JP2022501580A5 - - Google Patents
Info
- Publication number
- JP2022501580A5 JP2022501580A5 JP2021512758A JP2021512758A JP2022501580A5 JP 2022501580 A5 JP2022501580 A5 JP 2022501580A5 JP 2021512758 A JP2021512758 A JP 2021512758A JP 2021512758 A JP2021512758 A JP 2021512758A JP 2022501580 A5 JP2022501580 A5 JP 2022501580A5
- Authority
- JP
- Japan
- Prior art keywords
- modalities
- lighting
- inspection system
- light
- areas
- Prior art date
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201862727561P | 2018-09-06 | 2018-09-06 | |
| US62/727,561 | 2018-09-06 | ||
| PCT/IL2019/050958 WO2020049551A1 (en) | 2018-09-06 | 2019-08-27 | Multimodality multiplexed illumination for optical inspection systems |
Publications (4)
| Publication Number | Publication Date |
|---|---|
| JP2022501580A JP2022501580A (ja) | 2022-01-06 |
| JP2022501580A5 true JP2022501580A5 (https=) | 2022-09-01 |
| JPWO2020049551A5 JPWO2020049551A5 (https=) | 2022-09-01 |
| JP7500545B2 JP7500545B2 (ja) | 2024-06-17 |
Family
ID=69722341
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021512758A Active JP7500545B2 (ja) | 2018-09-06 | 2019-08-27 | 光学検査システム向けマルチモダリティ多重化照明 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US11974046B2 (https=) |
| EP (1) | EP3847446A4 (https=) |
| JP (1) | JP7500545B2 (https=) |
| KR (1) | KR102831958B1 (https=) |
| CN (1) | CN112888936A (https=) |
| WO (1) | WO2020049551A1 (https=) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IT201900005536A1 (it) * | 2019-04-10 | 2020-10-10 | Doss Visual Solution S R L | Metodo di acquisizione immagini per una macchina di ispezione ottica |
| US12429430B2 (en) * | 2021-08-26 | 2025-09-30 | Emage Equipment Pte. Ltd. | Adaptive lighting system and method for inspection of complex objects |
| CN114813761B (zh) * | 2022-06-27 | 2022-10-14 | 浙江双元科技股份有限公司 | 一种基于双光频闪的薄膜针孔和亮斑缺陷识别系统及方法 |
| US12511731B2 (en) | 2023-05-09 | 2025-12-30 | Orbotech Ltd. | System and method for three-dimensional imaging of samples using a machine learning algorithm |
| TWI881588B (zh) * | 2023-12-11 | 2025-04-21 | 家碩科技股份有限公司 | 可消除電路表面金屬紋路的光學檢測系統 |
| EP4682487A1 (de) * | 2024-07-18 | 2026-01-21 | IPAC Improve Process Analytics and Control GmbH | Farbmesssystem und verfahren für ortsaufgelöste spektrale farbmessungen einer strukturierten und bedruckten oberfläche |
| DE102024208944A1 (de) * | 2024-09-18 | 2026-03-19 | Isra Vision Gmbh | Beleuchtungseinrichtung zum Erzeugen einer Linienbeleuchtung |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5058982A (en) | 1989-06-21 | 1991-10-22 | Orbot Systems Ltd. | Illumination system and inspection apparatus including same |
| DE19829986C1 (de) * | 1998-07-04 | 2000-03-30 | Lis Laser Imaging Systems Gmbh | Verfahren zur Direktbelichtung von Leiterplattensubstraten |
| IL131284A (en) * | 1999-08-05 | 2003-05-29 | Orbotech Ltd | Illumination for inspecting surfaces of articles |
| US20020186878A1 (en) | 2001-06-07 | 2002-12-12 | Hoon Tan Seow | System and method for multiple image analysis |
| CN1788194A (zh) * | 2003-01-09 | 2006-06-14 | 奥博泰克有限公司 | 用于同时进行二维和形貌检查的方法和装置 |
| US7641365B2 (en) * | 2006-10-13 | 2010-01-05 | Orbotech Ltd | Linear light concentrator |
| JP4932595B2 (ja) | 2007-05-17 | 2012-05-16 | 新日本製鐵株式会社 | 表面疵検査装置 |
| US8462329B2 (en) * | 2010-07-30 | 2013-06-11 | Kla-Tencor Corp. | Multi-spot illumination for wafer inspection |
| US9279774B2 (en) * | 2011-07-12 | 2016-03-08 | Kla-Tencor Corp. | Wafer inspection |
| JP2014009969A (ja) * | 2012-06-27 | 2014-01-20 | Sumitomo Metal Mining Co Ltd | 画像処理装置、画像処理方法、及び露光パターン検査装置 |
| JP2014052203A (ja) | 2012-09-05 | 2014-03-20 | Toshiba Mitsubishi-Electric Industrial System Corp | 平面形状測定装置 |
| JP5890953B2 (ja) * | 2013-09-30 | 2016-03-22 | 名古屋電機工業株式会社 | 検査装置 |
| US9606056B2 (en) | 2013-12-06 | 2017-03-28 | Canon Kabushiki Kaisha | Selection of spectral bands or filters for material classification under multiplexed illumination |
| US9638644B2 (en) | 2013-08-08 | 2017-05-02 | Camtek Ltd. | Multiple mode inspection system and method for evaluating a substrate by a multiple mode inspection system |
| WO2015042983A1 (zh) | 2013-09-30 | 2015-04-02 | 华为技术有限公司 | 一种天线和通信设备 |
| CN106066562B (zh) | 2015-04-21 | 2020-07-10 | 康代有限公司 | 具有扩展的角覆盖范围的检查系统 |
-
2019
- 2019-08-27 WO PCT/IL2019/050958 patent/WO2020049551A1/en not_active Ceased
- 2019-08-27 CN CN201980062633.6A patent/CN112888936A/zh active Pending
- 2019-08-27 JP JP2021512758A patent/JP7500545B2/ja active Active
- 2019-08-27 US US17/274,046 patent/US11974046B2/en active Active
- 2019-08-27 EP EP19856761.2A patent/EP3847446A4/en active Pending
- 2019-08-27 KR KR1020217009889A patent/KR102831958B1/ko active Active
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