JP2022128590A - 一体型受動デバイス上に積み重ねられたバルク音響波共振器 - Google Patents

一体型受動デバイス上に積み重ねられたバルク音響波共振器 Download PDF

Info

Publication number
JP2022128590A
JP2022128590A JP2022022554A JP2022022554A JP2022128590A JP 2022128590 A JP2022128590 A JP 2022128590A JP 2022022554 A JP2022022554 A JP 2022022554A JP 2022022554 A JP2022022554 A JP 2022022554A JP 2022128590 A JP2022128590 A JP 2022128590A
Authority
JP
Japan
Prior art keywords
baw
ipd
filter structure
resonator
assist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022022554A
Other languages
English (en)
Japanese (ja)
Other versions
JP2022128590A5 (cg-RX-API-DMAC7.html
Inventor
ジェフリー・ガリポー
Galipeau Jeffrey
ケリー・エム・リア
M Lear Kelly
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Qorvo US Inc
Original Assignee
Qorvo US Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qorvo US Inc filed Critical Qorvo US Inc
Publication of JP2022128590A publication Critical patent/JP2022128590A/ja
Publication of JP2022128590A5 publication Critical patent/JP2022128590A5/ja
Priority to JP2026042729A priority Critical patent/JP2026094466A/ja
Pending legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
    • H03H9/0547—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a vertical arrangement
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
    • H03H7/01—Frequency selective two-port networks
    • H03H7/17—Structural details of sub-circuits of frequency selective networks
    • H03H7/1741—Comprising typical LC combinations, irrespective of presence and location of additional resistors
    • H03H7/1783—Combined LC in series path
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/542—Filters comprising resonators of piezoelectric or electrostrictive material including passive elements
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/566—Electric coupling means therefor
    • H03H9/568—Electric coupling means therefor consisting of a ladder configuration

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Filters And Equalizers (AREA)
JP2022022554A 2021-02-23 2022-02-17 一体型受動デバイス上に積み重ねられたバルク音響波共振器 Pending JP2022128590A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2026042729A JP2026094466A (ja) 2021-02-23 2026-03-17 一体型受動デバイス上に積み重ねられたバルク音響波共振器

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US17/182,988 US11923827B2 (en) 2021-02-23 2021-02-23 Bulk acoustic wave resonator stacked onto an integrated passive device
US17/182,988 2021-02-23

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2026042729A Division JP2026094466A (ja) 2021-02-23 2026-03-17 一体型受動デバイス上に積み重ねられたバルク音響波共振器

Publications (2)

Publication Number Publication Date
JP2022128590A true JP2022128590A (ja) 2022-09-02
JP2022128590A5 JP2022128590A5 (cg-RX-API-DMAC7.html) 2025-06-11

Family

ID=82702318

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2022022554A Pending JP2022128590A (ja) 2021-02-23 2022-02-17 一体型受動デバイス上に積み重ねられたバルク音響波共振器
JP2026042729A Pending JP2026094466A (ja) 2021-02-23 2026-03-17 一体型受動デバイス上に積み重ねられたバルク音響波共振器

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2026042729A Pending JP2026094466A (ja) 2021-02-23 2026-03-17 一体型受動デバイス上に積み重ねられたバルク音響波共振器

Country Status (5)

Country Link
US (1) US11923827B2 (cg-RX-API-DMAC7.html)
JP (2) JP2022128590A (cg-RX-API-DMAC7.html)
KR (1) KR102983765B1 (cg-RX-API-DMAC7.html)
CN (1) CN114978092A (cg-RX-API-DMAC7.html)
DE (1) DE102022201420A1 (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116562212B (zh) * 2023-05-26 2024-10-11 安徽大学 一种有限元结合Mason模型的体声波滤波器设计方法

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015025758A (ja) * 2013-07-26 2015-02-05 Hoya株式会社 基板検査方法、基板製造方法および基板検査装置
WO2015019989A1 (ja) * 2013-08-07 2015-02-12 Hoya株式会社 感光性ガラス成形体およびその製造方法
US20160093578A1 (en) * 2014-09-30 2016-03-31 Skyworks Solutions, Inc. Network with integrated passive device and conductive trace in packaging substrate and related modules and devices
WO2019065027A1 (ja) * 2017-09-29 2019-04-04 株式会社村田製作所 ハイブリッドフィルタ装置およびマルチプレクサ
JP2020014204A (ja) * 2018-07-18 2020-01-23 スカイワークス ソリューションズ, インコーポレイテッドSkyworks Solutions, Inc. Ｌｃフィルタにカスケード接続されたハイブリッド弾性ｌｃフィルタ
WO2020139951A1 (en) * 2018-12-28 2020-07-02 3D Glass Solutions, Inc. Heterogenous integration for rf, microwave and mm wave systems in photoactive glass substrates
JP2020108066A (ja) * 2018-12-28 2020-07-09 株式会社村田製作所 フィルタ回路及びフィルタ装置
JP2020113983A (ja) * 2019-01-14 2020-07-27 コーボ ユーエス，インコーポレイティド バルク音響波共振器についてのステップ配設を備えた上部電極

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11050412B2 (en) * 2016-09-09 2021-06-29 Qorvo Us, Inc. Acoustic filter using acoustic coupling
WO2019132937A1 (en) * 2017-12-28 2019-07-04 Intel Corporation Hybrid filters and packages therefor
CN111628747B (zh) * 2020-04-26 2023-01-17 深圳市信维通信股份有限公司 一种滤波装置、一种射频前端装置及一种无线通信装置
JP2022024343A (ja) * 2020-07-16 2022-02-09 株式会社村田製作所 高周波モジュール及び通信装置
US20220140814A1 (en) * 2020-10-30 2022-05-05 Resonant Inc. Transversely-excited film bulk acoustic resonators with integrated passive device

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015025758A (ja) * 2013-07-26 2015-02-05 Hoya株式会社 基板検査方法、基板製造方法および基板検査装置
WO2015019989A1 (ja) * 2013-08-07 2015-02-12 Hoya株式会社 感光性ガラス成形体およびその製造方法
US20160093578A1 (en) * 2014-09-30 2016-03-31 Skyworks Solutions, Inc. Network with integrated passive device and conductive trace in packaging substrate and related modules and devices
WO2019065027A1 (ja) * 2017-09-29 2019-04-04 株式会社村田製作所 ハイブリッドフィルタ装置およびマルチプレクサ
JP2020014204A (ja) * 2018-07-18 2020-01-23 スカイワークス ソリューションズ, インコーポレイテッドSkyworks Solutions, Inc. Ｌｃフィルタにカスケード接続されたハイブリッド弾性ｌｃフィルタ
WO2020139951A1 (en) * 2018-12-28 2020-07-02 3D Glass Solutions, Inc. Heterogenous integration for rf, microwave and mm wave systems in photoactive glass substrates
JP2020108066A (ja) * 2018-12-28 2020-07-09 株式会社村田製作所 フィルタ回路及びフィルタ装置
JP2020113983A (ja) * 2019-01-14 2020-07-27 コーボ ユーエス，インコーポレイティド バルク音響波共振器についてのステップ配設を備えた上部電極

Also Published As

Publication number Publication date
CN114978092A (zh) 2022-08-30
KR102983765B1 (ko) 2026-06-29
JP2026094466A (ja) 2026-06-09
KR20220120475A (ko) 2022-08-30
US11923827B2 (en) 2024-03-05
DE102022201420A1 (de) 2022-08-25
US20220271736A1 (en) 2022-08-25

Similar Documents

Publication Publication Date Title
US6885260B2 (en) Filter using film bulk acoustic resonator and transmission/reception switch
US11165413B2 (en) Coupled resonator structure
US10243537B2 (en) Compensation circuit for use with acoustic resonators to provide a bandstop
JP5296282B2 (ja) バルク音響波装置
JP4068218B2 (ja) 結晶フィルター構造および薄膜バルク弾性波共振器を利用したフィルター
KR102696306B1 (ko) 내부 정전기 차폐 기능을 구비한 baw 필터 구조
JP4171214B2 (ja) モノリシックｆｂａｒデュプレクサおよびそれを作製する方法
JP4326063B2 (ja) 薄膜バルク弾性波装置を利用したモノリシック・フィルタ、および通過帯域レスポンスの形状と幅を制御するための最小受動素子
CN111226393B (zh) Rf滤波器和设计rf滤波器的方法
JP4468185B2 (ja) 等しい共振周波数を有する共振器フィルタ構造体
US20250062743A1 (en) Bulk acoustic wave filter structure with conductive bridge forming electrical loop with an electrode
US7138888B2 (en) Filter using piezoelectric resonator
CN111435831A (zh) 用于体声波谐振器的具有阶梯布置的顶部电极
WO2017219251A1 (zh) 一种梯形结构宽带压电滤波器
CN111342806B (zh) 具有兰姆波谐振器的压电滤波器、双工器和电子设备
US10263599B2 (en) Bulk acoustic wave (BAW) filter with coupled inductors
JP2006513662A5 (cg-RX-API-DMAC7.html)
JP2006129445A (ja) 分波器
JP3937302B2 (ja) 薄膜圧電共振器を用いたフィルタ及び送受切換器
CN111600571A (zh) 一种滤波器、信号处理设备及制造所述滤波器的方法
US11923827B2 (en) Bulk acoustic wave resonator stacked onto an integrated passive device
JPH0832402A (ja) 弾性表面波装置、移動無線機用分波器および移動無線装置
CN101180795A (zh) Saw分波器
JPH07231242A (ja) 表面波フィルタ、分波器および移動無線装置
US10931263B2 (en) Filter circuits having a resonator-based filter and a magnetically-coupled filter

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20250204

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20250204

A871 Explanation of circumstances concerning accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A871

Effective date: 20250204

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20250303

A524 Written submission of copy of amendment under article 19 pct

Free format text: JAPANESE INTERMEDIATE CODE: A524

Effective date: 20250603

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20250718

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20251117