TWI841622B - 用於波導計量的方法與設備 - Google Patents

用於波導計量的方法與設備 Download PDF

Info

Publication number
TWI841622B
TWI841622B TW108140205A TW108140205A TWI841622B TW I841622 B TWI841622 B TW I841622B TW 108140205 A TW108140205 A TW 108140205A TW 108140205 A TW108140205 A TW 108140205A TW I841622 B TWI841622 B TW I841622B
Authority
TW
Taiwan
Prior art keywords
platform
light source
waveguide
metrology system
light
Prior art date
Application number
TW108140205A
Other languages
English (en)
Chinese (zh)
Other versions
TW202026617A (zh
Inventor
晉欣 傅
拉特格 梅耶帝莫曼泰森
魯多維 葛迪
Original Assignee
美商應用材料股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 美商應用材料股份有限公司 filed Critical 美商應用材料股份有限公司
Publication of TW202026617A publication Critical patent/TW202026617A/zh
Application granted granted Critical
Publication of TWI841622B publication Critical patent/TWI841622B/zh

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/01—Head-up displays
    • G02B27/017—Head mounted
    • G02B27/0172—Head mounted characterised by optical features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0207—Details of measuring devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0207—Details of measuring devices
    • G01M11/0214—Details of devices holding the object to be tested
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
    • G01M11/0278—Detecting defects of the object to be tested, e.g. scratches or dust
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0285—Testing optical properties by measuring material or chromatic transmission properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/04—Optical benches therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/30—Testing of optical devices, constituted by fibre optics or optical waveguides
    • G01M11/33—Testing of optical devices, constituted by fibre optics or optical waveguides with a light emitter being disposed at one fibre or waveguide end-face, and a light receiver at the other end-face
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/30—Testing of optical devices, constituted by fibre optics or optical waveguides
    • G01M11/35—Testing of optical devices, constituted by fibre optics or optical waveguides in which light is transversely coupled into or out of the fibre or waveguide, e.g. using integrating spheres
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0081—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 with means for altering, e.g. enlarging, the entrance or exit pupil
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
    • G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
    • G02B6/12019—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by the optical interconnection to or from the AWG devices, e.g. integration or coupling with lasers or photodiodes
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/0304—Detection arrangements using opto-electronic means
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T19/00—Manipulating three-dimensional [3D] models or images for computer graphics
    • G06T19/006—Mixed reality
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00—Auxiliary devices
    • H01P1/16—Auxiliary devices for mode selection, e.g. mode suppression or mode promotion; for mode conversion

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Geometry (AREA)
  • Human Computer Interaction (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
TW108140205A 2018-11-07 2019-11-06 用於波導計量的方法與設備 TWI841622B (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201862756964P 2018-11-07 2018-11-07
US62/756,964 2018-11-07
US201862772887P 2018-11-29 2018-11-29
US62/772,887 2018-11-29

Publications (2)

Publication Number Publication Date
TW202026617A TW202026617A (zh) 2020-07-16
TWI841622B true TWI841622B (zh) 2024-05-11

Family

ID=70459610

Family Applications (1)

Application Number Title Priority Date Filing Date
TW108140205A TWI841622B (zh) 2018-11-07 2019-11-06 用於波導計量的方法與設備

Country Status (7)

Country Link
US (1) US11029206B2 (https=)
EP (1) EP3877739A4 (https=)
JP (1) JP7786946B2 (https=)
KR (1) KR102848264B1 (https=)
CN (1) CN112997058B (https=)
TW (1) TWI841622B (https=)
WO (1) WO2020096794A1 (https=)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10676325B1 (en) 2018-02-27 2020-06-09 Willie Dell Hoist track adaptor
IL293582B2 (en) * 2019-12-09 2026-03-01 Oliveira Egalon Claudio System and method for side illumination of waveguides
CN111856651B (zh) * 2020-09-02 2025-05-09 舜宇奥来微纳光电信息技术(上海)有限公司 光波导
US11748875B2 (en) * 2020-10-15 2023-09-05 Applied Materials, Inc. See-through metrology systems, apparatus, and methods for optical devices
JP7801335B2 (ja) * 2020-11-24 2026-01-16 アプライド マテリアルズ インコーポレイテッド 拡張現実感計測学ツールのための照明システム
CN116615676A (zh) * 2020-11-24 2023-08-18 应用材料公司 光学装置计量系统与相关方法
US12165341B2 (en) * 2020-11-24 2024-12-10 Applied Materials, Inc. Optical resolution measurement method for optical devices
DE102021200231A1 (de) * 2021-01-13 2022-07-14 Robert Bosch Gesellschaft mit beschränkter Haftung Verfahren zum Ermitteln einer Beugungscharakteristik eines Hologrammelements für eine Datenbrille
CN113218627B (zh) * 2021-03-26 2022-10-14 歌尔股份有限公司 光栅衍射效率测试装置及方法
EP4330740A4 (en) * 2021-04-30 2025-03-12 Magic Leap, Inc. Waveguide with thin illumination layer and manufacturing method
KR20240035921A (ko) * 2021-08-13 2024-03-18 어플라이드 머티어리얼스, 인코포레이티드 도파관 결합기들 및 메타표면들을 위한 풀-필드 계측 툴
CN113884180B (zh) * 2021-09-29 2024-03-12 歌尔光学科技有限公司 衍射光波导的测试系统、方法及装置
US20230251161A1 (en) * 2022-02-10 2023-08-10 Applied Materials, Inc. High-precision and high-throughput measurement of percentage light loss of optical devices
US20250231085A1 (en) * 2022-04-11 2025-07-17 Goertek Optical Technology Co., Ltd. Waveguide measurement device
US20230375410A1 (en) * 2022-05-20 2023-11-23 Facebook Technologies, Llc Apparatuses and systems for optical element measurements
CN115266032B (zh) * 2022-07-11 2025-10-10 杭州驭光光电科技有限公司 一种波导片检测系统
WO2024059310A1 (en) * 2022-09-15 2024-03-21 Applied Materials, Inc. Methods to measure light loss and efficiency of diffraction gratings on optical substrates
CN115931303B (zh) * 2022-10-26 2023-11-17 江西凤凰光学科技有限公司 一种多色衍射光波导的测试方法
DE102022132453B4 (de) 2022-12-07 2026-04-09 Trioptics Gmbh Vorrichtung und Verfahren zum Bestimmen einer Abbildungsqualität zumindest einer Abbildung für einen Prüfling
KR20240127754A (ko) * 2023-02-16 2024-08-23 삼성전자주식회사 광학 계측 설비
CN117367751B (zh) * 2023-10-19 2024-05-10 中聚科技股份有限公司 超脉冲掺铥激光器的性能检测方法及装置
FI131851B1 (en) * 2024-01-24 2026-01-09 Dispelix Oy Optical measurement arrangement

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6118119A (en) * 1995-12-27 2000-09-12 Ruschin; Shlomo Spectral analyzer with wavelength and direction indicator
US20030025899A1 (en) * 2001-06-18 2003-02-06 Amara Mohamed Kamel Method and apparatus for simultaneous measurement of the refractive index and thickness of thin films
US6781701B1 (en) * 2001-04-10 2004-08-24 Intel Corporation Method and apparatus for measuring optical phase and amplitude
WO2016144925A1 (en) * 2015-03-09 2016-09-15 Corning Incorporated Glass waveguide spectrophotometer
US20160290927A1 (en) * 2013-11-26 2016-10-06 Nanometrics Incorporated Optical metrology system for spectral imaging of a sample

Family Cites Families (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5493393A (en) * 1989-03-17 1996-02-20 The Boeing Company Planar waveguide spectrograph
JPH0454438A (ja) * 1990-06-21 1992-02-21 Jasco Corp 透過・反射光測定装置
JPH0477633A (ja) * 1990-07-19 1992-03-11 Suga Shikenki Kk 測色計
JPH0579947A (ja) * 1991-09-19 1993-03-30 Fujitsu Ltd ホログラム特性評価方法及びその装置
US5233405A (en) * 1991-11-06 1993-08-03 Hewlett-Packard Company Optical spectrum analyzer having double-pass monochromator
JPH07218384A (ja) * 1994-02-07 1995-08-18 Fujitsu Ltd 空間周波数測定装置
US5570207A (en) * 1994-06-28 1996-10-29 Chang; Mao-Chi Holographic image identification system
ATE254291T1 (de) * 1998-04-02 2003-11-15 Elop Electrooptics Ind Ltd Optische holographische vorrichtungen
JP4882139B2 (ja) * 2000-07-19 2012-02-22 大日本印刷株式会社 ホログラム評価装置
JP4627596B2 (ja) * 2001-01-25 2011-02-09 大日本印刷株式会社 光反射体検査装置とその使用方法、光反射体検査方法
KR100502560B1 (ko) * 2002-07-25 2005-07-20 주식회사 솔루션닉스 광학식 마커를 이용한 3차원 측정 데이터 자동 정렬장치및 그 방법
JP2005257320A (ja) * 2004-03-09 2005-09-22 Tokyo Univ Of Pharmacy & Life Science 分光電気化学セル及びこれを用いた光導波路分光電気化学測定法
US7254290B1 (en) 2004-05-10 2007-08-07 Lockheed Martin Corporation Enhanced waveguide metrology gauge collimator
US7791727B2 (en) 2004-08-16 2010-09-07 Asml Netherlands B.V. Method and apparatus for angular-resolved spectroscopic lithography characterization
CN101449134B (zh) * 2006-05-01 2011-08-03 海因兹仪器公司 光学元件中线性和圆形双衰减的测量
JP4976113B2 (ja) 2006-11-29 2012-07-18 三井化学株式会社 光導波路の検査方法および検査装置
JP2010139483A (ja) 2008-12-15 2010-06-24 Synergy Optosystems Co Ltd 光導波路の検査システム及び検査方法
WO2010140998A1 (en) * 2009-06-02 2010-12-09 Vladimir Yankov Optical integrated nanospectrometer and method of manufacturing thereof
JP5467875B2 (ja) 2010-01-18 2014-04-09 シナジーオプトシステムズ株式会社 光導波路の検査装置
JP2013142640A (ja) * 2012-01-11 2013-07-22 Sumitomo Bakelite Co Ltd 光導波路評価装置および光導波路評価方法
KR20130091390A (ko) 2012-02-08 2013-08-19 주식회사 제씨콤 평판형 광도파로의 각도검사장치
WO2013188602A1 (en) * 2012-06-13 2013-12-19 Kla-Tencor Corporation Optical surface scanning systems and methods
JP2014194473A (ja) 2013-03-28 2014-10-09 Hitachi Chemical Co Ltd 光導波路及び光導波路の検査方法
JP2015215237A (ja) 2014-05-09 2015-12-03 日立化成株式会社 光導波路の検査方法
GB2529003B (en) * 2014-08-03 2020-08-26 Wave Optics Ltd Optical device
JP6468418B2 (ja) * 2014-10-30 2019-02-13 大日本印刷株式会社 反射型体積ホログラムを含むセキュリティ媒体の真贋判定装置、反射型体積ホログラムを含むセキュリティ媒体の真贋判定方法、及び反射型体積ホログラムを含むセキュリティ媒体
JP6331196B2 (ja) 2015-01-05 2018-05-30 シナジーオプトシステムズ株式会社 光学素子、照射光学系、集光光学系および光導波路検査装置
US9372347B1 (en) * 2015-02-09 2016-06-21 Microsoft Technology Licensing, Llc Display system
WO2017165403A1 (en) * 2016-03-21 2017-09-28 Nueon Inc. Porous mesh spectrometry methods and apparatus
JP6730125B2 (ja) * 2016-08-01 2020-07-29 株式会社ディスコ 計測装置
AU2017350941B2 (en) * 2016-10-28 2022-07-28 Magic Leap, Inc. Method and system for large field of view display with scanning reflector
JP2018146437A (ja) 2017-03-07 2018-09-20 日東電工株式会社 光導波路の検査方法およびそれを用いた光導波路の製法
US11092427B2 (en) * 2018-09-25 2021-08-17 The Charles Stark Draper Laboratory, Inc. Metrology and profilometry using light field generator
JP7702880B2 (ja) * 2019-04-15 2025-07-04 アプライド マテリアルズ インコーポレイテッド 測定システム及び光の回折方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6118119A (en) * 1995-12-27 2000-09-12 Ruschin; Shlomo Spectral analyzer with wavelength and direction indicator
US6781701B1 (en) * 2001-04-10 2004-08-24 Intel Corporation Method and apparatus for measuring optical phase and amplitude
US20030025899A1 (en) * 2001-06-18 2003-02-06 Amara Mohamed Kamel Method and apparatus for simultaneous measurement of the refractive index and thickness of thin films
US20160290927A1 (en) * 2013-11-26 2016-10-06 Nanometrics Incorporated Optical metrology system for spectral imaging of a sample
WO2016144925A1 (en) * 2015-03-09 2016-09-15 Corning Incorporated Glass waveguide spectrophotometer

Also Published As

Publication number Publication date
KR20210072123A (ko) 2021-06-16
EP3877739A1 (en) 2021-09-15
TW202026617A (zh) 2020-07-16
US20200141802A1 (en) 2020-05-07
CN112997058B (zh) 2024-07-30
KR102848264B1 (ko) 2025-08-19
JP2022514180A (ja) 2022-02-10
WO2020096794A1 (en) 2020-05-14
JP7786946B2 (ja) 2025-12-16
CN112997058A (zh) 2021-06-18
EP3877739A4 (en) 2022-07-27
US11029206B2 (en) 2021-06-08

Similar Documents

Publication Publication Date Title
TWI841622B (zh) 用於波導計量的方法與設備
US12298516B2 (en) Systems and methods for display binocular deformation compensation
US20240146897A1 (en) Method and system for tracking eye movement in conjunction with a light scanning projector
US8582206B2 (en) Laser-scanning virtual image display
CN114902112A (zh) 具有全息中继器和全息图像组合器的显示器
WO2020051338A1 (en) Pixel cell with multiple photodiodes
CN113646685A (zh) 用于光源的波导集中器
JP2020115213A (ja) 二重混合光照射フィールドデバイス
CN120469065A (zh) 用于近眼显示器的多通道扫描仪
US11624926B1 (en) Display systems with collection optics for disparity sensing detectors
CN114450620A (zh) 用于近眼显示器的低倾角光瞳中继器
JP2023549313A (ja) インターモーダル結合によるスラブ導波路およびプロジェクタ
US20230393322A1 (en) Lightguide with image-forming diffractive in-coupler
KR20220124260A (ko) 나노임프린트 마이크로렌즈 어레이 및 그의 제조방법
CN117413215A (zh) 双反射器光学部件
CN116009243A (zh) 基于波导成像的眼睛跟踪
US20240179284A1 (en) Dual-path disparity sensor
US20230314126A1 (en) Methods for high-resolution, stable measurement of pitch and orientation in optical gratings
KR20250043403A (ko) 도광 광학 요소의 검사를 위한 신규한 기술
US11044460B1 (en) Polychromatic object imager
TW202323963A (zh) 用於顯示面板的整合式電子和光子背板架構
TW202300987A (zh) 用於改善視場的頭戴式顯示器中的波導配置
TWI920151B (zh) 用於光學裝置的線內計量系統、設備及方法
JP2025030070A (ja) 光学計測装置