DE102022201420A1 - Auf einer integrierten passiven vorrichtung gestapelter resonator für akustische volumenwellen - Google Patents

Auf einer integrierten passiven vorrichtung gestapelter resonator für akustische volumenwellen Download PDF

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Publication number
DE102022201420A1
DE102022201420A1 DE102022201420.0A DE102022201420A DE102022201420A1 DE 102022201420 A1 DE102022201420 A1 DE 102022201420A1 DE 102022201420 A DE102022201420 A DE 102022201420A DE 102022201420 A1 DE102022201420 A1 DE 102022201420A1
Authority
DE
Germany
Prior art keywords
baw
ipd
filter structure
resonator
baw resonator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE102022201420.0A
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German (de)
English (en)
Inventor
Jeffery Galipeau
Kelly M. Lear
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Qorvo US Inc
Original Assignee
Qorvo US Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qorvo US Inc filed Critical Qorvo US Inc
Publication of DE102022201420A1 publication Critical patent/DE102022201420A1/de
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
    • H03H9/0547—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a vertical arrangement
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
    • H03H7/01—Frequency selective two-port networks
    • H03H7/17—Structural details of sub-circuits of frequency selective networks
    • H03H7/1741—Comprising typical LC combinations, irrespective of presence and location of additional resistors
    • H03H7/1783—Combined LC in series path
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/542—Filters comprising resonators of piezoelectric or electrostrictive material including passive elements
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/566—Electric coupling means therefor
    • H03H9/568—Electric coupling means therefor consisting of a ladder configuration

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Filters And Equalizers (AREA)
DE102022201420.0A 2021-02-23 2022-02-11 Auf einer integrierten passiven vorrichtung gestapelter resonator für akustische volumenwellen Pending DE102022201420A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US17/182,988 US11923827B2 (en) 2021-02-23 2021-02-23 Bulk acoustic wave resonator stacked onto an integrated passive device
US17/182,988 2021-02-23

Publications (1)

Publication Number Publication Date
DE102022201420A1 true DE102022201420A1 (de) 2022-08-25

Family

ID=82702318

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102022201420.0A Pending DE102022201420A1 (de) 2021-02-23 2022-02-11 Auf einer integrierten passiven vorrichtung gestapelter resonator für akustische volumenwellen

Country Status (5)

Country Link
US (1) US11923827B2 (cg-RX-API-DMAC7.html)
JP (2) JP2022128590A (cg-RX-API-DMAC7.html)
KR (1) KR102983765B1 (cg-RX-API-DMAC7.html)
CN (1) CN114978092A (cg-RX-API-DMAC7.html)
DE (1) DE102022201420A1 (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116562212B (zh) * 2023-05-26 2024-10-11 安徽大学 一种有限元结合Mason模型的体声波滤波器设计方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015025758A (ja) * 2013-07-26 2015-02-05 Hoya株式会社 基板検査方法、基板製造方法および基板検査装置
WO2015019989A1 (ja) * 2013-08-07 2015-02-12 Hoya株式会社 感光性ガラス成形体およびその製造方法
US9978732B2 (en) * 2014-09-30 2018-05-22 Skyworks Solutions, Inc. Network with integrated passive device and conductive trace in packaging substrate and related modules and devices
US11050412B2 (en) * 2016-09-09 2021-06-29 Qorvo Us, Inc. Acoustic filter using acoustic coupling
CN111164889B (zh) * 2017-09-29 2023-11-03 株式会社村田制作所 混合滤波器装置以及多路调制器
WO2019132937A1 (en) * 2017-12-28 2019-07-04 Intel Corporation Hybrid filters and packages therefor
DE102019210493B4 (de) * 2018-07-18 2026-05-07 Skyworks Solutions, Inc. Hybrides akustisches lc-filter kaskadiert mit lc-filter
JP2020108066A (ja) * 2018-12-28 2020-07-09 株式会社村田製作所 フィルタ回路及びフィルタ装置
KR102493538B1 (ko) * 2018-12-28 2023-02-06 3디 글래스 솔루션즈 인코포레이티드 광활성 유리 기판들에서 ｒｆ, 마이크로파, 및 ｍｍ 파 시스템들을 위한 이종 통합
US11502667B2 (en) * 2019-01-14 2022-11-15 Qorvo Us, Inc. Top electrodes with step arrangements for bulk acoustic wave resonators
CN111628747B (zh) * 2020-04-26 2023-01-17 深圳市信维通信股份有限公司 一种滤波装置、一种射频前端装置及一种无线通信装置
JP2022024343A (ja) * 2020-07-16 2022-02-09 株式会社村田製作所 高周波モジュール及び通信装置
US20220140814A1 (en) * 2020-10-30 2022-05-05 Resonant Inc. Transversely-excited film bulk acoustic resonators with integrated passive device

Also Published As

Publication number Publication date
CN114978092A (zh) 2022-08-30
KR102983765B1 (ko) 2026-06-29
JP2026094466A (ja) 2026-06-09
JP2022128590A (ja) 2022-09-02
KR20220120475A (ko) 2022-08-30
US11923827B2 (en) 2024-03-05
US20220271736A1 (en) 2022-08-25

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R081 Change of applicant/patentee

Owner name: QORVO US, INC., GREENSBORO, US

Free format text: FORMER OWNER: QORVO US, INC., GREENSBORO, US

R082 Change of representative

Representative=s name: D YOUNG & CO LLP, DE