JP2022512366A5 - - Google Patents

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Publication number
JP2022512366A5
JP2022512366A5 JP2021533308A JP2021533308A JP2022512366A5 JP 2022512366 A5 JP2022512366 A5 JP 2022512366A5 JP 2021533308 A JP2021533308 A JP 2021533308A JP 2021533308 A JP2021533308 A JP 2021533308A JP 2022512366 A5 JP2022512366 A5 JP 2022512366A5
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JP
Japan
Prior art keywords
ion beam
fins
angle
diffraction grating
substrate
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Application number
JP2021533308A
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English (en)
Japanese (ja)
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JP2022512366A (ja
JP7494179B2 (ja
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Priority claimed from PCT/US2019/064592 external-priority patent/WO2020131394A1/en
Publication of JP2022512366A publication Critical patent/JP2022512366A/ja
Publication of JP2022512366A5 publication Critical patent/JP2022512366A5/ja
Priority to JP2024083599A priority Critical patent/JP2024122990A/ja
Application granted granted Critical
Publication of JP7494179B2 publication Critical patent/JP7494179B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2021533308A 2018-12-17 2019-12-05 傾斜回折格子のローリングｋベクトルの調整 Active JP7494179B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2024083599A JP2024122990A (ja) 2018-12-17 2024-05-22 傾斜回折格子のローリングｋベクトルの調整

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201862780815P 2018-12-17 2018-12-17
US62/780,815 2018-12-17
PCT/US2019/064592 WO2020131394A1 (en) 2018-12-17 2019-12-05 Modulation of rolling k vectors of angled gratings

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2024083599A Division JP2024122990A (ja) 2018-12-17 2024-05-22 傾斜回折格子のローリングｋベクトルの調整

Publications (3)

Publication Number Publication Date
JP2022512366A JP2022512366A (ja) 2022-02-03
JP2022512366A5 true JP2022512366A5 (https=) 2022-12-13
JP7494179B2 JP7494179B2 (ja) 2024-06-03

Family

ID=71071213

Family Applications (3)

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JP2021533308A Active JP7494179B2 (ja) 2018-12-17 2019-12-05 傾斜回折格子のローリングｋベクトルの調整
JP2021533784A Active JP7417611B2 (ja) 2018-12-17 2019-12-05 傾斜回折格子のローリングｋベクトルの調整
JP2024083599A Pending JP2024122990A (ja) 2018-12-17 2024-05-22 傾斜回折格子のローリングｋベクトルの調整

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP2021533784A Active JP7417611B2 (ja) 2018-12-17 2019-12-05 傾斜回折格子のローリングｋベクトルの調整
JP2024083599A Pending JP2024122990A (ja) 2018-12-17 2024-05-22 傾斜回折格子のローリングｋベクトルの調整

Country Status (7)

Country Link
US (4) US11367589B2 (https=)
EP (2) EP3899607A4 (https=)
JP (3) JP7494179B2 (https=)
KR (3) KR20250133452A (https=)
CN (2) CN113195151B (https=)
TW (2) TWI846780B (https=)
WO (2) WO2020131394A1 (https=)

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WO2023205288A1 (en) * 2022-04-20 2023-10-26 Applied Materials, Inc. Method for roughness reduction in manufacturing optical device structures

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