JP2022511922A - プラズマ化学気相成長法のための膜応力制御 - Google Patents
プラズマ化学気相成長法のための膜応力制御 Download PDFInfo
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Abstract
Description
分野
本開示の実施態様は、一般に、大面積基板を処理するための方法及び装置に関する。より具体的には、本開示の実施態様は、デバイス製造のための化学蒸着システム及びその方法に関する。
ディスプレイの製造において、多くのプロセスが、液晶ディスプレイ(LCD)及び/又は有機発光ダイオード(OLED)基板のような基板上に薄膜を堆積させて、その上に電子デバイスを形成するために採用されている。堆積は、一般に、温度制御された基板支持体上に配置された基板を有する真空チャンバ中に前駆体ガスを導入することによって達成される。前駆体ガスは、典型的には、真空チャンバの上部付近に配置されたガス分配プレートを通して導かれる。真空チャンバ内の前駆体ガスは、チャンバに連結された1つ又は複数のRF源からチャンバ内に配置された導電性シャワーヘッドに高周波(RF)電力を印加することによってプラズマに励起され得る。励起されたガスは、反応して、温度制御された基板支持体上に配置された基板の表面上に材料の層を形成する。
本開示の実施態様は、大面積基板を処理するための方法及び装置に関する。より具体的には、本開示の実施態様は、デバイス製造のための化学蒸着システム及びその方法に関する。
本開示の実施態様は、大面積基板上に複数の層を堆積させるための方法及び装置を含む。一実施態様では、プラズマ堆積のための処理チャンバが提供される。処理チャンバは、シャワーヘッド及び基板支持アセンブリを含む。シャワーヘッドは、RF電源及び接地に連結されており、複数の穿孔ガス拡散部材を含む。複数のプラズマアプリケータがシャワーヘッド内に配置され、ここで、複数のプラズマアプリケータのうちの1つのプラズマアプリケータは、複数の穿孔ガス拡散部材のうちの1つに対応する。さらに、DCバイアス電源が、基板支持アセンブリに連結されている。
Claims (15)
- プラズマ堆積チャンバであって、
各々が複数の支持部材のうちの1つ又は複数に連結された複数の穿孔部材を有するシャワーヘッド;
複数の誘電体プレートであって、前記複数の誘電体プレートのそれぞれが、前記複数の穿孔部材のうちの1つに対応する、複数の誘電体プレート;
複数の誘導コイルであって、前記複数の誘導コイルのうちの1つの誘導コイルが、前記複数の誘電体プレートのうちの1つに対応し、前記複数の支持部材が、前記誘導コイルと前記穿孔部材との間に形成される容積に前駆体ガスを提供する、複数の誘導コイル;及び
基板支持アセンブリであって、
静電チャッキング電源に連結された静電チャックアセンブリであって、前記静電チャックアセンブリが、前記基板支持アセンブリの最上部の位置に配置された、静電チャックアセンブリと;
前記基板支持アセンブリの最下部の位置に配置された絶縁層と;
線形接続に配置されたDCタイプの電源とローパスフィルタに連結された基板バイアスプレートであって、前記基板バイアスプレートが、前記静電チャックアセンブリと前記絶縁層との間に配置された、基板バイアスプレートと
を備える基板支持アセンブリ
を備える、プラズマ堆積チャンバ。 - 前記支持部材が、前記前駆体ガスを流すためにその中に形成された導管を含む、請求項1に記載のチャンバ。
- 前記支持部材が、冷却剤を流すためにその中に形成された冷却剤チャネルをさらに含む、請求項2に記載のチャンバ。
- 前記誘導コイルの各々と関連する誘電体プレートをさらに備え、前記誘電体プレートが前記容積の一側面と境を接する、請求項1に記載のチャンバ。
- 前記支持部材が、前記複数の穿孔部材、誘電体プレート、及び誘導コイルの各々を隔てる格子状の構成で配置されている、請求項1に記載のチャンバ。
- 前記複数の誘導コイルの各々が、RFタイプの電源に連結されている、請求項1に記載のチャンバ。
- 前記DCタイプの電源が、正又は負のいずれかの極性で、前記基板バイアスプレートに一定のDCバイアスを提供するように構成されている、請求項1に記載のチャンバ。
- 前記DCバイアスが、約50Wから約1000Wの電力レベルで提供される、請求項7に記載のチャンバ。
- 前記DCタイプの電源が、正又は負のいずれかの極性で、前記基板バイアスプレートにパルスDCバイアスを提供するように構成されている、請求項1に記載のチャンバ。
- 前記パルスDCバイアスが、約50kHzから約500kHzの周波数でパルス化される、請求項9に記載のチャンバ。
- 基板上に膜を堆積させるための方法であって、
前駆体ガスを処理チャンバ内のシャワーヘッドの複数のガス容積に流すことであって、前記ガス容積の各々が、穿孔部材と、それぞれのガス容積と電気的に通信している誘導コイルとを備える、流すこと;
前記ガス容積の各々への前駆体ガスの流量を変化させること;
誘導コイルにRF電力を印加して、電磁場を生成し、前記ガス容積の各々内の前記前駆体ガスにエネルギーを与えること;
前記エネルギーを与えられた前駆体ガスを前記処理チャンバの処理領域中に流すこと;及び
基板支持体内のバイアスプレートにDCバイアス電力を印加して、前記基板上の前記膜の堆積を調節すること
を含む方法。 - 前記シャワーヘッドが複数のゾーンを備え、前記ゾーンの各々においてガス流量が異なる、請求項11に記載の方法。
- 前記バイアスプレートが、DCタイプの電源に連結されている、請求項11に記載の方法。
- 前記DCバイアス電力が、正又は負のいずれかの極性の一定のDCバイアスである、請求項13に記載の方法。
- 前記DCバイアス電力が、正又は負のいずれかの極性のパルスDCバイアスである、請求項13に記載の方法。
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