CN114978092A - 堆叠到集成无源装置上的体声波谐振器 - Google Patents

堆叠到集成无源装置上的体声波谐振器 Download PDF

Info

Publication number
CN114978092A
CN114978092A CN202210163790.XA CN202210163790A CN114978092A CN 114978092 A CN114978092 A CN 114978092A CN 202210163790 A CN202210163790 A CN 202210163790A CN 114978092 A CN114978092 A CN 114978092A
Authority
CN
China
Prior art keywords
baw
passive device
acoustic wave
integrated passive
bulk acoustic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202210163790.XA
Other languages
English (en)
Chinese (zh)
Inventor
杰弗里·D·加利波
凯利·M·莱亚尔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Qorvo US Inc
Original Assignee
Qorvo US Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qorvo US Inc filed Critical Qorvo US Inc
Publication of CN114978092A publication Critical patent/CN114978092A/zh
Pending legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
    • H03H9/0547—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a vertical arrangement
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
    • H03H7/01—Frequency selective two-port networks
    • H03H7/17—Structural details of sub-circuits of frequency selective networks
    • H03H7/1741—Comprising typical LC combinations, irrespective of presence and location of additional resistors
    • H03H7/1783—Combined LC in series path
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/542—Filters comprising resonators of piezoelectric or electrostrictive material including passive elements
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/566—Electric coupling means therefor
    • H03H9/568—Electric coupling means therefor consisting of a ladder configuration

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Filters And Equalizers (AREA)
CN202210163790.XA 2021-02-23 2022-02-22 堆叠到集成无源装置上的体声波谐振器 Pending CN114978092A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US17/182,988 US11923827B2 (en) 2021-02-23 2021-02-23 Bulk acoustic wave resonator stacked onto an integrated passive device
US17/182,988 2021-02-23

Publications (1)

Publication Number Publication Date
CN114978092A true CN114978092A (zh) 2022-08-30

Family

ID=82702318

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202210163790.XA Pending CN114978092A (zh) 2021-02-23 2022-02-22 堆叠到集成无源装置上的体声波谐振器

Country Status (5)

Country Link
US (1) US11923827B2 (cg-RX-API-DMAC7.html)
JP (2) JP2022128590A (cg-RX-API-DMAC7.html)
KR (1) KR102983765B1 (cg-RX-API-DMAC7.html)
CN (1) CN114978092A (cg-RX-API-DMAC7.html)
DE (1) DE102022201420A1 (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116562212B (zh) * 2023-05-26 2024-10-11 安徽大学 一种有限元结合Mason模型的体声波滤波器设计方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015025758A (ja) * 2013-07-26 2015-02-05 Hoya株式会社 基板検査方法、基板製造方法および基板検査装置
WO2015019989A1 (ja) * 2013-08-07 2015-02-12 Hoya株式会社 感光性ガラス成形体およびその製造方法
US9978732B2 (en) * 2014-09-30 2018-05-22 Skyworks Solutions, Inc. Network with integrated passive device and conductive trace in packaging substrate and related modules and devices
US11050412B2 (en) * 2016-09-09 2021-06-29 Qorvo Us, Inc. Acoustic filter using acoustic coupling
CN111164889B (zh) * 2017-09-29 2023-11-03 株式会社村田制作所 混合滤波器装置以及多路调制器
WO2019132937A1 (en) * 2017-12-28 2019-07-04 Intel Corporation Hybrid filters and packages therefor
DE102019210493B4 (de) * 2018-07-18 2026-05-07 Skyworks Solutions, Inc. Hybrides akustisches lc-filter kaskadiert mit lc-filter
JP2020108066A (ja) * 2018-12-28 2020-07-09 株式会社村田製作所 フィルタ回路及びフィルタ装置
KR102493538B1 (ko) * 2018-12-28 2023-02-06 3디 글래스 솔루션즈 인코포레이티드 광활성 유리 기판들에서 ｒｆ, 마이크로파, 및 ｍｍ 파 시스템들을 위한 이종 통합
US11502667B2 (en) * 2019-01-14 2022-11-15 Qorvo Us, Inc. Top electrodes with step arrangements for bulk acoustic wave resonators
CN111628747B (zh) * 2020-04-26 2023-01-17 深圳市信维通信股份有限公司 一种滤波装置、一种射频前端装置及一种无线通信装置
JP2022024343A (ja) * 2020-07-16 2022-02-09 株式会社村田製作所 高周波モジュール及び通信装置
US20220140814A1 (en) * 2020-10-30 2022-05-05 Resonant Inc. Transversely-excited film bulk acoustic resonators with integrated passive device

Also Published As

Publication number Publication date
KR102983765B1 (ko) 2026-06-29
JP2026094466A (ja) 2026-06-09
JP2022128590A (ja) 2022-09-02
KR20220120475A (ko) 2022-08-30
US11923827B2 (en) 2024-03-05
DE102022201420A1 (de) 2022-08-25
US20220271736A1 (en) 2022-08-25

Similar Documents

Publication Publication Date Title
US6885260B2 (en) Filter using film bulk acoustic resonator and transmission/reception switch
JP5296282B2 (ja) バルク音響波装置
US7498899B2 (en) Duplexer with filters including film bulk acoustic resonators
US10243537B2 (en) Compensation circuit for use with acoustic resonators to provide a bandstop
JP4068218B2 (ja) 結晶フィルター構造および薄膜バルク弾性波共振器を利用したフィルター
JP4719683B2 (ja) ラダー型薄膜バルク音響波フィルタ
CN100442660C (zh) 多节滤波器结构和包含多节滤波器结构的无线通信装置
US20180076794A1 (en) Acoustic filter using acoustic coupling
CN1739237B (zh) 具有等谐振频率的谐振滤波器结构
US12255614B2 (en) Bulk acoustic wave filter structure with conductive bridge forming electrical loop with an electrode
US8405472B2 (en) Elastic wave filter device
KR101060870B1 (ko) 적층형 필터
US7138888B2 (en) Filter using piezoelectric resonator
JP2003332885A (ja) 弾性表面波分波器およびそれを有する通信装置
CN111342806B (zh) 具有兰姆波谐振器的压电滤波器、双工器和电子设备
JPWO2014050219A1 (ja) 弾性波フィルタ装置及びデュプレクサ
US7196596B2 (en) Film bulk-acoustic resonator filter having unbalanced-balanced input/output structure
US20080061906A1 (en) Saw duplexer
JP2006129445A (ja) 分波器
US7078984B2 (en) Duplexer and method of manufacturing same
JP3937302B2 (ja) 薄膜圧電共振器を用いたフィルタ及び送受切換器
JP5286016B2 (ja) フィルタおよびデュプレクサ、ならびにフィルタの製造方法
JP2001251102A (ja) 薄膜共振器フィルタとその構成方法
US11923827B2 (en) Bulk acoustic wave resonator stacked onto an integrated passive device
WO2004066494A1 (en) Resonator filter structure with improved balance

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination