-10-28 Methods and apparatus for waveguide metrology

Publications (2)

Publication Number Publication Date
CN112997058A CN112997058A (zh) 2021-06-18
CN112997058B true CN112997058B (zh) 2024-07-30

Family

ID=70459610

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201980073431.1A Active CN112997058B (zh) 2018-11-07 2019-10-28 用于波导计量的方法与设备

Country Status (7)

Country Link
US (1) US11029206B2 (https=)
EP (1) EP3877739A4 (https=)
JP (1) JP7786946B2 (https=)
KR (1) KR102848264B1 (https=)
CN (1) CN112997058B (https=)
TW (1) TWI841622B (https=)
WO (1) WO2020096794A1 (https=)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10676325B1 (en) 2018-02-27 2020-06-09 Willie Dell Hoist track adaptor
IL293582B2 (en) * 2019-12-09 2026-03-01 Oliveira Egalon Claudio System and method for side illumination of waveguides
CN111856651B (zh) * 2020-09-02 2025-05-09 舜宇奥来微纳光电信息技术(上海)有限公司 光波导
US11748875B2 (en) * 2020-10-15 2023-09-05 Applied Materials, Inc. See-through metrology systems, apparatus, and methods for optical devices
JP7801335B2 (ja) * 2020-11-24 2026-01-16 アプライド マテリアルズ インコーポレイテッド 拡張現実感計測学ツールのための照明システム
CN116615676A (zh) * 2020-11-24 2023-08-18 应用材料公司 光学装置计量系统与相关方法
US12165341B2 (en) * 2020-11-24 2024-12-10 Applied Materials, Inc. Optical resolution measurement method for optical devices
DE102021200231A1 (de) * 2021-01-13 2022-07-14 Robert Bosch Gesellschaft mit beschränkter Haftung Verfahren zum Ermitteln einer Beugungscharakteristik eines Hologrammelements für eine Datenbrille
CN113218627B (zh) * 2021-03-26 2022-10-14 歌尔股份有限公司 光栅衍射效率测试装置及方法
EP4330740A4 (en) * 2021-04-30 2025-03-12 Magic Leap, Inc. Waveguide with thin illumination layer and manufacturing method
KR20240035921A (ko) * 2021-08-13 2024-03-18 어플라이드 머티어리얼스, 인코포레이티드 도파관 결합기들 및 메타표면들을 위한 풀-필드 계측 툴
CN113884180B (zh) * 2021-09-29 2024-03-12 歌尔光学科技有限公司 衍射光波导的测试系统、方法及装置
US20230251161A1 (en) * 2022-02-10 2023-08-10 Applied Materials, Inc. High-precision and high-throughput measurement of percentage light loss of optical devices
US20250231085A1 (en) * 2022-04-11 2025-07-17 Goertek Optical Technology Co., Ltd. Waveguide measurement device
US20230375410A1 (en) * 2022-05-20 2023-11-23 Facebook Technologies, Llc Apparatuses and systems for optical element measurements
CN115266032B (zh) * 2022-07-11 2025-10-10 杭州驭光光电科技有限公司 一种波导片检测系统
WO2024059310A1 (en) * 2022-09-15 2024-03-21 Applied Materials, Inc. Methods to measure light loss and efficiency of diffraction gratings on optical substrates
CN115931303B (zh) * 2022-10-26 2023-11-17 江西凤凰光学科技有限公司 一种多色衍射光波导的测试方法
DE102022132453B4 (de) 2022-12-07 2026-04-09 Trioptics Gmbh Vorrichtung und Verfahren zum Bestimmen einer Abbildungsqualität zumindest einer Abbildung für einen Prüfling
KR20240127754A (ko) * 2023-02-16 2024-08-23 삼성전자주식회사 광학 계측 설비
CN117367751B (zh) * 2023-10-19 2024-05-10 中聚科技股份有限公司 超脉冲掺铥激光器的性能检测方法及装置
FI131851B1 (en) * 2024-01-24 2026-01-09 Dispelix Oy Optical measurement arrangement

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007130990A2 (en) * 2006-05-01 2007-11-15 Hinds Instruments, Inc. Measurement of linear and circular diattenuation in optical elements

Family Cites Families (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5493393A (en) * 1989-03-17 1996-02-20 The Boeing Company Planar waveguide spectrograph
JPH0454438A (ja) * 1990-06-21 1992-02-21 Jasco Corp 透過・反射光測定装置
JPH0477633A (ja) * 1990-07-19 1992-03-11 Suga Shikenki Kk 測色計
JPH0579947A (ja) * 1991-09-19 1993-03-30 Fujitsu Ltd ホログラム特性評価方法及びその装置
US5233405A (en) * 1991-11-06 1993-08-03 Hewlett-Packard Company Optical spectrum analyzer having double-pass monochromator
JPH07218384A (ja) * 1994-02-07 1995-08-18 Fujitsu Ltd 空間周波数測定装置
US5570207A (en) * 1994-06-28 1996-10-29 Chang; Mao-Chi Holographic image identification system
IL116583A (en) 1995-12-27 2001-06-14 Ruschin Shlomo Spectral analyzer and directional indicator
ATE254291T1 (de) * 1998-04-02 2003-11-15 Elop Electrooptics Ind Ltd Optische holographische vorrichtungen
JP4882139B2 (ja) * 2000-07-19 2012-02-22 大日本印刷株式会社 ホログラム評価装置
JP4627596B2 (ja) * 2001-01-25 2011-02-09 大日本印刷株式会社 光反射体検査装置とその使用方法、光反射体検査方法
US6781701B1 (en) * 2001-04-10 2004-08-24 Intel Corporation Method and apparatus for measuring optical phase and amplitude
US6731380B2 (en) * 2001-06-18 2004-05-04 Applied Optics Center Of Delaware, Inc. Method and apparatus for simultaneous measurement of the refractive index and thickness of thin films
KR100502560B1 (ko) * 2002-07-25 2005-07-20 주식회사 솔루션닉스 광학식 마커를 이용한 3차원 측정 데이터 자동 정렬장치및 그 방법
JP2005257320A (ja) * 2004-03-09 2005-09-22 Tokyo Univ Of Pharmacy & Life Science 分光電気化学セル及びこれを用いた光導波路分光電気化学測定法
US7254290B1 (en) 2004-05-10 2007-08-07 Lockheed Martin Corporation Enhanced waveguide metrology gauge collimator
US7791727B2 (en) 2004-08-16 2010-09-07 Asml Netherlands B.V. Method and apparatus for angular-resolved spectroscopic lithography characterization
JP4976113B2 (ja) 2006-11-29 2012-07-18 三井化学株式会社 光導波路の検査方法および検査装置
JP2010139483A (ja) 2008-12-15 2010-06-24 Synergy Optosystems Co Ltd 光導波路の検査システム及び検査方法
WO2010140998A1 (en) * 2009-06-02 2010-12-09 Vladimir Yankov Optical integrated nanospectrometer and method of manufacturing thereof
JP5467875B2 (ja) 2010-01-18 2014-04-09 シナジーオプトシステムズ株式会社 光導波路の検査装置
JP2013142640A (ja) * 2012-01-11 2013-07-22 Sumitomo Bakelite Co Ltd 光導波路評価装置および光導波路評価方法
KR20130091390A (ko) 2012-02-08 2013-08-19 주식회사 제씨콤 평판형 광도파로의 각도검사장치
WO2013188602A1 (en) * 2012-06-13 2013-12-19 Kla-Tencor Corporation Optical surface scanning systems and methods
JP2014194473A (ja) 2013-03-28 2014-10-09 Hitachi Chemical Co Ltd 光導波路及び光導波路の検査方法
US9846122B2 (en) 2013-11-26 2017-12-19 Nanometrics Incorporated Optical metrology system for spectral imaging of a sample
JP2015215237A (ja) 2014-05-09 2015-12-03 日立化成株式会社 光導波路の検査方法
GB2529003B (en) * 2014-08-03 2020-08-26 Wave Optics Ltd Optical device
JP6468418B2 (ja) * 2014-10-30 2019-02-13 大日本印刷株式会社 反射型体積ホログラムを含むセキュリティ媒体の真贋判定装置、反射型体積ホログラムを含むセキュリティ媒体の真贋判定方法、及び反射型体積ホログラムを含むセキュリティ媒体
JP6331196B2 (ja) 2015-01-05 2018-05-30 シナジーオプトシステムズ株式会社 光学素子、照射光学系、集光光学系および光導波路検査装置
US9372347B1 (en) * 2015-02-09 2016-06-21 Microsoft Technology Licensing, Llc Display system
US20160265974A1 (en) * 2015-03-09 2016-09-15 Corning Incorporated Glass waveguide spectrophotometer
WO2017165403A1 (en) * 2016-03-21 2017-09-28 Nueon Inc. Porous mesh spectrometry methods and apparatus
JP6730125B2 (ja) * 2016-08-01 2020-07-29 株式会社ディスコ 計測装置
AU2017350941B2 (en) * 2016-10-28 2022-07-28 Magic Leap, Inc. Method and system for large field of view display with scanning reflector
JP2018146437A (ja) 2017-03-07 2018-09-20 日東電工株式会社 光導波路の検査方法およびそれを用いた光導波路の製法
US11092427B2 (en) * 2018-09-25 2021-08-17 The Charles Stark Draper Laboratory, Inc. Metrology and profilometry using light field generator
JP7702880B2 (ja) * 2019-04-15 2025-07-04 アプライド マテリアルズ インコーポレイテッド 測定システム及び光の回折方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007130990A2 (en) * 2006-05-01 2007-11-15 Hinds Instruments, Inc. Measurement of linear and circular diattenuation in optical elements

Also Published As

Publication number Publication date
TWI841622B (zh) 2024-05-11
KR20210072123A (ko) 2021-06-16
EP3877739A1 (en) 2021-09-15
TW202026617A (zh) 2020-07-16
US20200141802A1 (en) 2020-05-07
KR102848264B1 (ko) 2025-08-19
JP2022514180A (ja) 2022-02-10
WO2020096794A1 (en) 2020-05-14
JP7786946B2 (ja) 2025-12-16
CN112997058A (zh) 2021-06-18
EP3877739A4 (en) 2022-07-27
US11029206B2 (en) 2021-06-08

Similar Documents

Publication Publication Date Title
CN112997058B (zh) 用于波导计量的方法与设备
US11988574B2 (en) Illumination system for AR metrology tool
JP2021505928A (ja) 光学デバイスの位置合わせ方法
US20220122240A1 (en) In-line metrology systems, apparatus, and methods for optical devices
CN106323199A (zh) 组合调零激光大工作距自准直装置与方法
WO2021050258A1 (en) Measurement system and grating pattern array
US12398998B2 (en) Methods for high-resolution, stable measurement of pitch and orientation in optical gratings
KR20250043403A (ko) 도광 광학 요소의 검사를 위한 신규한 기술
JP2026500989A (ja) 光学格子のための形状寸法パラメータ測定の方法
TW202323963A (zh) 用於顯示面板的整合式電子和光子背板架構
CN115468742A (zh) 一种光波导测试系统
TWI920151B (zh) 用於光學裝置的線內計量系統、設備及方法
CN121816493A (zh) 用于紧凑型光学计量系统的镜折叠照明
TW202507243A (zh) 用於光學元件的調制傳遞函數測量裝置和方法
HK40100051A (zh) 线扫描三维传感系统

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant