KR102983765B1 - 집적 수동 디바이스 상에 적층되는 벌크 탄성파 공명기 - Google Patents

집적 수동 디바이스 상에 적층되는 벌크 탄성파 공명기

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Publication number
KR102983765B1
KR102983765B1 KR1020220018788A KR20220018788A KR102983765B1 KR 102983765 B1 KR102983765 B1 KR 102983765B1 KR 1020220018788 A KR1020220018788 A KR 1020220018788A KR 20220018788 A KR20220018788 A KR 20220018788A KR 102983765 B1 KR102983765 B1 KR 102983765B1
Authority
KR
South Korea
Prior art keywords
baw
ipd
filter structure
resonator
baw resonator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020220018788A
Other languages
English (en)
Korean (ko)
Other versions
KR20220120475A (ko
Inventor
제프리 갈리푸
켈리 엠. 리어
Original Assignee
코르보 유에스, 인크.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 코르보 유에스, 인크. filed Critical 코르보 유에스, 인크.
Publication of KR20220120475A publication Critical patent/KR20220120475A/ko
Application granted granted Critical
Publication of KR102983765B1 publication Critical patent/KR102983765B1/ko
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Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
    • H03H9/0547—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a vertical arrangement
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
    • H03H7/01—Frequency selective two-port networks
    • H03H7/17—Structural details of sub-circuits of frequency selective networks
    • H03H7/1741—Comprising typical LC combinations, irrespective of presence and location of additional resistors
    • H03H7/1783—Combined LC in series path
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/542—Filters comprising resonators of piezoelectric or electrostrictive material including passive elements
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/566—Electric coupling means therefor
    • H03H9/568—Electric coupling means therefor consisting of a ladder configuration

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Filters And Equalizers (AREA)
KR1020220018788A 2021-02-23 2022-02-14 집적 수동 디바이스 상에 적층되는 벌크 탄성파 공명기 Active KR102983765B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US17/182,988 US11923827B2 (en) 2021-02-23 2021-02-23 Bulk acoustic wave resonator stacked onto an integrated passive device
US17/182,988 2021-02-23

Publications (2)

Publication Number Publication Date
KR20220120475A KR20220120475A (ko) 2022-08-30
KR102983765B1 true KR102983765B1 (ko) 2026-06-29

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020220018788A Active KR102983765B1 (ko) 2021-02-23 2022-02-14 집적 수동 디바이스 상에 적층되는 벌크 탄성파 공명기

Country Status (5)

Country Link
US (1) US11923827B2 (cg-RX-API-DMAC7.html)
JP (2) JP2022128590A (cg-RX-API-DMAC7.html)
KR (1) KR102983765B1 (cg-RX-API-DMAC7.html)
CN (1) CN114978092A (cg-RX-API-DMAC7.html)
DE (1) DE102022201420A1 (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116562212B (zh) * 2023-05-26 2024-10-11 安徽大学 一种有限元结合Mason模型的体声波滤波器设计方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20160093578A1 (en) * 2014-09-30 2016-03-31 Skyworks Solutions, Inc. Network with integrated passive device and conductive trace in packaging substrate and related modules and devices
US20200228094A1 (en) * 2017-09-29 2020-07-16 Murata Manufacturing Co., Ltd. Hybrid filter device and multiplexer
JP2020113983A (ja) * 2019-01-14 2020-07-27 コーボ ユーエス，インコーポレイティド バルク音響波共振器についてのステップ配設を備えた上部電極
US20200287520A1 (en) * 2017-12-28 2020-09-10 Intel Corporation Hybrid filters and packages therefor

Family Cites Families (9)

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Publication number Priority date Publication date Assignee Title
JP2015025758A (ja) * 2013-07-26 2015-02-05 Hoya株式会社 基板検査方法、基板製造方法および基板検査装置
WO2015019989A1 (ja) * 2013-08-07 2015-02-12 Hoya株式会社 感光性ガラス成形体およびその製造方法
US11050412B2 (en) * 2016-09-09 2021-06-29 Qorvo Us, Inc. Acoustic filter using acoustic coupling
DE102019210493B4 (de) * 2018-07-18 2026-05-07 Skyworks Solutions, Inc. Hybrides akustisches lc-filter kaskadiert mit lc-filter
JP2020108066A (ja) * 2018-12-28 2020-07-09 株式会社村田製作所 フィルタ回路及びフィルタ装置
KR102493538B1 (ko) * 2018-12-28 2023-02-06 3디 글래스 솔루션즈 인코포레이티드 광활성 유리 기판들에서 ｒｆ, 마이크로파, 및 ｍｍ 파 시스템들을 위한 이종 통합
CN111628747B (zh) * 2020-04-26 2023-01-17 深圳市信维通信股份有限公司 一种滤波装置、一种射频前端装置及一种无线通信装置
JP2022024343A (ja) * 2020-07-16 2022-02-09 株式会社村田製作所 高周波モジュール及び通信装置
US20220140814A1 (en) * 2020-10-30 2022-05-05 Resonant Inc. Transversely-excited film bulk acoustic resonators with integrated passive device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20160093578A1 (en) * 2014-09-30 2016-03-31 Skyworks Solutions, Inc. Network with integrated passive device and conductive trace in packaging substrate and related modules and devices
US20200228094A1 (en) * 2017-09-29 2020-07-16 Murata Manufacturing Co., Ltd. Hybrid filter device and multiplexer
US20200287520A1 (en) * 2017-12-28 2020-09-10 Intel Corporation Hybrid filters and packages therefor
JP2020113983A (ja) * 2019-01-14 2020-07-27 コーボ ユーエス，インコーポレイティド バルク音響波共振器についてのステップ配設を備えた上部電極

Also Published As

Publication number Publication date
CN114978092A (zh) 2022-08-30
JP2026094466A (ja) 2026-06-09
JP2022128590A (ja) 2022-09-02
KR20220120475A (ko) 2022-08-30
US11923827B2 (en) 2024-03-05
DE102022201420A1 (de) 2022-08-25
US20220271736A1 (en) 2022-08-25

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