JP2022138380A - Resin molding apparatus and method for manufacturing resin molded product - Google Patents

Resin molding apparatus and method for manufacturing resin molded product Download PDF

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JP2022138380A
JP2022138380A JP2021038235A JP2021038235A JP2022138380A JP 2022138380 A JP2022138380 A JP 2022138380A JP 2021038235 A JP2021038235 A JP 2021038235A JP 2021038235 A JP2021038235 A JP 2021038235A JP 2022138380 A JP2022138380 A JP 2022138380A
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molded
substrate
pair
molded substrate
resin
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JP7035243B1 (en
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和己 中山
Kazuki Nakayama
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Towa Corp
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Towa Corp
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Priority to JP2021038235A priority Critical patent/JP7035243B1/en
Priority to KR1020237026034A priority patent/KR20230125312A/en
Priority to CN202180093046.0A priority patent/CN116802040A/en
Priority to PCT/JP2021/038350 priority patent/WO2022190450A1/en
Priority to TW110143447A priority patent/TWI788112B/en
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Publication of JP2022138380A publication Critical patent/JP2022138380A/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/02—Transfer moulding, i.e. transferring the required volume of moulding material by a plunger from a "shot" cavity into a mould cavity
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/17—Component parts, details or accessories; Auxiliary operations
    • B29C45/26—Moulds
    • B29C45/2669—Moulds with means for removing excess material, e.g. with overflow cavities
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/17—Component parts, details or accessories; Auxiliary operations
    • B29C45/64—Mould opening, closing or clamping devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/17—Component parts, details or accessories; Auxiliary operations
    • B29C45/72—Heating or cooling
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/17—Component parts, details or accessories; Auxiliary operations
    • B29C45/72—Heating or cooling
    • B29C45/7207—Heating or cooling of the moulded articles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C2045/0094—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor injection moulding of small-sized articles, e.g. microarticles, ultra thin articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/17—Component parts, details or accessories; Auxiliary operations
    • B29C2045/1784—Component parts, details or accessories not otherwise provided for; Auxiliary operations not otherwise provided for

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Injection Moulding Of Plastics Or The Like (AREA)

Abstract

To provide a resin molding apparatus and a method for manufacturing a resin molded product in which the resin molded product with corrected warpage can be manufactured at high yield.SOLUTION: A resin molding apparatus (10) is equipped with a resin molding mechanism (20). The resin molding mechanism (20) has a first mold (21), a second mold (22), and a mold clamping mechanism (27). The resin molding apparatus (10) is further provided with an unwanted resin removal mechanism (100). The unwanted resin removal mechanism (100) has a pair of molded substrate placing sections (130) and a pair of molded substrate holding sections (140). The pair of molded substrate placing sections (130) have heating sections (170) configured to heat a first molded substrate (240a) and a second molded substrate (240b) after an unwanted resin part (230) is removed from a pair of molded substrates (200).SELECTED DRAWING: Figure 5

Description

本開示は、樹脂成形装置および樹脂成形品の製造方法に関する。 The present disclosure relates to a resin molding apparatus and a method of manufacturing a resin molded product.

たとえば、特許文献１には、基板を搬送する搬送装置が、基板を搬送する際に基板からの熱の放出を抑制可能な断熱板と、断熱板の基板に対向する面に基板から放射される熱を反射する機能を有する熱反射板とを備えることによって、基板の搬送中の温度低下の抑制が可能な樹脂封止装置が記載されている。 For example, in Patent Document 1, a transport device for transporting a substrate includes a heat insulating plate capable of suppressing the release of heat from the substrate when transporting the substrate, and a surface of the heat insulating plate facing the substrate. A resin sealing device is described which is capable of suppressing a temperature drop during transportation of a substrate by including a heat reflecting plate having a function of reflecting heat.

特許文献１に記載の樹脂封止装置において、樹脂封止後の基板である成形品は、搬送装置によって金型からゲートブレーク部の冷却ステージ上に搬出される。成形品は成形品の上下に配置された金属板でクランプされ、室温状態のエアを金属板とともに吹き付けられることによって冷却されるとともに、成形品の反りが矯正される。その後、冷却された成形品からは不要部分（カル部）が切り離される（ゲートブレークされる）。 In the resin sealing apparatus described in Patent Document 1, the molded product, which is the substrate after resin sealing, is carried out from the mold onto the cooling stage of the gate break portion by the conveying device. The molded product is clamped by metal plates arranged above and below the molded product, and air at room temperature is blown together with the metal plate to cool the molded product and correct the warpage of the molded product. After that, unnecessary portions (cull portions) are cut off (gate broken) from the cooled molded product.

特開２０１４－１１７８８８号公報JP 2014-117888 A

しかしながら、特許文献１に記載の樹脂封止装置においては、成形品の反りを矯正することができないことがあったため、その改善が要望されている。 However, in the resin sealing device described in Patent Document 1, the warp of the molded product cannot be corrected in some cases, and therefore an improvement is desired.

ここで開示された実施形態によれば、樹脂成形機構を備える樹脂成形装置であって、樹脂成形機構は、第１型と、第１型に向かい合って配置された第２型と、第１型と第２型とを型締め可能に構成された型締機構と、を備え、樹脂成形装置は、第１型と第２型とが型締めされて一対の基板が樹脂成形された後の一対の成形済基板の不要樹脂部分を除去可能に構成された不要樹脂除去機構をさらに備え、不要樹脂除去機構は、一対の成形済基板を載置可能に構成された一対の成形済基板載置部と、一対の成形済基板載置部に載置された一対の成形済基板を押圧可能に構成された一対の成形済基板押さえ部と、を備え、一対の成形済基板載置部は、一対の成形済基板から不要樹脂部分が除去された後の第１の成形済基板および第２の成形済基板を加熱可能に構成された加熱部を備える、樹脂成形装置を提供することができる。 According to the embodiments disclosed herein, there is provided a resin molding apparatus including a resin molding mechanism, wherein the resin molding mechanism includes a first mold, a second mold arranged to face the first mold, and the first mold. and a mold clamping mechanism configured to be capable of clamping the second mold, wherein the resin molding apparatus comprises a pair of substrates after the first mold and the second mold are clamped to resin-mold the pair of substrates. and an unnecessary resin removing mechanism capable of removing an unnecessary resin portion of the molded substrate, wherein the unnecessary resin removing mechanism comprises a pair of molded substrate mounting portions configured to mount the pair of molded substrates. and a pair of molded substrate holding portions configured to be able to press the pair of molded substrates placed on the pair of molded substrate mounting portions, wherein the pair of molded substrate mounting portions are provided with a pair of It is possible to provide a resin molding apparatus comprising a heating unit capable of heating the first molded substrate and the second molded substrate from which unnecessary resin portions have been removed from the molded substrate.

ここで開示された実施形態によれば、第１型と第２型とを型締めして一対の基板を樹脂成形することによって一対の成形済基板を形成する工程と、一対の成形済基板が一対の成形済基板載置部に載置された状態とし、一対の成形済基板載置部上の一対の成形済基板を一対の成形済基板押さえ部によって押圧して、一対の成形済基板の不要樹脂部分を除去することによって第１の成形済基板および第２の成形済基板を形成する工程と、一対の成形済基板載置部に備えられた加熱部によって第１の成形済基板および第２の成形済基板を加熱する工程と、を含む、樹脂成形品の製造方法を提供することができる。 According to the embodiments disclosed herein, a step of forming a pair of molded substrates by clamping a first mold and a second mold to mold the pair of substrates with resin; The pair of molded substrates placed on the pair of molded substrate mounting parts is pressed by the pair of molded substrate holding parts to separate the pair of molded substrates. forming a first molded substrate and a second molded substrate by removing unnecessary resin portions; 2. Heating the molded substrate can be provided.

ここで開示された実施形態によれば、反りが矯正された樹脂成形品を高い歩留まりで製造することが可能な樹脂成形装置および樹脂成形品の製造方法を提供することができる。 According to the embodiments disclosed herein, it is possible to provide a resin molding apparatus and a method of manufacturing a resin molded product that can manufacture a resin molded product whose warpage has been corrected at a high yield.

実施形態の樹脂成形装置の構成の一例のブロック図である。1 is a block diagram of an example configuration of a resin molding apparatus according to an embodiment; FIG. 図１に示される樹脂成形機構の一例の模式的な側面図である。FIG. 2 is a schematic side view of an example of the resin molding mechanism shown in FIG. 1; 実施形態の一対の成形済基板の一例の模式的な平面図である。1 is a schematic plan view of an example of a pair of molded substrates of an embodiment; FIG. 図１に示される不要樹脂除去機構の一例の模式的な正面図である。FIG. 2 is a schematic front view of an example of the unnecessary resin removing mechanism shown in FIG. 1; 実施形態の一対の成形済基板を一対の成形済基板押さえ部によって押圧する工程を図解する模式的な平面図である。FIG. 10 is a schematic plan view illustrating a process of pressing a pair of molded substrates of the embodiment with a pair of molded substrate holding portions; 実施形態の一対の成形済基板の不要樹脂部分を除去することによって第１の成形済基板および第２の成形済基板を形成する工程を図解する模式的な平面図である。FIG. 4 is a schematic plan view illustrating a step of forming a first molded substrate and a second molded substrate by removing unnecessary resin portions of a pair of molded substrates of the embodiment; 実施形態の第１の成形済基板および第２の成形済基板を加熱する工程を図解する模式的な平面図である。FIG. 4A is a schematic plan view illustrating a step of heating the first molded substrate and the second molded substrate of the embodiment; 図１に示される搬送機構の一例の模式的な正面図である。2 is a schematic front view of an example of the transport mechanism shown in FIG. 1; FIG. 図８に示される搬送機構の模式的な側面図である。FIG. 9 is a schematic side view of the transport mechanism shown in FIG. 8; （ａ）は押圧工程を行なっている搬送機構の一例の模式的な正面図であり、（ｂ）は押圧工程が行なわれている第１の成形済基板または第２の成形済基板の表面の一例の模式的な平面図である。(a) is a schematic front view of an example of a transport mechanism performing a pressing process, and (b) is a surface view of a first molded substrate or a second molded substrate undergoing a pressing process. 1 is a schematic plan view of an example; FIG. 実験例の一対の成形済基板から不要樹脂部分を除去した後の実験例の第１の成形済基板および第２の成形済基板の写真である。FIG. 10 is a photograph of a first molded substrate and a second molded substrate of an experimental example after removing an unnecessary resin portion from a pair of molded substrates of an experimental example; FIG. 加熱工程後の実験例の第１の成形済基板および第２の成形済基板の写真である。FIG. 11 is a photograph of a first molded substrate and a second molded substrate of an experimental example after a heating process; FIG. 搬送レールに載置された後の実験例の第１の成形済基板および第２の成形済基板の写真である。10A and 10B are photographs of the first molded substrate and the second molded substrate of the experimental example after being placed on the transport rail; 押圧工程後の実験例の第１の成形済基板および第２の成形済基板を搬送レールに載置した後の写真である。It is a photograph after mounting the first molded substrate and the second molded substrate of the experimental example after the pressing step on the transport rail.

以下、実施形態について説明する。なお、実施形態の説明に用いられる図面において、同一の参照符号は、同一部分または相当部分を表わすものとする。 Embodiments will be described below. In the drawings used for describing the embodiments, the same reference numerals denote the same or corresponding parts.

図１は、実施形態の樹脂成形装置の構成の一例のブロック図を示す。図１に示される樹脂成形装置１０は、樹脂成形機構２０と、不要樹脂除去機構１００と、搬送機構３００と、制御部５００と、を備えている。制御部５００は、樹脂成形機構２０と、不要樹脂除去機構１００と、搬送機構３００とを制御可能に構成されている。樹脂成形装置１０は、樹脂成形機構２０、不要樹脂除去機構１００、搬送機構３００および制御部５００以外の構成を備えていてもよいことは言うまでもない。たとえば、樹脂成形装置１０は、樹脂成形前の基板を供給する成形前基板供給機構および／または樹脂材料を供給する樹脂材料供給機構を備えていてもよい。 FIG. 1 shows a block diagram of an example of the configuration of a resin molding apparatus according to an embodiment. The resin molding apparatus 10 shown in FIG. 1 includes a resin molding mechanism 20, an unnecessary resin removing mechanism 100, a conveying mechanism 300, and a controller 500. As shown in FIG. The controller 500 is configured to be able to control the resin molding mechanism 20 , the unnecessary resin removing mechanism 100 and the transport mechanism 300 . Needless to say, the resin molding apparatus 10 may have a configuration other than the resin molding mechanism 20, the unnecessary resin removing mechanism 100, the transport mechanism 300, and the controller 500. For example, the resin molding apparatus 10 may include a pre-molding substrate supply mechanism that supplies a substrate before resin molding and/or a resin material supply mechanism that supplies a resin material.

図２に、図１に示される樹脂成形機構２０の一例の模式的な側面図を示す。図２に示される樹脂成形機構２０は、第１型２１と、第１型２１に向かい合って配置された第２型２２と、第１型２１と第２型２２とを型締め可能に構成された型締機構２７とを備えている。第１型２１、第２型２２および型締機構２７としては、たとえば従来から公知のものを用いることができる。 FIG. 2 shows a schematic side view of an example of the resin molding mechanism 20 shown in FIG. The resin molding mechanism 20 shown in FIG. 2 is configured such that a first mold 21, a second mold 22 arranged to face the first mold 21, and the first mold 21 and the second mold 22 can be clamped. and a mold clamping mechanism 27 . As the first mold 21, the second mold 22 and the mold clamping mechanism 27, conventionally known ones can be used, for example.

樹脂成形機構２０は、さらに、第１型２１を備える第１プラテン２３と、第２型２２を備える可動プラテン２４と、型締機構２７を備える第２プラテン２５とを備えている。樹脂成形機構２０は、第１プラテン２３、可動プラテン２４および第２プラテン２５を互いに間隔を空けて連結する棒状のタイバー２６をさらに備えている。タイバー２６の一端には第１プラテン２３が固定され、タイバー２６の他端には第２プラテン２５が固定されている。可動プラテン２４は、第１プラテン２３と第２プラテン２５との間を移動可能となるようにタイバー２６に連結されている。樹脂成形機構２０は、第１プラテン２３、可動プラテン２４および第２プラテン２５を連結させるために、タイバー２６に代えて、鉛直方向に延びる一対の板状部材を用いることもできる。 The resin molding mechanism 20 further includes a first platen 23 having a first mold 21 , a movable platen 24 having a second mold 22 , and a second platen 25 having a mold clamping mechanism 27 . The resin molding mechanism 20 further includes rod-shaped tie bars 26 that connect the first platen 23, the movable platen 24, and the second platen 25 with a space therebetween. A first platen 23 is fixed to one end of the tie bar 26 , and a second platen 25 is fixed to the other end of the tie bar 26 . Movable platen 24 is connected to tie bars 26 so as to be movable between first platen 23 and second platen 25 . In order to connect the first platen 23 , the movable platen 24 and the second platen 25 , the resin molding mechanism 20 can also use a pair of vertically extending plate members instead of the tie bars 26 .

図３に、実施形態の一対の成形済基板２００の一例の模式的な平面図を示す。図３に示される一対の成形済基板２００は、図１に示される樹脂成形機構２０を用いてトランスファー成形されることにより形成されている。 FIG. 3 shows a schematic plan view of an example of a pair of molded substrates 200 of the embodiment. A pair of molded substrates 200 shown in FIG. 3 are formed by transfer molding using the resin molding mechanism 20 shown in FIG.

図３に示される一対の成形済基板２００は、一対の成形済基板である第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂと、第１の成形済基板２４０ａと第２の成形済基板２４０ｂとの間の不要樹脂部分２３０とを備えている。 The pair of molded substrates 200 shown in FIG. 3 includes a first molded substrate 240a and a second molded substrate 240b, which are a pair of molded substrates, and a first molded substrate 240a and a second molded substrate. and an unnecessary resin portion 230 between the substrate 240b.

第１の成形済基板２４０ａは、第１の基板２１０ａと、第１の基板２１０ａの表面上に設けられた第１の成形樹脂部２２０ａと、を備えている。第１の成形樹脂部２２０ａは、第１の基板２１０ａの表面上に接続された半導体チップ等の電子素子（図示せず）を封止するように設けられ得る。第１の基板２１０ａの表面は、たとえば矩形状にすることができる。 The first molded substrate 240a includes a first substrate 210a and a first molded resin portion 220a provided on the surface of the first substrate 210a. The first molded resin portion 220a may be provided to seal an electronic element (not shown) such as a semiconductor chip connected on the surface of the first substrate 210a. The surface of the first substrate 210a can be rectangular, for example.

第２の成形済基板２４０ｂは、第２の基板２１０ｂと、第２の基板２１０ｂの表面上に設けられた第２の成形樹脂部２２０ｂと、を備えている。第２の成形樹脂部２２０ｂは、第２の基板２１０ｂの表面上に接続された半導体チップ等の電子素子（図示せず）を封止するように設けられ得る。第２の基板２１０ｂの表面は、たとえば矩形状にすることができる。 The second molded substrate 240b includes a second substrate 210b and a second molded resin portion 220b provided on the surface of the second substrate 210b. The second molded resin portion 220b may be provided to seal an electronic element (not shown) such as a semiconductor chip connected on the surface of the second substrate 210b. The surface of the second substrate 210b can be rectangular, for example.

不要樹脂部分２３０は、たとえば図３に示されるように、４つのカル部２３２と、４つのカル部２３２のそれぞれから第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂのそれぞれに向かって互いに間隔を空けて直線状に延在する２本のランナー部２３４とを備えている。 The unnecessary resin portions 230 are, for example, as shown in FIG. and two runner portions 234 that are spaced apart from each other and extend linearly.

図３に示される一対の成形済基板２００は、たとえば、以下の工程により製造することができる。まず、電子素子を備えた一対の基板である第１の基板２１０ａおよび第２の基板２１０ｂを第１型２１または第２型２２のいずれか一方に設置する。 A pair of molded substrates 200 shown in FIG. 3 can be manufactured, for example, by the following steps. First, a first substrate 210 a and a second substrate 210 b, which are a pair of substrates having electronic elements, are placed on either the first mold 21 or the second mold 22 .

次に、図２に示される樹脂成形機構２０の第１型２１と第２型２２とを型締めする。次に、第１の基板２１０ａおよび第２の基板２１０ｂを樹脂成形することによって一対の成形済基板２００を形成することができる。 Next, the first die 21 and the second die 22 of the resin molding mechanism 20 shown in FIG. 2 are clamped. Next, a pair of molded substrates 200 can be formed by resin-molding the first substrate 210a and the second substrate 210b.

なお、第１型２１と第２型２２との型締めは、たとえば、型締機構２７が、可動プラテン２４を第１プラテン２３に対して移動させ、第１型１０に対して第２型２０をプレスすることによって行なうことができる。 The mold clamping between the first mold 21 and the second mold 22 is performed by, for example, the mold clamping mechanism 27 moving the movable platen 24 with respect to the first platen 23 and the second mold 20 with respect to the first mold 10 . can be done by pressing

また、第１の基板２１０ａおよび第２の基板２１０ｂの樹脂成形は、たとえば、第１の基板２１０ａの表面上に第１の成形樹脂部２２０ａを設けるとともに、第２の基板２１０ｂの表面上に第２の成形樹脂部２２０ｂを設けることによって行なうことができる。 In resin molding of the first substrate 210a and the second substrate 210b, for example, the first molding resin portion 220a is provided on the surface of the first substrate 210a, and the second substrate 210b is formed on the surface of the second substrate 210b. This can be accomplished by providing two molded resin portions 220b.

第１の基板２１０ａおよび第２の基板２１０ｂとしては、たとえば、リードフレーム、プリント配線基板、金属製基板、樹脂製基板、半導体基板、またはセラミック製基板を用いることができる。樹脂成形に用いられる樹脂としては、たとえば、エポキシ系樹脂等を用いることができる。 As the first substrate 210a and the second substrate 210b, for example, lead frames, printed wiring boards, metal substrates, resin substrates, semiconductor substrates, or ceramic substrates can be used. As the resin used for resin molding, for example, an epoxy resin or the like can be used.

図４に、図１に示される不要樹脂除去機構１００の一例の模式的な正面図を示す。不要樹脂除去機構１００は、図３に示されるような構成の一対の成形済基板２００の第１の成形済基板２４０ａと第２の成形済基板２４０ｂとの間の不要樹脂部分２３０を除去可能に構成されている。 FIG. 4 shows a schematic front view of an example of the unnecessary resin removing mechanism 100 shown in FIG. The unnecessary resin removing mechanism 100 can remove the unnecessary resin portion 230 between the first molded substrate 240a and the second molded substrate 240b of the pair of molded substrates 200 configured as shown in FIG. It is configured.

不要樹脂除去機構１００は、一対の成形済基板２００を載置可能に構成された一対の成形済基板載置部１３０と、一対の成形済基板載置部１３０に載置された一対の成形済基板２００を押圧可能に構成された一対の成形済基板押さえ部１４０と、を備えている。 The unnecessary resin removing mechanism 100 includes a pair of molded substrate mounting portions 130 configured to be capable of mounting a pair of molded substrates 200 and a pair of molded substrate mounting portions 130 mounted on the pair of molded substrate mounting portions 130 . and a pair of molded substrate pressing portions 140 configured to be able to press the substrate 200 .

一対の成形済基板載置部１３０は、第１の成形済基板載置部１３０ａと、第２の成形済基板載置部１３０ｂとを備えている。第１の成形済基板載置部１３０ａと第２の成形済基板載置部１３０ｂとは、互いに間隔を空けて並列に配置されている。第１の成形済基板載置部１３０ａは、第１の成形済基板２４０ａを載置可能に構成された第１の載置表面１３１ａを有するように構成されている。第２の成形済基板載置部１３０ｂは、第２の成形済基板２４０ｂを載置可能に構成された第２の載置表面１３１ｂを有するように構成されている。 The pair of molded substrate mounting portions 130 includes a first molded substrate mounting portion 130a and a second molded substrate mounting portion 130b. The first molded substrate mounting portion 130a and the second molded substrate mounting portion 130b are arranged in parallel with a space therebetween. The first molded substrate mounting portion 130a is configured to have a first mounting surface 131a on which the first molded substrate 240a can be mounted. The second shaped substrate mounting portion 130b is configured to have a second mounting surface 131b configured to allow the second shaped substrate 240b to be placed thereon.

一対の成形済基板載置部１３０は、また、一対の成形済基板２００から前記不要樹脂部分が除去された後の第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂを加熱可能に構成された加熱部１７０を備えている。 The pair of molded substrate mounting parts 130 is also configured to be able to heat the first molded substrate 240a and the second molded substrate 240b after the unnecessary resin portion has been removed from the pair of molded substrates 200. A heating unit 170 is provided.

加熱部１７０は、第１の成形済基板２４０ａを加熱可能に構成された第１の加熱部１７０ａと、第２の成形済基板２４０ｂを加熱可能に構成された第２の加熱部１７０ｂとを備えている。第１の加熱部１７０ａは、第１の成形済基板載置部１３０ａに載置された第１の成形済基板２４０ａを加熱可能なように第１の成形済基板載置部１３０ａに備えられている。第２の加熱部１７０ｂは、第２の成形済基板載置部１３０ｂに載置された第２の成形済基板２４０ｂを加熱可能なように第２の成形済基板載置部１３０ｂに備えられている。 The heating unit 170 includes a first heating unit 170a capable of heating the first molded substrate 240a and a second heating unit 170b capable of heating the second molded substrate 240b. ing. The first heating part 170a is provided in the first molded substrate mounting part 130a so as to be able to heat the first molded substrate 240a mounted on the first molded substrate mounting part 130a. there is The second heating part 170b is provided on the second molded substrate mounting part 130b so as to be able to heat the second molded substrate 240b mounted on the second molded substrate mounting part 130b. there is

また、加熱部１７０は、第１の加熱部１７０ａによる第１の成形済基板２４０ａの加熱温度の指標となる第１の成形済基板載置部１３０ａの第１の載置表面１３１ａの温度を検出する第１の温度センサ（図示せず）を備えていてもよく、第２の加熱部１７０ｂによる第２の成形済基板２４０ｂの加熱温度の指標となる第２の成形済基板載置部１３０ｂの第２の載置表面１３１ｂの温度を検出する第２の温度センサ（図示せず）を備えていてもよい。 The heating unit 170 also detects the temperature of the first mounting surface 131a of the first formed substrate mounting unit 130a, which is an index of the heating temperature of the first formed substrate 240a by the first heating unit 170a. A first temperature sensor (not shown) may be provided to measure the heating temperature of the second molded substrate 240b by the second heating unit 170b. A second temperature sensor (not shown) may be provided to detect the temperature of the second placement surface 131b.

一対の成形済基板押さえ部１４０は、第１の成形済基板押さえ部１４０ａと第２の成形済基板押さえ部１４０ｂとを備えている。第１の成形済基板押さえ部１４０ａと第２の成形済基板押さえ部１４０ｂとは、互いに間隔を空けて並列に配置されている。第１の成形済基板押さえ部１４０ａは、第１の成形済基板載置部１３０ａに載置された第１の成形済基板２４０ａを第１の成形済基板載置部１３０ａに対して押圧可能に構成されている。第２の成形済基板押さえ部１４０ｂは、第２の成形済基板載置部１３０ｂに載置された第２の成形済基板２４０ｂを第２の成形済基板載置部１３０ｂに対して押圧可能に構成されている。 The pair of molded substrate holding portions 140 includes a first molded substrate holding portion 140a and a second molded substrate holding portion 140b. The first molded substrate holding portion 140a and the second molded substrate holding portion 140b are arranged in parallel with a space therebetween. The first molded substrate pressing portion 140a can press the first molded substrate 240a placed on the first molded substrate mounting portion 130a against the first molded substrate mounting portion 130a. It is configured. The second molded substrate holding portion 140b can press the second molded substrate 240b placed on the second molded substrate mounting portion 130b against the second molded substrate mounting portion 130b. It is configured.

不要樹脂除去機構１００は、上記の構成に加えて、一対の成形済基板２００の不要樹脂部分２３０のカル部２３２を載置可能に構成された受け部材１２０と、受け部材１２０に対してカル部２３２を押圧可能に構成されたカル押圧部材１５０と、一対の成形済基板押さえ部１４０の両端部を押圧可能に構成された押さえ部押圧部材１６０とをさらに備えている。 In addition to the above configuration, the unnecessary resin removing mechanism 100 includes a receiving member 120 configured to allow the cull portions 232 of the unnecessary resin portions 230 of the pair of molded substrates 200 to be placed thereon; 232 , and pressing portion pressing members 160 configured to press both ends of the pair of molded substrate pressing portions 140 .

以下、図２～図７を参照して、実施形態の樹脂成形品の製造方法の一例について説明する。 An example of a method for manufacturing a resin molded product according to the embodiment will be described below with reference to FIGS. 2 to 7. FIG.

まず、図２に示される樹脂成形機構２０の第１型２１と第２型２２とを型締めして一対の基板（第１の基板２１０ａおよび第２の基板２１０ｂ）を樹脂成形することによって図３に示される一対の成形済基板２００を形成する工程を行なう。一対の成形済基板２００を形成する工程は、たとえば、上述のように行なうことができる。 First, the first mold 21 and the second mold 22 of the resin molding mechanism 20 shown in FIG. 3 is performed to form a pair of molded substrates 200 shown in FIG. The process of forming the pair of molded substrates 200 can be performed, for example, as described above.

次に、図４の模式的正面図に示すように、一対の成形済基板２００を一対の成形済基板載置部１３０に載置する工程を行なう。この工程は、たとえば、一対の成形済基板２００の第１の成形済基板２４０ａを第１の成形済基板載置部１３０ａに載置するとともに、一対の成形済基板２００の第２の成形済基板２４０ｂを第２の成形済基板載置部１３０ｂに載置することにより行うことができる。このとき、一対の成形済基板２００のカル部２３２は、受け部材１２０上に載置される。 Next, as shown in the schematic front view of FIG. 4, a step of placing the pair of molded substrates 200 on the pair of molded substrate mounting portions 130 is performed. In this step, for example, the first molded substrate 240a of the pair of molded substrates 200 is placed on the first molded substrate mounting portion 130a, and the second molded substrate of the pair of molded substrates 200 is placed. 240b can be placed on the second molded substrate placement portion 130b. At this time, the cull portions 232 of the pair of molded substrates 200 are placed on the receiving member 120 .

次に、図５に示すように、一対の成形済基板載置部１３０上の一対の成形済基板２００を一対の成形済基板押さえ部１４０によって押圧する工程を行なう。この工程は、たとえば、一対の成形済基板２００が一対の成形済基板載置部１３０に載置された状態とし、一対の成形済基板載置部１３０上の一対の成形済基板２００を一対の成形済基板押さえ部１４０によって押圧することにより行なうことができる。 Next, as shown in FIG. 5, a step of pressing the pair of molded substrates 200 on the pair of molded substrate mounting portions 130 with the pair of molded substrate pressing portions 140 is performed. In this step, for example, a pair of molded substrates 200 are placed on a pair of molded substrate mounting portions 130, and the pair of molded substrates 200 on the pair of molded substrate mounting portions 130 are placed on a pair of substrates. This can be done by pressing with the molded substrate pressing portion 140 .

本実施形態においては、たとえば、第１の成形済基板２４０ａが第１の成形済基板載置部１３０ａに載置された状態として第１の成形済基板載置部１３０ａ上の第１の成形済基板２４０ａを第１の成形済基板押さえ部１４０ａによって押圧するとともに、第２の成形済基板２４０ｂが第２の成形済基板載置部１３０ｂに載置された状態として第２の成形済基板載置部１３０ｂ上の第２の成形済基板２４０ｂを第２の成形済基板押さえ部１４０ｂによって押圧することにより行なうことができる。このとき、一対の成形済基板２００のカル部２３２は、カル押圧部材１５０によって受け部材１２０に対して押圧される。 In the present embodiment, for example, the first molded substrate 240a is mounted on the first molded substrate mounting portion 130a, and the first molded substrate 240a is mounted on the first molded substrate mounting portion 130a. The substrate 240a is pressed by the first molded substrate pressing portion 140a, and the second molded substrate mounting portion 130b places the second molded substrate 240b on the second molded substrate mounting portion 130b. This can be done by pressing the second molded substrate 240b on the portion 130b with the second molded substrate pressing portion 140b. At this time, the cull portions 232 of the pair of molded substrates 200 are pressed against the receiving member 120 by the cull pressing member 150 .

次に、図６に示すように、一対の成形済基板２００の不要樹脂部分２３０を除去することによって第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂを形成する工程を行なう。この工程は、たとえば、一対の成形済基板載置部１３０上の一対の成形済基板２００を一対の成形済基板押さえ部１４０によって押圧するとともに、カル押圧部材１５０がカル部２３２を受け部材１２０に対して押圧した状態で、押さえ部押圧部材１６０が一対の成形済基板押さえ部１４０の両端部を一対の成形済基板押さえ部１４０側に押圧することにより行なうことができる。これにより、一対の成形済基板２００から不要樹脂部分２３０が除去されて、第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂを形成することができる。 Next, as shown in FIG. 6, a step of forming a first molded substrate 240a and a second molded substrate 240b by removing the unnecessary resin portion 230 of the pair of molded substrates 200 is performed. In this process, for example, the pair of formed substrates 200 on the pair of formed substrate mounting portions 130 are pressed by the pair of formed substrate holding portions 140 , and the cull pressing member 150 presses the cull portion 232 against the receiving member 120 . Pressing portion pressing member 160 presses both ends of the pair of molded substrate pressing portions 140 toward the pair of molded substrate pressing portions 140 side. Thereby, the unnecessary resin portion 230 is removed from the pair of molded substrates 200, and the first molded substrate 240a and the second molded substrate 240b can be formed.

次に、図７に示すように、一対の成形済基板載置部１３０に備えられた加熱部１７０によって第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂを加熱する工程（以下、単に「加熱工程」という。）を行なう。この工程は、たとえば、一対の成形済基板押さえ部１４０の両端部に対する押さえ部押圧部材１６０の押圧を解除するとともに、一対の成形済基板押さえ部１４０が第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂを押圧した状態で、第１の成形済基板載置部１３０ａに備えられた第１の加熱部１７０ａが第１の成形済基板２４０ａを加熱するとともに、第２の成形済基板載置部１３０ｂに備えられた第２の加熱部１７０ｂが第２の成形済基板２４０ｂを加熱することにより行なうことができる。 Next, as shown in FIG. 7, a step of heating the first molded substrate 240a and the second molded substrate 240b by heating units 170 provided on the pair of molded substrate mounting units 130 (hereinafter simply referred to as (referred to as "heating step"). In this process, for example, the pressure of the pressing portion pressing members 160 against both ends of the pair of molded substrate pressing portions 140 is released, and the pair of molded substrate pressing portions 140 are pressed against the first molded substrate 240a and the second substrate 240a. While pressing the molded substrate 240b, the first heating unit 170a provided in the first molded substrate mounting unit 130a heats the first molded substrate 240a, and the second molded substrate is mounted. This can be done by heating the second molded substrate 240b with the second heating unit 170b provided in the placement unit 130b.

以上の工程を経ることにより、本実施形態においては、不要樹脂部分２３０の除去後に第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂに発生した反りを矯正することができる。 By going through the above steps, in the present embodiment, warping occurring in the first molded substrate 240a and the second molded substrate 240b after the unnecessary resin portion 230 is removed can be corrected.

すなわち、一対の成形済基板２００から不要樹脂部分２３０を除去した後に、上記の加熱工程を行なわなかった場合には、一対の基板（第１の基板２１０ａおよび第２の基板２１０ｂ）と成形樹脂部（第１の成形樹脂部２２０ａおよび第２の成形樹脂部２２０ｂ）との材料の関係によって、不要樹脂部分２３０の除去後の第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂに反りが発生することがある。 That is, when the above-described heating process is not performed after removing the unnecessary resin portion 230 from the pair of molded substrates 200, the pair of substrates (first substrate 210a and second substrate 210b) and the molded resin portion are separated from each other. Depending on the material relationship with (the first molded resin portion 220a and the second molded resin portion 220b), the first molded substrate 240a and the second molded substrate 240b after the unnecessary resin portion 230 is removed may warp. may occur.

しかしながら、本実施形態においては、不要樹脂部分２３０の除去後の第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂを加熱することによって、第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂに発生した反りを矯正することができることから、反りが矯正された樹脂成形品を高い歩留まりで製造することが可能となる。 However, in this embodiment, by heating the first molded substrate 240a and the second molded substrate 240b after the unnecessary resin portion 230 is removed, the first molded substrate 240a and the second molded substrate 240a are heated. Since the warp generated in the substrate 240b can be corrected, it is possible to manufacture the resin molded product with the warp corrected at a high yield.

第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂに発生した反りをより矯正する観点からは、一対の成形済基板２００から不要樹脂部分２３０を除去した後にも引き続いて一対の成形済基板２００を一対の成形済基板押さえ部１４０によって押圧した状態で、加熱部１７０（第１の加熱部１７０ａ，第２の加熱部１７０ｂ）によって第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂを加熱することが好ましい。 From the viewpoint of further correcting the warpage occurring in the first molded substrate 240a and the second molded substrate 240b, even after the unnecessary resin portion 230 is removed from the pair of molded substrates 200, the pair of molded substrates can be continued. The first molded substrate 240a and the second molded substrate 240b are heated by the heating unit 170 (the first heating unit 170a and the second heating unit 170b) while the substrate 200 is pressed by the pair of molded substrate pressing units 140. is preferably heated.

上記の加熱工程は、第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂに８５０Ｐａ以上１６００Ｐａ以下の圧力を印加した状態で行うことが好ましく、９００Ｐａ以上１４００Ｐａ以下の圧力を印加した状態で行うことがより好ましく、９５０Ｐａ以上１２００Ｐａ以下の圧力を印加した状態で行うことがさらに好ましい。これらの場合には、第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂの反りをより矯正することができる傾向にある。 The above heating step is preferably performed with a pressure of 850 Pa or more and 1600 Pa or less applied to the first molded substrate 240a and the second molded substrate 240b, and is performed while a pressure of 900 Pa or more and 1400 Pa or less is applied. is more preferable, and it is even more preferable to carry out under the condition that a pressure of 950 Pa or more and 1200 Pa or less is applied. In these cases, there is a tendency that the warping of the first molded substrate 240a and the second molded substrate 240b can be corrected more effectively.

上記の加熱工程は、一対の成形済基板載置部１３０の表面（第１の載置表面１３１ａおよび第２の載置表面１３１ｂ）を１４０℃以上１７５℃以下に加熱することが好ましく、１４５℃以上１６５℃以下に加熱することがより好ましく、１５０℃以上１５５℃以下に加熱することがさらに好ましい。これらの場合には、第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂの反りをより矯正することができる傾向にある。 In the above heating step, the surfaces of the pair of formed substrate mounting portions 130 (the first mounting surface 131a and the second mounting surface 131b) are preferably heated to 140°C or higher and 175°C or lower. Heating to 165°C or less is more preferable, and heating to 150°C or more to 155°C or less is even more preferable. In these cases, there is a tendency that the warping of the first molded substrate 240a and the second molded substrate 240b can be corrected more effectively.

上記の加熱工程は、第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂを１５秒以上４０秒以下加熱することが好ましく、２０秒以上３５秒以下加熱することがより好ましく、２５秒以上３０秒以下加熱することがさらに好ましい。これらの場合には、第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂの反りをより矯正することができる傾向にある。 In the above heating step, the first molded substrate 240a and the second molded substrate 240b are preferably heated for 15 seconds or more and 40 seconds or less, more preferably 20 seconds or more and 35 seconds or less, and 25 seconds or more. It is more preferable to heat for 30 seconds or less. In these cases, there is a tendency that the warping of the first molded substrate 240a and the second molded substrate 240b can be corrected more effectively.

図８に、図１に示される搬送機構３００の一例の模式的な正面図を示す。図９に、図８に示される搬送機構３００の模式的な側面図を示す。図８および図９は、上記の加熱工程後の第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂを保持した状態の搬送機構３００を示している。 FIG. 8 shows a schematic front view of an example of the transport mechanism 300 shown in FIG. FIG. 9 shows a schematic side view of the transport mechanism 300 shown in FIG. 8 and 9 show the transport mechanism 300 holding the first molded substrate 240a and the second molded substrate 240b after the heating process described above.

図８および図９に示される搬送機構３００は、上記の加熱工程後の第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂをピックアップして、樹脂成形品の収容部に連結された搬送レールに搬送可能に構成されている。第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂは、搬送レールを介して樹脂成形品の収容部（図示せず）に収容される。 A transport mechanism 300 shown in FIGS. 8 and 9 picks up the first molded substrate 240a and the second molded substrate 240b after the above-described heating process, and transports them connected to the storage unit for resin molded products. It is configured to be transportable on rails. The first molded substrate 240a and the second molded substrate 240b are accommodated in a resin molded article accommodating portion (not shown) via a transport rail.

搬送機構３００は、第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂが接触可能に構成された一対の搬送基板接触部３０１と、一対の搬送基板接触部３０１に第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂを押圧可能に構成された一対の搬送基板押さえ部３０２とを備えている。 The transport mechanism 300 includes a pair of transport substrate contact portions 301 configured so that the first molded substrate 240a and the second molded substrate 240b can contact each other, and the pair of transport substrate contact portions 301 having the first molded substrate. 240a and a pair of transfer substrate pressing portions 302 capable of pressing the second molded substrate 240b.

一対の搬送基板接触部３０１は、第１の成形済基板２４０ａが接触可能に構成された第１の搬送基板接触部３０１ａと、第２の成形済基板２４０ｂが接触可能に構成された第２の搬送基板接触部３０１ｂとを備えている。 The pair of transfer substrate contact portions 301 includes a first transfer substrate contact portion 301a configured to allow contact with the first molded substrate 240a and a second transfer substrate contact portion 301a configured to allow contact with the second molded substrate 240b. and a transfer substrate contact portion 301b.

一対の搬送基板押さえ部３０２は、第１の成形済基板２４０ａの周縁を押圧可能に構成された第１の搬送基板押さえ部３０２ａと、第２の成形済基板２４０ｂの周縁を押圧可能に構成された第２の搬送基板押さえ部３０２ｂとを備えている。 The pair of transfer substrate pressing portions 302 are configured to press the peripheral edge of the first molded substrate 240a and the peripheral edge of the second molded substrate 240b. and a second transfer substrate holding portion 302b.

搬送機構３００は、上記の構成に加えて、搬送機構３００から載置された第１の成形済基板２０４ａおよび第２の成形済基板２０４ｂを受け取り可能に構成された搬送レール（図示せず）をさらに備えている。 In addition to the above configuration, the transport mechanism 300 includes transport rails (not shown) configured to receive the first molded substrate 204a and the second molded substrate 204b placed from the transport mechanism 300. I have more.

搬送機構３００は、第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂをピックアップする工程を行なうことができる。ピックアップする工程は、たとえば図８および図９に示されるように、Ｌ字状の第１の搬送基板押さえ部３０２ａおよび第２の搬送基板押さえ部３０２ｂが下方に移動して、Ｌ字状の第１の搬送基板押さえ部３０２ａが第１の成形済基板２４０ａをピックアップするとともに、Ｌ字状の第２の搬送基板押さえ部３０２ｂが第２の成形済基板２４０ｂをピックアップすることにより行なうことができる。 The transport mechanism 300 can perform the process of picking up the first molded substrate 240a and the second molded substrate 240b. In the picking up step, as shown in FIGS. 8 and 9, for example, the L-shaped first transfer substrate holding portion 302a and the second transfer substrate holding portion 302b are moved downward, and the L-shaped second holding portion 302b is moved downward. 1 transport substrate pressing portion 302a picks up the first molded substrate 240a, and the L-shaped second transport substrate pressing portion 302b picks up the second molded substrate 240b.

搬送機構３００は、上記のピックアップする工程後に、第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂを保持する工程を行なうことができる。第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂを保持する工程は、たとえば、Ｌ字状の第１の搬送基板押さえ部３０２ａが第１の成形済基板２４０ａをピックアップした状態で第１の搬送基板接触部３０１ａ側に移動して第１の成形済基板２４０ａを第１の搬送基板接触部３０１ａに接触させるとともに、Ｌ字状の第２の搬送基板押さえ部３０２ｂが第２の成形済基板２４０ｂをピックアップした状態で第２の搬送基板接触部３０１ｂ側に移動して第２の成形済基板２４０ｂを第２の搬送基板接触部３０１ｂに接触させることにより行なうことができる。 The transport mechanism 300 can perform a step of holding the first molded substrate 240a and the second molded substrate 240b after the above-described picking up step. In the step of holding the first molded substrate 240a and the second molded substrate 240b, for example, the L-shaped first transfer substrate pressing portion 302a picks up the first molded substrate 240a and holds the first substrate 240a. , the first molded substrate 240a is brought into contact with the first transport substrate contact portion 301a, and the L-shaped second transport substrate holding portion 302b moves to the second molded substrate holding portion 302b. This can be done by moving the substrate 240b picked up to the second transfer substrate contact portion 301b side and bringing the second molded substrate 240b into contact with the second transfer substrate contact portion 301b.

搬送機構３００は、上記のピックアップする工程後または上記の保持する工程後に、第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂを押圧する工程を行なうことができる。 The transport mechanism 300 can perform a step of pressing the first molded substrate 240a and the second molded substrate 240b after the picking up step or the holding step.

第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂは、上記の加熱工程での加熱が終了すると、周囲の雰囲気の温度との差により温度が急激に低下して、反りが再発することがある。 When the first molded substrate 240a and the second molded substrate 240b are heated in the above-described heating step, the temperature of the first molded substrate 240a and the second molded substrate 240b are rapidly lowered due to the temperature difference from the surrounding atmosphere, and the warping occurs again. There is

そこで、このような場合に、第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂの搬送レールへの載置前に、第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂを押圧する工程（以下、単に「押圧工程」という。）を行なうことによって、搬送レールへの載置後に第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂに反りが再発するのを抑制することができる。より具体的には、加熱により反りが矯正された状態の第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂを、周囲の温度と同じ程度の温度になるまで冷却しながら押圧することで、反りが矯正された状態を維持することができる。 Therefore, in such a case, before placing the first molded substrate 240a and the second molded substrate 240b on the transport rails, the first molded substrate 240a and the second molded substrate 240b are pressed. (hereinafter simply referred to as a "pressing step") to suppress recurrence of warpage in the first molded substrate 240a and the second molded substrate 240b after being placed on the transport rail. can be done. More specifically, the first molded substrate 240a and the second molded substrate 240b, whose warpage has been corrected by heating, are cooled and pressed until they reach the same temperature as the ambient temperature. , the state in which the warp is corrected can be maintained.

図１０（ａ）に、上記の押圧工程を行なっている搬送機構３００の一例の模式的な正面図を示す。図１０（ｂ）に押圧工程が行なわれている第１の成形済基板２４０ａまたは第２の成形済基板２４０ｂの表面の一例の模式的な平面図を示す。 FIG. 10(a) shows a schematic front view of an example of the transport mechanism 300 performing the pressing process described above. FIG. 10(b) shows a schematic plan view of an example of the surface of the first molded substrate 240a or the second molded substrate 240b on which the pressing process is being performed.

上記の押圧する工程は、たとえば図１０（ａ）および図１０（ｂ）に示されるように、Ｌ字状の第１の搬送基板押さえ部３０２ａが第１の成形済基板２４０ａの周縁を第１の搬送基板接触部３０１ａに対して押圧するとともに、Ｌ字状の第２の搬送基板押さえ部３０２ｂが第２の成形済基板２４０ｂの周縁を第２の搬送基板接触部３０１ｂに対して押圧することにより行なうことができる。なお、周縁の寸法は、一対の基板または樹脂の種類等によって適宜変更可能である。 In the above pressing step, as shown in FIGS. 10A and 10B, for example, the L-shaped first transfer substrate pressing portion 302a presses the peripheral edge of the first molded substrate 240a to the first position. , and the L-shaped second transfer substrate pressing portion 302b presses the peripheral edge of the second molded substrate 240b against the second transfer substrate contact portion 301b. can be done by It should be noted that the dimensions of the peripheral edge can be appropriately changed depending on the type of the pair of substrates or the resin.

上記の押圧する工程は、第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂに５０００Ｐａ以上７０００Ｐａ以下の圧力を印加することが好ましく、５５００Ｐａ以上６５００Ｐａ以下の圧力を印加することがより好ましく、６０００Ｐａ以上６２００Ｐａ以下の圧力を印加することがさらに好ましい。これらの場合には、第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂが周囲の雰囲気によって冷却されることによる反りの再発を抑制することができる傾向にある。 In the pressing step, a pressure of 5000 Pa or more and 7000 Pa or less is preferably applied to the first molded substrate 240a and the second molded substrate 240b, more preferably 5500 Pa or more and 6500 Pa or less. It is more preferable to apply a pressure of 6000 Pa or more and 6200 Pa or less. In these cases, it tends to be possible to suppress the recurrence of warping due to cooling of the first molded substrate 240a and the second molded substrate 240b by the surrounding atmosphere.

上記の押圧する工程は、第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂを１０秒以上２５秒以下行なうことが好ましく、１２秒以上２０秒以下行なうことがより好ましく、１３秒以上１５秒以下行なうことがさらに好ましい。これらの場合には、第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂが周囲の雰囲気によって冷却されることによる反りの再発を抑制することができる傾向にある。押圧する工程は、第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂの温度が、周囲の雰囲気と同じ程度の温度となるまで行うことがより好ましい。 The step of pressing the first molded substrate 240a and the second molded substrate 240b is preferably performed for 10 seconds or more and 25 seconds or less, more preferably 12 seconds or more and 20 seconds or less, and more preferably 13 seconds or more and 15 seconds or less. It is more preferable to carry out in seconds or less. In these cases, it tends to be possible to suppress the recurrence of warping due to cooling of the first molded substrate 240a and the second molded substrate 240b by the surrounding atmosphere. More preferably, the pressing step is performed until the temperatures of the first molded substrate 240a and the second molded substrate 240b reach the same temperature as the ambient atmosphere.

搬送機構３００は、一対の搬送基板押さえ部３０２が一対の搬送基板接触部３０１に対して第１の成形済基板２０４ａおよび第２の成形済基板２０４ｂを押圧した状態で移動を停止する工程を行なうことができる。この工程は、たとえば、第１の搬送基板押さえ部３０２ａが第１の成形済基板２４０ａを第１の搬送基板接触部３０１ａに対して押圧するとともに、第２の搬送基板押さえ部３０２ｂが第２の成形済基板２４０ｂを第２の搬送基板接触部３０１ｂに対して押圧した状態で、搬送機構３００の移動を停止することにより行なうことができる。これにより、第１の搬送基板押さえ部３０２ａによる第１の成形済基板２４０ａの押圧および第２の搬送基板押さえ部３０２ｂによる第２の成形済基板２０４ｂの押圧をより安定して行なうことができる。 The transport mechanism 300 performs a step of stopping the movement while the pair of transport substrate pressing portions 302 presses the first molded substrate 204a and the second molded substrate 204b against the pair of transport substrate contact portions 301. be able to. In this step, for example, the first transfer substrate holding portion 302a presses the first molded substrate 240a against the first transfer substrate contact portion 301a, and the second transfer substrate holding portion 302b presses the second transfer substrate contact portion 301a. This can be done by stopping the movement of the transport mechanism 300 while pressing the molded substrate 240b against the second transport substrate contact portion 301b. This makes it possible to more stably press the first molded substrate 240a by the first transfer substrate holding portion 302a and press the second molded substrate 204b by the second transfer substrate holding portion 302b.

上述のように、上記の押圧工程後に、搬送機構３００は、第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂを搬送レールに載置する工程を行なうことができる。上記の押圧工程後に搬送レールに載置する工程を行なった場合には、上述のように、搬送レールに載置した後の第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂに反りが再発するのを抑制することができる。 As described above, after the pressing step, the transport mechanism 300 can perform a step of placing the first molded substrate 240a and the second molded substrate 240b on the transport rails. When the step of placing on the transport rails is performed after the pressing step, as described above, the first molded substrate 240a and the second shaped substrate 240b after being placed on the transport rails are warped. Recurrence can be suppressed.

搬送機構３００は、上記の搬送レールに載置する工程後に、第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂを収容部に搬送する工程を行なうことができる。本実施形態においては、反りが矯正された第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂを高い歩留まりで製造することができるため、より多くの第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂを収容部に容易に収容することが可能となる。 The transport mechanism 300 can carry out a step of transporting the first molded substrate 240a and the second molded substrate 240b to the storage unit after the step of placing them on the transport rails. In this embodiment, the warp-corrected first molded substrates 240a and second molded substrates 240b can be manufactured with a high yield. It is possible to easily store the molded substrate 240b in the storage portion.

本実施形態においては、不要樹脂部分２３０の除去後に第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂに反りが発生した場合には、上記の加熱工程によって第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂに発生した反りを矯正することができるため、反りが矯正された樹脂成形品を高い歩留まりで製造することが可能となる。 In this embodiment, if warping occurs in the first molded substrate 240a and the second molded substrate 240b after the unnecessary resin portion 230 is removed, the above-described heating process is performed to prevent the first molded substrate 240a and the second molded substrate 240b from being warped. Since the warp generated in the second molded substrate 240b can be corrected, it is possible to manufacture the resin molded product with the warp corrected at a high yield.

また、本実施形態においては、上記の搬送レールに載置する工程前に搬送機構３００による第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂの押圧工程を行なうことによって、第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂに反りが再発するのを抑制することができるため、搬送機構３００による押圧工程を行なった場合には、反りが矯正された樹脂成形品をより高い歩留まりで製造することが可能となる。 Further, in the present embodiment, the first molded substrate 240a and the second molded substrate 240b are pressed by the transport mechanism 300 before the step of placing them on the transport rails. Since it is possible to suppress the recurrence of the warp in the finished substrate 240a and the second molded substrate 240b, when the pressing process by the conveying mechanism 300 is performed, the warp-corrected resin molded product can be obtained at a higher yield. It is possible to manufacture in

＜実験例＞
まず、図１に示される樹脂成形装置１０の第１型２１にＦＲ４からなる厚さ０．３３８ｍｍの一対の基板を設置した後に、第１型２１と第２型２２とを型締めし、当該一対の基板のそれぞれの基板の表面をエポキシ系樹脂でトランスファー成形により樹脂成形することによって、実験例の一対の成形済基板２００を形成した。ここで、一対の基板の基板２１０ａ，２１０ｂのそれぞれの表面は、縦１８０ｍｍ×横９０ｍｍの矩形状であった。 <Experimental example>
First, after setting a pair of substrates made of FR4 and having a thickness of 0.338 mm in the first mold 21 of the resin molding apparatus 10 shown in FIG. A pair of molded substrates 200 of the experimental example was formed by resin-molding the surfaces of the respective substrates of the pair of substrates by transfer molding with an epoxy-based resin. Here, the surface of each of the substrates 210a and 210b of the pair of substrates was rectangular with a length of 180 mm and a width of 90 mm.

次に、図４～図７に示される不要樹脂除去機構１００によって、図６に示すように、実験例の一対の成形済基板２００から不要樹脂部分２３０を除去することによって、実験例の第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂを形成した。 Next, as shown in FIG. 6, the unnecessary resin portion 230 is removed from the pair of molded substrates 200 of the experimental example by the unnecessary resin removing mechanism 100 shown in FIGS. A molded substrate 240a and a second molded substrate 240b were formed.

図１１に、実験例の一対の成形済基板２００から不要樹脂部分２３０を除去した後の実験例の第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂの写真を示す。図１１に示すように、不要樹脂部分２３０を除去した後の実験例の第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂには反りが発生していることが確認された。 FIG. 11 shows photographs of the first molded substrate 240a and the second molded substrate 240b of the experimental example after removing the unnecessary resin portion 230 from the pair of molded substrates 200 of the experimental example. As shown in FIG. 11, it was confirmed that the first molded substrate 240a and the second molded substrate 240b of the experimental example after removing the unnecessary resin portion 230 were warped.

次に、図７に示すように、一対の成形済基板押さえ部１４０が実験例の第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂを押圧した状態で、第１の成形済基板載置部１３０ａに載置された第１の加熱部１７０ａが実験例の第１の成形済基板２４０ａを加熱するとともに、第２の成形済基板載置部１３０ｂに載置された第２の加熱部１７０ｂが実験例の第２の成形済基板２４０ｂを加熱する加熱工程を行なった。当該加熱工程において、実験例の第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂは、９５０Ｐａの圧力が印加された状態で、第１の載置表面１３１ａおよび第２の載置表面１３１ｂの温度が１５０℃となるように３０秒間加熱された。 Next, as shown in FIG. 7, the first molded substrate is mounted while the pair of molded substrate pressing portions 140 are pressing the first molded substrate 240a and the second molded substrate 240b of the experimental example. The first heating unit 170a mounted on the placement unit 130a heats the first molded substrate 240a of the experimental example, and the second heating unit mounted on the second molded substrate mounting unit 130b. 170b performed a heating step for heating the second molded substrate 240b of the experimental example. In the heating process, the first molded substrate 240a and the second molded substrate 240b of the experimental example were placed on the first mounting surface 131a and the second mounting surface 131b while a pressure of 950 Pa was applied. was heated to 150° C. for 30 seconds.

図１２に、加熱工程後の実験例の第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂの写真を示す。図１２に示すように、加熱工程後の実験例の第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂにおいては、図１１に示されていた反りが矯正されていることが確認された。 FIG. 12 shows photographs of the first molded substrate 240a and the second molded substrate 240b of the experimental example after the heating process. As shown in FIG. 12, it was confirmed that the warp shown in FIG. 11 was corrected in the first molded substrate 240a and the second molded substrate 240b of the experimental example after the heating process. .

次に、図８および図９に示される搬送機構３００によって、上記の加熱工程後の実験例の第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂをピックアップして保持した後に搬送レールに載置した。 Next, the first molded substrate 240a and the second molded substrate 240b of the experimental example after the above-described heating process are picked up and held by the transport mechanism 300 shown in FIGS. placed.

図１３に、当該搬送レールに載置された後の実験例の第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂの写真を示す。図１３に示すように、搬送レールに載置された後の実験例の第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂには反りが再発していることが確認された。 FIG. 13 shows photographs of the first molded substrate 240a and the second molded substrate 240b of the experimental example after being placed on the transport rail. As shown in FIG. 13, it was confirmed that the first molded substrate 240a and the second molded substrate 240b of the experimental example after being placed on the transport rail were warped again.

そこで、実験例の第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂを当該搬送レールに載置する前に、図８および図９に示される搬送機構３００が、実験例の第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂをピックアップして保持した後に押圧工程を行なった。 Therefore, before placing the first molded substrate 240a and the second molded substrate 240b of the experimental example on the transport rails, the transport mechanism 300 shown in FIGS. After picking up and holding the molded substrate 240a and the second molded substrate 240b, the pressing process was performed.

当該押圧工程は、図１０（ａ）および図１０（ｂ）に示されるように、第１の搬送基板押さえ部３０２ａが第１の成形済基板２４０ａの周縁を第１の搬送基板接触部３０１ａに対して押圧するとともに、第２の搬送基板押さえ部３０２ｂが第２の成形済基板２４０ｂの周縁を第２の搬送基板接触部３０１ｂに対して押圧することにより行なった。当該押圧工程において、実験例の第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂは、６０００Ｐａの圧力が印加された状態で周囲の雰囲気の温度中で１０秒間維持された。 In the pressing step, as shown in FIGS. 10A and 10B, the first transfer substrate pressing portion 302a presses the peripheral edge of the first molded substrate 240a to the first transfer substrate contact portion 301a. In addition, the second transfer substrate holding portion 302b presses the peripheral edge of the second molded substrate 240b against the second transfer substrate contact portion 301b. In the pressing process, the first molded substrate 240a and the second molded substrate 240b of the experimental example were maintained at ambient temperature for 10 seconds with a pressure of 6000 Pa applied.

図１４に、押圧工程後の実験例の第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂを搬送レールに載置した後の写真を示す。図１４に示すように、押圧工程後の実験例の第１の成形済基板２４０ａおよび第２の成形済基板２４０ｂは、図１３に示される場合と比べて反りが矯正されていることが確認された。また、基板２１０ａ，２１０ｂの厚さを０．１ｍｍとし、実験例と同一の実験を行った結果、実験例と同様に反りが矯正されていることが確認された。 FIG. 14 shows a photograph after placing the first molded substrate 240a and the second molded substrate 240b of the experimental example after the pressing step on the transport rail. As shown in FIG. 14, it was confirmed that warping of the first molded substrate 240a and the second molded substrate 240b of the experimental example after the pressing process was corrected as compared with the case shown in FIG. rice field. Also, the same experiment as in the experimental example was conducted with the substrates 210a and 210b having a thickness of 0.1 mm, and it was confirmed that the warp was corrected in the same manner as in the experimental example.

＜まとめ＞
実験例の結果から、本実施形態においては、一対の成形済基板から不要樹脂部分を除去した後の第１の成形済基板および第２の成形済基板に対して加熱工程を行なうことによって、不要樹脂部分の除去後に第１の成形済基板および第２の成形済基板に発生した反りを矯正することができることが確認された。 <Summary>
From the results of the experiment example, in the present embodiment, the unnecessary resin portion is removed from the pair of molded substrates, and then the first molded substrate and the second molded substrate are subjected to the heating process, whereby the unnecessary resin is removed. It was confirmed that the warpage occurring in the first molded substrate and the second molded substrate after the removal of the resin portion could be corrected.

また、実験例の結果から、反りが矯正された第１の成形済基板および第２の成形済基板を搬出レールに載置する前に搬送機構の一対の搬送基板押さえ部が一対の搬送基板接触部に対して加熱工程後の第１の成形済基板および第２の成形済基板に対して押圧工程を行なうことによって、搬出レールに載置した後の第１の成形済基板および第２の成形済基板に反りが再発するのを抑制することができることが確認された。 Further, from the results of the experimental example, it was found that the pair of transfer substrate holding portions of the transfer mechanism came into contact with the pair of transfer substrates before placing the first molded substrate and the second molded substrate whose warpage was corrected on the carry-out rail. By performing a pressing step on the first molded substrate and the second molded substrate after the heating step, the first molded substrate and the second molded substrate after being placed on the carry-out rail are formed. It was confirmed that recurrence of warpage in the finished substrate can be suppressed.

以上の実験例の結果から、本実施形態においては、反りが矯正された樹脂成形品を高い歩留まりで製造することが可能であることが確認された。 From the results of the above experimental examples, it was confirmed that, in the present embodiment, it is possible to manufacture a resin molded product whose warpage has been corrected with a high yield.

以上のように実施形態および実験例について説明を行なったが、上述の各実施形態および各実験例を適宜組み合わせることも当初から予定している。 Although the embodiments and experimental examples have been described as above, it is planned from the beginning to appropriately combine each of the above-described embodiments and experimental examples.

今回開示された実施形態および実験例はすべての点で例示であって制限的なものではないと考えられるべきである。本発明の範囲は上記した説明ではなくて特許請求の範囲によって示され、特許請求の範囲と均等の意味および範囲内でのすべての変更が含まれることが意図される。 It should be considered that the embodiments and experimental examples disclosed this time are illustrative in all respects and not restrictive. The scope of the present invention is indicated by the scope of the claims rather than the above description, and is intended to include all modifications within the meaning and range of equivalents of the scope of the claims.

ここで開示された実施形態によれば、反りが矯正された樹脂成形品を高い歩留まりで製造することが可能な樹脂成形装置および樹脂成形品の製造方法を提供することができる。 According to the embodiments disclosed herein, it is possible to provide a resin molding apparatus and a method of manufacturing a resin molded product that can manufacture a resin molded product whose warpage has been corrected at a high yield.

１０ 樹脂成形装置、２０ 樹脂成形機構、２１ 第１型、２２ 第２型、２３ 第１プラテン、２４ 可動プラテン、２５ 第２プラテン、２６ タイバー、２７ 型締機構、１００ 不要樹脂除去機構、１２０ 受け部材、１３０ 一対の成形済基板載置部、１３０ａ 第１の成形済基板載置部、１３０ｂ 第２の成形済基板載置部、１３１ａ 第１の載置表面、１３１ｂ 第２の載置表面、１４０ 一対の成形済基板押さえ部、１４０ａ 第１の成形済基板押さえ部、１４０ｂ 第２の成形済基板押さえ部、１５０ カル押圧部材、１６０ 押さえ部押圧部材、１７０ 加熱部、１７０ａ 第１の加熱部、１７０ｂ 第２の加熱部、２００ 一対の成形済基板、２１０ａ 第１の基板、２１０ｂ 第２の基板、２２０ａ 第１の成形樹脂部、２２０ｂ 第２の成形樹脂部、２３０ 不要樹脂部分、２３２ カル部、２３４ ランナー部、２４０ａ 第１の成形済基板、２４０ｂ 第２の成形済基板、２５０ａ，２５０ｂ 両端部、３００ 搬送機構、３０１ 一対の搬送基板接触部、３０１ａ 第１の搬送基板接触部、３０１ｂ 第２の搬送基板接触部、３０２ 一対の搬送基板押さえ部、３０２ａ 第１の搬送基板押さえ部、３０２ｂ 第２の搬送基板押さえ部、５００ 制御部。 10 Resin molding device 20 Resin molding mechanism 21 First mold 22 Second mold 23 First platen 24 Movable platen 25 Second platen 26 Tie bar 27 Mold clamping mechanism 100 Unnecessary resin removal mechanism 120 Receiver member 130 a pair of molded substrate mounting parts 130a first molded substrate mounting part 130b second molded substrate mounting part 131a first mounting surface 131b second mounting surface 140 pair of molded substrate pressing portions 140a first molded substrate pressing portion 140b second molded substrate pressing portion 150 cull pressing member 160 pressing portion pressing member 170 heating portion 170a first heating portion , 170b second heating unit 200 pair of molded substrates 210a first substrate 210b second substrate 220a first molded resin portion 220b second molded resin portion 230 unnecessary resin portion 232 Cal Part 234 Runner part 240a First molded substrate 240b Second molded substrate 250a, 250b Both ends 300 Transport mechanism 301 Pair of transport substrate contact parts 301a First transport substrate contact part 301b 2nd transfer board contact section 302 pair of transfer board holding sections 302a first transfer board holding section 302b second transfer board holding section 500 control section.

Claims (13)

樹脂成形機構を備える樹脂成形装置であって、
前記樹脂成形機構は、第１型と、前記第１型に向かい合って配置された第２型と、前記第１型と前記第２型とを型締め可能に構成された型締機構と、を備え、
前記樹脂成形装置は、
前記第１型と前記第２型とが型締めされて一対の基板が樹脂成形された後の一対の成形済基板の不要樹脂部分を除去可能に構成された不要樹脂除去機構をさらに備え、
前記不要樹脂除去機構は、前記一対の成形済基板を載置可能に構成された一対の成形済基板載置部と、前記一対の成形済基板載置部に載置された前記一対の成形済基板を押圧可能に構成された一対の成形済基板押さえ部と、を備え、
前記一対の成形済基板載置部は、前記一対の成形済基板から前記不要樹脂部分が除去された後の第１の成形済基板および第２の成形済基板を加熱可能に構成された加熱部を備える、樹脂成形装置。 A resin molding apparatus comprising a resin molding mechanism,
The resin molding mechanism includes a first mold, a second mold arranged to face the first mold, and a mold clamping mechanism capable of clamping the first mold and the second mold. prepared,
The resin molding device is
further comprising an unnecessary resin removing mechanism capable of removing an unnecessary resin portion of the pair of molded substrates after the first mold and the second mold are clamped and the pair of substrates are resin-molded;
The unnecessary resin removing mechanism includes a pair of molded substrate mounting portions configured to be capable of mounting the pair of molded substrates, and the pair of molded substrates mounted on the pair of molded substrate mounting portions. a pair of preformed substrate holding portions configured to press the substrate,
The pair of molded substrate mounting units is a heating unit capable of heating the first molded substrate and the second molded substrate after the unnecessary resin portion has been removed from the pair of molded substrates. A resin molding device. 前記一対の成形済基板載置部は、互いに間隔を空けて並列に配置された第１の成形済基板載置部と第２の成形済基板載置部とを備え、
前記一対の成形済基板押さえ部は、互いに間隔を空けて並列に配置された第１の成形済基板押さえ部と第２の成形済基板押さえ部とを備える、請求項１に記載の樹脂成形装置。 The pair of preformed substrate placement sections includes a first preformed substrate placement section and a second preformed substrate placement section arranged in parallel with a space therebetween,
2. The resin molding apparatus according to claim 1, wherein said pair of molded substrate holding portions includes a first molded substrate holding portion and a second molded substrate holding portion arranged in parallel with a space therebetween. . 前記第１の成形済基板または前記第２の成形済基板を搬送可能に構成された搬送機構をさらに備え、
前記搬送機構は、前記第１の成形済基板または前記第２の成形済基板が接触可能に構成された一対の搬送基板接触部と、前記一対の搬送基板接触部に前記第１の成形済基板および前記第２の成形済基板を押圧可能に構成された一対の搬送基板押さえ部とを備える、請求項１または請求項２に記載の樹脂成形装置。 further comprising a transport mechanism capable of transporting the first molded substrate or the second molded substrate;
The transport mechanism includes a pair of transport substrate contact portions configured to be in contact with the first molded substrate or the second molded substrate; 3. The resin molding apparatus according to claim 1, further comprising: and a pair of transfer substrate pressing portions capable of pressing said second molded substrate. 前記搬送機構は、前記一対の搬送基板押さえ部が前記第１の成形済基板および前記第２の成形済基板を押圧した状態で移動停止可能に構成されている、請求項３に記載の樹脂成形装置。 4. The resin molding according to claim 3, wherein said transport mechanism is configured to be able to stop moving in a state in which said pair of transport substrate pressing portions presses said first molded substrate and said second molded substrate. Device. 前記一対の搬送基板押さえ部は、前記第１の成形済基板および前記第２の成形済基板の周縁を押圧可能に構成されている、請求項３または請求項４に記載の樹脂成形装置。 5. The resin molding apparatus according to claim 3, wherein said pair of transfer substrate pressing portions are configured to be able to press peripheral edges of said first molded substrate and said second molded substrate. 第１型と第２型とを型締めして一対の基板を樹脂成形することによって一対の成形済基板を形成する工程と、
前記一対の成形済基板が一対の成形済基板載置部に載置された状態とし、前記一対の成形済基板載置部上の前記一対の成形済基板を一対の成形済基板押さえ部によって押圧して、前記一対の成形済基板の不要樹脂部分を除去することによって第１の成形済基板および第２の成形済基板を形成する工程と、
前記一対の成形済基板載置部に備えられた加熱部によって前記第１の成形済基板および第２の成形済基板を加熱する工程と、を含む、樹脂成形品の製造方法。 forming a pair of molded substrates by clamping the first mold and the second mold to mold the pair of substrates with resin;
The pair of molded substrates are placed on the pair of molded substrate mounting portions, and the pair of molded substrates on the pair of molded substrate mounting portions are pressed by the pair of molded substrate holding portions. forming a first molded substrate and a second molded substrate by removing unnecessary resin portions of the pair of molded substrates;
a step of heating the first molded substrate and the second molded substrate by heating units provided in the pair of molded substrate mounting units. 前記加熱する工程は、前記一対の成形済基板押さえ部によって前記第１の成形済基板および第２の成形済基板を押圧しながら加熱する工程を含む、請求項６に記載の樹脂成形品の製造方法。 7. The manufacturing of the resin molded product according to claim 6, wherein said heating step includes a step of heating while pressing said first molded substrate and said second molded substrate with said pair of molded substrate pressing portions. Method. 前記加熱する工程は、前記一対の成形済基板載置部の表面を１４０℃以上１７５℃以下に加熱する工程を含む、請求項６または請求項７に記載の樹脂成形品の製造方法。 8. The method of manufacturing a resin molded product according to claim 6, wherein said heating step includes a step of heating surfaces of said pair of molded substrate mounting portions to 140[deg.] C. or more and 175[deg.] C. or less. 前記加熱する工程は、前記第１の成形済基板および前記第２の成形済基板を１５秒以上４０秒以下加熱する工程を含む、請求項６から請求項８のいずれか１項に記載の樹脂成形品の製造方法。 9. The resin according to any one of claims 6 to 8, wherein the heating includes heating the first molded substrate and the second molded substrate for 15 seconds or more and 40 seconds or less. A method of manufacturing molded articles. 搬送機構が前記加熱する工程後の前記第１の成形済基板および前記第２の成形済基板をピックアップする工程をさらに含む、請求項６から請求項９のいずれか１項に記載の樹脂成形品の製造方法。 10. The resin molded product according to any one of claims 6 to 9, further comprising a step of picking up the first molded substrate and the second molded substrate after the heating step by a transport mechanism. manufacturing method. 前記ピックアップする工程の後に前記搬送機構の一対の搬送基板押さえ部が前記一対の搬送基板接触部に対して前記加熱する工程後の前記第１の成形済基板および前記第２の成形済基板を押圧する工程をさらに含む、請求項６から請求項１０のいずれか１項に記載の樹脂成形品の製造方法。 After the step of picking up, the pair of transfer substrate pressing portions of the transfer mechanism presses the first molded substrate after the heating step and the second molded substrate against the pair of transfer substrate contact portions. The method for manufacturing a resin molded product according to any one of claims 6 to 10, further comprising the step of: 前記押圧する工程において、前記一対の搬送基板押さえ部は、前記加熱する工程後の前記第１の成形済基板および前記第２の成形済基板の周縁を押圧する、請求項１１に記載の樹脂成形品の製造方法。 12. The resin molding according to claim 11, wherein in said pressing step, said pair of transfer substrate pressing portions presses peripheral edges of said first molded substrate and said second molded substrate after said heating step. method of manufacturing the product. 前記一対の搬送基板押さえ部が前記一対の搬送基板接触部に対して前記加熱する工程後の前記第１の成形済基板および前記第２の成形済基板を押圧した状態で前記搬送機構の移動を停止する工程をさらに含む、請求項６から請求項１２のいずれか１項に記載の樹脂成形品の製造方法。 The transport mechanism is moved while the pair of transport substrate holding portions presses the first molded substrate and the second molded substrate after the heating step against the pair of transport substrate contact portions. 13. The method of manufacturing a resin molded product according to any one of claims 6 to 12, further comprising a step of stopping.
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