JP2022143433A - 水晶振動子およびその製造方法 - Google Patents
水晶振動子およびその製造方法 Download PDFInfo
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- JP2022143433A JP2022143433A JP2021043931A JP2021043931A JP2022143433A JP 2022143433 A JP2022143433 A JP 2022143433A JP 2021043931 A JP2021043931 A JP 2021043931A JP 2021043931 A JP2021043931 A JP 2021043931A JP 2022143433 A JP2022143433 A JP 2022143433A
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- 239000013078 crystal Substances 0.000 title claims abstract description 219
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 18
- 230000000149 penetrating effect Effects 0.000 claims abstract description 35
- 230000002093 peripheral effect Effects 0.000 claims abstract description 12
- 238000005530 etching Methods 0.000 claims description 38
- 238000000034 method Methods 0.000 claims description 17
- 238000007789 sealing Methods 0.000 description 72
- 230000010355 oscillation Effects 0.000 description 59
- 230000005284 excitation Effects 0.000 description 16
- 239000002184 metal Substances 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 7
- 238000009792 diffusion process Methods 0.000 description 6
- 239000010931 gold Substances 0.000 description 5
- 239000010453 quartz Substances 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000004308 accommodation Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
- H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
- H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
- H03B5/32—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
- H03H9/02023—Characteristics of piezoelectric layers, e.g. cutting angles consisting of quartz
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/0595—Holders; Supports the holder support and resonator being formed in one body
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/10—Mounting in enclosures
- H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
- H03H9/1035—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by two sealing substrates sandwiching the piezoelectric layer of the BAW device
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
- H03H2003/0414—Resonance frequency
- H03H2003/0421—Modification of the thickness of an element
- H03H2003/0435—Modification of the thickness of an element of a piezoelectric layer
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
Description
10a 貫通部
11 振動部
11a 突起部
11b 振動面
11c 傾斜面
12 外枠部
100 水晶振動子(SCカット水晶振動子)
Claims (7)
- SCカット水晶振動板を備えた水晶振動子であって、
前記水晶振動板は、振動部と、当該振動部の外周側に設けられた外枠部とを備え、前記振動部と前記外枠部との間には、当該水晶振動板の厚み方向に貫通する貫通部が設けられた構成になっており、
前記振動部の前記貫通部側の端部には、厚み方向に突出し、前記振動部の振動面に対し傾斜する傾斜面が設けられていることを特徴とする水晶振動子。 - 請求項1に記載の水晶振動子において、
前記傾斜面の裏側の部分には、前記傾斜面の突出する方向に傾斜する第2の傾斜面が形成されていることを特徴とする水晶振動子。 - 請求項1または2に記載の水晶振動子において、
前記傾斜面のSCカット水晶振動板の結晶軸に沿った第1方向の幅が、前記振動部の第1方向の幅に対し、10%以上であることを特徴とする水晶振動子。 - 請求項1~3のいずれか1つに記載の水晶振動子において、
前記傾斜面は、前記振動部のSCカット水晶振動板のZ軸方向の端部に設けられ、且つSCカット水晶振動板のX軸方向に沿って延びていることを特徴とする水晶振動子。 - SCカット水晶振動板を備えた水晶振動子の製造方法であって、
水晶振動板の片面に対する周波数調整エッチングの後に、振動部の端部に貫通部を形成する外形エッチングを行って、前記振動部の前記貫通部側の端部に、厚み方向に突出し、前記振動部の振動面に対し傾斜する傾斜面を形成することを特徴とする水晶振動子の製造方法。 - 請求項5に記載の水晶振動子の製造方法において、
前記傾斜面のSCカット水晶振動板の結晶軸に沿った第1方向の幅が、前記振動部の第1方向の幅に対し、10%以上であることを特徴とする水晶振動子の製造方法。 - 請求項5または6に記載の水晶振動子の製造方法において、
前記傾斜面は、前記振動部のSCカット水晶振動板のZ軸方向の端部に設けられ、且つSCカット水晶振動板のX軸方向に沿って延びていることを特徴とする水晶振動子の製造方法。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2021043931A JP7302618B2 (ja) | 2021-03-17 | 2021-03-17 | 水晶振動子およびその製造方法 |
US18/280,969 US20240267026A1 (en) | 2021-03-17 | 2022-03-10 | Crystal resonator and method for manufacturing the same |
CN202280020671.7A CN117044103A (zh) | 2021-03-17 | 2022-03-10 | 晶体谐振器及其制造方法 |
PCT/JP2022/010698 WO2022196532A1 (ja) | 2021-03-17 | 2022-03-10 | 水晶振動子およびその製造方法 |
EP22771282.5A EP4311108A1 (en) | 2021-03-17 | 2022-03-10 | Quartz resonator and method for producing same |
TW111109280A TWI824438B (zh) | 2021-03-17 | 2022-03-14 | 晶體振動子及其製造方法 |
Applications Claiming Priority (1)
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JP2021043931A JP7302618B2 (ja) | 2021-03-17 | 2021-03-17 | 水晶振動子およびその製造方法 |
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JP2022143433A true JP2022143433A (ja) | 2022-10-03 |
JP7302618B2 JP7302618B2 (ja) | 2023-07-04 |
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Country Status (6)
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US (1) | US20240267026A1 (ja) |
EP (1) | EP4311108A1 (ja) |
JP (1) | JP7302618B2 (ja) |
CN (1) | CN117044103A (ja) |
TW (1) | TWI824438B (ja) |
WO (1) | WO2022196532A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2024176856A1 (ja) * | 2023-02-22 | 2024-08-29 | 株式会社大真空 | 2回回転水晶振動板 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2003110388A (ja) * | 2001-09-28 | 2003-04-11 | Citizen Watch Co Ltd | 圧電振動素子とその製造方法、および圧電デバイス |
WO2005008887A1 (ja) * | 2003-07-18 | 2005-01-27 | Nihon Dempa Kogyo Co., Ltd. | Scカット水晶振動子 |
JP2013046189A (ja) * | 2011-08-24 | 2013-03-04 | Seiko Epson Corp | 圧電振動素子、圧電振動子、電子デバイス、及び電子機器 |
JP2013143682A (ja) * | 2012-01-11 | 2013-07-22 | Seiko Epson Corp | 圧電振動素子、圧電振動素子の製造方法、圧電振動子、電子デバイス、及び電子機器 |
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JPH07104257B2 (ja) | 1989-12-21 | 1995-11-13 | 信越化学工業株式会社 | 自動粘度測定装置 |
US7339309B2 (en) * | 2004-09-14 | 2008-03-04 | Nihon Dempa Kogyo Co., Ltd. | Surface mount crystal oscillator |
US8963402B2 (en) * | 2010-11-30 | 2015-02-24 | Seiko Epson Corporation | Piezoelectric vibrator element, piezoelectric module, and electronic device |
JP6080449B2 (ja) * | 2012-09-18 | 2017-02-15 | エスアイアイ・クリスタルテクノロジー株式会社 | 圧電振動片、圧電振動子、発振器、電子機器及び電波時計 |
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WO2016181881A1 (ja) * | 2015-05-08 | 2016-11-17 | 株式会社村田製作所 | 水晶振動子及びその製造方法 |
JP2017183808A (ja) * | 2016-03-28 | 2017-10-05 | 京セラ株式会社 | 水晶素子および水晶デバイス |
TWI841691B (zh) * | 2019-07-03 | 2024-05-11 | 日商精工電子水晶科技股份有限公司 | 壓電振動片、壓電振動子、壓電振動片之製造方法及壓電振動子之製造方法 |
JP2021043931A (ja) | 2019-09-03 | 2021-03-18 | 富士電機株式会社 | コンピュータ装置及びデバッグ方法 |
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2021
- 2021-03-17 JP JP2021043931A patent/JP7302618B2/ja active Active
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2022
- 2022-03-10 WO PCT/JP2022/010698 patent/WO2022196532A1/ja active Application Filing
- 2022-03-10 US US18/280,969 patent/US20240267026A1/en active Pending
- 2022-03-10 CN CN202280020671.7A patent/CN117044103A/zh active Pending
- 2022-03-10 EP EP22771282.5A patent/EP4311108A1/en active Pending
- 2022-03-14 TW TW111109280A patent/TWI824438B/zh active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2003110388A (ja) * | 2001-09-28 | 2003-04-11 | Citizen Watch Co Ltd | 圧電振動素子とその製造方法、および圧電デバイス |
WO2005008887A1 (ja) * | 2003-07-18 | 2005-01-27 | Nihon Dempa Kogyo Co., Ltd. | Scカット水晶振動子 |
JP2013046189A (ja) * | 2011-08-24 | 2013-03-04 | Seiko Epson Corp | 圧電振動素子、圧電振動子、電子デバイス、及び電子機器 |
JP2013143682A (ja) * | 2012-01-11 | 2013-07-22 | Seiko Epson Corp | 圧電振動素子、圧電振動素子の製造方法、圧電振動子、電子デバイス、及び電子機器 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2024176856A1 (ja) * | 2023-02-22 | 2024-08-29 | 株式会社大真空 | 2回回転水晶振動板 |
Also Published As
Publication number | Publication date |
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TW202245414A (zh) | 2022-11-16 |
CN117044103A (zh) | 2023-11-10 |
WO2022196532A1 (ja) | 2022-09-22 |
TWI824438B (zh) | 2023-12-01 |
EP4311108A1 (en) | 2024-01-24 |
US20240267026A1 (en) | 2024-08-08 |
JP7302618B2 (ja) | 2023-07-04 |
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