WO2015019989A1 - 感光性ガラス成形体およびその製造方法 - Google Patents
感光性ガラス成形体およびその製造方法 Download PDFInfo
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- WO2015019989A1 WO2015019989A1 PCT/JP2014/070448 JP2014070448W WO2015019989A1 WO 2015019989 A1 WO2015019989 A1 WO 2015019989A1 JP 2014070448 W JP2014070448 W JP 2014070448W WO 2015019989 A1 WO2015019989 A1 WO 2015019989A1
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- photosensitive glass
- temperature
- photosensitive
- molded body
- glass material
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- 239000006089 photosensitive glass Substances 0.000 title claims abstract description 198
- 238000000034 method Methods 0.000 title claims abstract description 32
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 12
- 239000000463 material Substances 0.000 claims abstract description 85
- 239000013078 crystal Substances 0.000 claims abstract description 52
- 238000010438 heat treatment Methods 0.000 claims abstract description 47
- 238000000465 moulding Methods 0.000 claims abstract description 35
- 239000007787 solid Substances 0.000 claims abstract description 4
- 238000002425 crystallisation Methods 0.000 claims description 24
- 230000008025 crystallization Effects 0.000 claims description 24
- 238000001816 cooling Methods 0.000 claims description 16
- 239000002994 raw material Substances 0.000 claims description 4
- 239000005373 porous glass Substances 0.000 claims 1
- 239000011521 glass Substances 0.000 description 43
- 239000000758 substrate Substances 0.000 description 10
- 238000005530 etching Methods 0.000 description 9
- YTZVWGRNMGHDJE-UHFFFAOYSA-N tetralithium;silicate Chemical compound [Li+].[Li+].[Li+].[Li+].[O-][Si]([O-])([O-])[O-] YTZVWGRNMGHDJE-UHFFFAOYSA-N 0.000 description 8
- 235000012431 wafers Nutrition 0.000 description 7
- KXSKAZFMTGADIV-UHFFFAOYSA-N 2-[3-(2-hydroxyethoxy)propoxy]ethanol Chemical compound OCCOCCCOCCO KXSKAZFMTGADIV-UHFFFAOYSA-N 0.000 description 6
- 101000693243 Homo sapiens Paternally-expressed gene 3 protein Proteins 0.000 description 6
- 102100025757 Paternally-expressed gene 3 protein Human genes 0.000 description 6
- 239000002244 precipitate Substances 0.000 description 6
- 229910004298 SiO 2 Inorganic materials 0.000 description 5
- 238000003825 pressing Methods 0.000 description 5
- 230000000630 rising effect Effects 0.000 description 5
- 230000035939 shock Effects 0.000 description 5
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- WVMPCBWWBLZKPD-UHFFFAOYSA-N dilithium oxido-[oxido(oxo)silyl]oxy-oxosilane Chemical compound [Li+].[Li+].[O-][Si](=O)O[Si]([O-])=O WVMPCBWWBLZKPD-UHFFFAOYSA-N 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 241000511976 Hoya Species 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000009477 glass transition Effects 0.000 description 3
- 239000007791 liquid phase Substances 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000001556 precipitation Methods 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 239000005909 Kieselgur Substances 0.000 description 2
- 229910018068 Li 2 O Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000000084 colloidal system Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000004031 devitrification Methods 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 238000006479 redox reaction Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000001235 sensitizing effect Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 238000010583 slow cooling Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B32/00—Thermal after-treatment of glass products not provided for in groups C03B19/00, C03B25/00 - C03B31/00 or C03B37/00, e.g. crystallisation, eliminating gas inclusions or other impurities; Hot-pressing vitrified, non-porous, shaped glass products
- C03B32/02—Thermal crystallisation, e.g. for crystallising glass bodies into glass-ceramic articles
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B11/00—Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
- C03B11/06—Construction of plunger or mould
- C03B11/08—Construction of plunger or mould for making solid articles, e.g. lenses
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B23/00—Re-forming shaped glass
- C03B23/0013—Re-forming shaped glass by pressing
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B29/00—Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins
- C03B29/02—Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins in a discontinuous way
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B32/00—Thermal after-treatment of glass products not provided for in groups C03B19/00, C03B25/00 - C03B31/00 or C03B37/00, e.g. crystallisation, eliminating gas inclusions or other impurities; Hot-pressing vitrified, non-porous, shaped glass products
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
- C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
- C03C23/002—Other surface treatment of glass not in the form of fibres or filaments by irradiation by ultraviolet light
Definitions
- the present invention relates to a photosensitive glass molded body and a method for producing the same.
- Photosensitive glass is glass in which only an exposed portion is crystallized by exposing and heat-treating glass containing a photosensitive component and a sensitizing component.
- the crystallized portion has a significantly different dissolution rate with respect to the acid than the non-crystallized portion. Therefore, by utilizing this property, selective etching can be performed on the photosensitive glass. As a result, fine processing can be performed on the photosensitive glass without using machining. Further, by heat-treating the photosensitive glass at a temperature higher than that at the time of exposure, crystallized photosensitive glass in which fine crystals are precipitated in the photosensitive glass can be obtained. This crystallized photosensitive glass is excellent in mechanical properties.
- photosensitive glass including crystallized photosensitive glass has characteristics unique to glass and can be finely processed
- the photosensitive glass used for such applications is usually formed into a plate having a predetermined size.
- a reheat press is known as a molding method for obtaining a plate-like glass by stretching a glass material having a predetermined shape (for example, a block shape) in the radial direction.
- the block-shaped glass material is gradually heated to the vicinity of the yield point temperature (Ts), and the softened glass material is press-molded to stretch the glass material in the radial direction while reducing the thickness (enlargement). To do).
- Patent Document 1 describes that pressing is performed at a temperature lower than the temperature at which the glass crystallizes in order to prevent a phenomenon (devitrification) in which the transparency of the glass is lost due to crystallization of the glass. .
- Patent Document 2 describes controlling the crystallization temperature, liquidus temperature, and the like of glass in order to prevent crystallization of glass in heat treatment performed after glass molding.
- the photosensitive glass in the above-described application, as the substrate size increases, a size larger than the size that can be cut out from the ingot glass is required. Therefore, a method has been desired in which a photosensitive glass material cut out from an ingot glass is stretched (enlarged) to obtain a desired large-sized plate-like glass.
- the inventor applied a reheat press to the block-shaped photosensitive glass material, but crystals were precipitated in the photosensitive glass by heating, and the photosensitive glass became cloudy.
- the photosensitive glass is exposed and etched in a cloudy state in order to perform fine processing such as through-hole formation, there is a problem that the clouded portion is etched.
- the photosensitive glass is irradiated with ultraviolet rays through a photomask, and only the irradiated portion is selectively etched.
- this cloudiness occurs in the entire photosensitive glass, the unexposed portion is also exposed. It will be etched.
- the reheat press performs molding near the yield point temperature, the glass does not sufficiently soften, and there is a limit to molding into a large glass sheet (for example, about ⁇ 300 mm).
- the photosensitive glass is a glass that is difficult to press-mold, and as the crystallization progresses, the photosensitive glass becomes more difficult to deform. Therefore, there is a problem that even if the photosensitive glass material is press-molded, it cannot be stretched to a desired size.
- crystallization which precipitates at the time of the heating by a reheat press has the same composition as the crystal
- the crystal 11 is present in.
- a mask 50 is placed on the substrate 10 and exposure with ultraviolet rays 60 is performed to perform fine processing such as formation of through holes (FIG. 1B)
- the crystallized portion 12 is formed by subsequent heating (FIG. 1). 1 (c)).
- this crystallized portion 12 is removed by etching, the crystal 11 deposited during heating is also removed by etching. Then, not only the through-hole 13 but also the crystal 11 is dissolved in the etched photosensitive glass substrate 10 to form a recess 14 (FIG. 1D), and a good product of the photosensitive glass substrate 10 is obtained. There was no problem.
- the present invention is made in view of the above situation, and maintains the advantage of the photosensitive glass that only a predetermined portion of the photosensitive glass can be melted without performing machining, while maintaining the advantage of the photosensitive glass material.
- An object of the present invention is to provide a method for obtaining a plate-shaped glass molded body having a desired size by enlarging the above-mentioned glass molded body.
- the temperature range in which crystallization occurs and the temperature range in which press molding can be performed have a wide overlapping range. Therefore, the present inventors have increased the size to a desired size while preventing crystal precipitation during heating. It has been found that it is difficult to perform press molding as possible. Therefore, the present inventor has found that the above problem can be solved by holding the precipitated crystal at a temperature equal to or higher than the liquidus temperature of the photosensitive glass and then forming the crystal after dissolving the crystal. The invention has been completed.
- the aspect of the present invention is A heating step of softening the solid photosensitive glass material by heating; Molding the softened photosensitive glass material to obtain a photosensitive glass molded body, and In the heating step, a crystal precipitated on the photosensitive glass material by heating is dissolved.
- the crystal is dissolved by heating the photosensitive glass material to a temperature equal to or higher than the liquidus temperature of the photosensitive glass and holding at the temperature. More preferably, the holding time at a temperature equal to or higher than the liquidus temperature of the photosensitive glass is determined according to the heat capacity of the photosensitive glass material.
- a temperature increase rate in the crystallization temperature region of the photosensitive glass is 200 ° C./min or more.
- the method further includes a cooling step of cooling the photosensitive glass material after dissolving the crystal,
- the rate of temperature decrease in the crystallization temperature region of the photosensitive glass is 200 ° C./min or more.
- the heating step it is preferable to heat the photosensitive glass material using a holding member that holds the photosensitive glass material.
- Another aspect of the present invention is a photosensitive glass molded body produced by the method for producing a photosensitive glass molded body according to any of the above aspects.
- the present invention by expanding the photosensitive glass material while maintaining the advantage of the photosensitive glass that allows only a predetermined portion of the photosensitive glass to be melted without performing machining. It is possible to provide a method for obtaining a plate-shaped glass molded body having a desired size and the glass molded body.
- FIG. 1 is a diagram showing a state in which crystals precipitated during heating in a reheat press are dissolved by etching and depressions are formed in the photosensitive glass.
- FIG. 2 is a diagram showing a schematic profile of the surface temperature of the photosensitive glass material in the method according to the present embodiment.
- FIG. 3 is a view showing the photosensitive glass material held by the holding member in the heating step of the method according to the present embodiment.
- the photosensitive glass is not particularly limited, but the SiO 2 —Li 2 O—Al 2 O 3 glass contains Au, Ag, Cu as photosensitive components, and further includes CeO 2 as a sensitizer. Glass is exemplified. As specific compositions, SiO 2 : 55 to 85% by mass, Al 2 O 3 : 2 to 20% by mass, Li 2 O: 5 to 15% by mass, SiO 2 , Al 2 O 3 and Li 2 O Is 85% by mass or more with respect to the entire photosensitive glass, Au: 0.001 to 0.05% by mass, Ag: 0.001 to 0.5% by mass, Cu 2 O: 0.001.
- Examples include a composition containing ⁇ 1% by mass as a photosensitive component and further containing CeO 2 : 0.001 ⁇ 0.2% by mass as a sensitizer.
- PEG3 manufactured by HOYA Corporation will be described as the photosensitive glass.
- Li 2 O-2SiO 2 (lithium disilicate) crystals are precipitated inside the photosensitive glass, and crystallized photosensitive glass (PEG3C manufactured by HOYA Corporation) is obtained. can get.
- the photosensitive glass is a glass that is easily crystallized, and is a glass having a wide temperature range (crystallization temperature range) at which crystallization occurs.
- the crystallization temperature range resulting from the heating of the photosensitive glass is in the range of 500 to 995 ° C.
- the glass transition temperature (Tg) of PEG3 is 465 ° C.
- the yield point temperature (Ts) is 515 ° C.
- crystallization begins to precipitate is 995 degreeC.
- photosensitive glass is less susceptible to deformation during press molding than ordinary glass, when such crystals are deposited, it is extremely difficult to enlarge the photosensitive glass by reheat pressing.
- etching when fine processing is performed on the photosensitive glass dissolves not only the portion crystallized by exposure, but also lithium monosilicate deposited upon heating, so that depressions or the like are formed at unplanned locations. Will be formed.
- the method is different from the reheat press, and the photosensitive glass can be easily enlarged, and crystals such as lithium monosilicate are formed on the photosensitive glass (photosensitive glass molded body) after molding.
- Adopt a method that does not exist. Hereinafter, the method will be described in detail.
- a crystal lithium monosilicate or lithium disilicate
- This is a method for obtaining a photosensitive glass molded body of a large size expanded in the radial direction by molding a photosensitive glass material.
- the method is also referred to as a remelting press.
- the photosensitive glass material is not particularly limited as long as it is made of the above-described photosensitive glass.
- the shape of the photosensitive glass material is exemplified by a rod shape, a block shape, etc., but by being stretched by press molding, it is enlarged in the radial direction than the original shape and is thinly formed in the thickness direction. Any shape is acceptable.
- the holding member is used to hold a photosensitive glass material that is softened by heating and put it into press molding in a molding process described later.
- FIG. 2 shows the surface temperature profile of the photosensitive glass in the heating step, the cooling step described later, and the molding step.
- Tg vicinity of photosensitive glass ie, 465 degreeC vicinity
- 1000 degreeC which is the liquid phase temperature (995 degreeC) or more of photosensitive glass.
- the crystallization temperature region of the photosensitive glass is in the range of 500 to 995 ° C., the photosensitive glass material may be rapidly heated so as to pass through this region as quickly as possible.
- the temperature rising rate in the crystallization temperature region is 200 ° C./min or more. Even when the rate of temperature rise is in the above range, crystals such as lithium monosilicate and lithium disilicate are precipitated, but the amount of precipitation can be made to be re-dissolvable.
- the rate of temperature rise is increased to the lower limit of the above range (200 ° C./min)
- the possibility of breakage due to thermal shock is extremely high.
- the photosensitive glass is a glass having a relatively large thermal expansion coefficient
- the photosensitive glass is not damaged at about the lower limit.
- the upper limit of the temperature increase rate may be set to a temperature increase rate that does not damage the photosensitive glass material.
- the photosensitive glass material heated to near Tg is put together with the holding member into a furnace held at 1000 ° C., which is a temperature equal to or higher than the liquidus temperature.
- the photosensitive glass material After the temperature of the photosensitive glass material reaches 1000 ° C., the photosensitive glass material is held at 1000 ° C. as shown in FIG. By holding the photosensitive glass material at 1000 ° C., crystals precipitated at the time of temperature rise are redissolved. In FIG. 2, the photosensitive glass material is held at a constant temperature (1000 ° C.), but may not be a constant temperature as long as the temperature is equal to or higher than the liquidus temperature.
- the holding time is determined according to the heat capacity of the photosensitive glass material in order to completely redissolve the crystal. That is, when the weight of the photosensitive glass material is large, the holding time is lengthened, and when the weight is small, the holding time is shortened. Specifically, when the weight of the photosensitive glass material is about 1.4 kg, the holding time is about 20 minutes.
- crystals may precipitate.
- the reason is unknown, but for example, when crystals are deposited by exposure to light emitted from a furnace heater, there is a local region in the photosensitive glass material that exhibits a temperature lower than the liquidus temperature. Therefore, there may be a case where crystals are precipitated.
- the holding member is not particularly limited as long as it is a material that can withstand thermal shock caused by rapid heating.
- the holding member is put into the furnace together with the photosensitive glass material heated to the vicinity of Tg, and is rapidly heated to a temperature equal to or higher than the liquid phase temperature, and thus is configured from diatomaceous earth, alumina fiber, and the like. It is preferable.
- Such a holding member is a member necessary for preventing the softened photosensitive glass material from flowing out into the furnace.
- the photosensitive glass material 10 held by the holding member 30 is heated in a portion 10b that is in contact with the holding member 30 and a portion 10a that is not in contact as shown in FIG.
- Different temperature profiles That is, the temperature rising rate of the portion 10b that is in contact with the holding member 30 is slower than that of the portion 10a that is not in contact, and a difference occurs in the temperature rising temperature.
- the portion 10 b that is in contact with the holding member 30 has a longer time to pass through the crystallization temperature region, and the amount of crystals that precipitate is greater than the portion 10 a that is not in contact with the holding member 30. Therefore, the time for holding at a temperature equal to or higher than the liquidus temperature is determined in consideration of the amount of crystals deposited on the portion 10 b in contact with the holding member 30.
- the holding member 30 is made of the photosensitive glass material 10. It is a member necessary for holding.
- the photosensitive glass material is removed from the furnace, and the photosensitive glass material is cooled (cooling step).
- the photosensitive glass material is cooled (cooling step).
- it is preferable to perform rapid cooling so that the cooling rate in the crystallization temperature region is 200 ° C./min or more.
- the photosensitive glass material is taken out from the furnace, and is exposed to room temperature for a predetermined time, so that the temperature of the photosensitive glass material is about 700 ° C.
- the cooling process unlike the temperature increase, the photosensitive glass material and the holding member are rapidly cooled as a whole, so that a temperature difference as shown in FIG. 3 hardly occurs. Therefore, no crystals are precipitated in the cooling step.
- the molding process is performed immediately after the cooling process, and the photosensitive glass material is cooled also in the molding process.
- a photosensitive glass material taken out from the furnace and cooled to about 700 ° C. is put into a lower mold of an upper mold and a lower mold to perform press molding.
- the lower mold is heated to 500-600 ° C, and the photosensitive glass material is cooled from 700 ° C to the lower mold temperature and stretched in the radial direction by press molding, expanding the size of the photosensitive glass material.
- the lower mold temperature is set to be higher than the Tg (465 ° C.) of the photosensitive glass. By doing so, it becomes easier to stretch the photosensitive glass material, and a large-sized photosensitive glass molded body can be obtained.
- the diameter of the large-sized photosensitive glass molded body depends on the size of the photosensitive glass material, but the effect of the present invention becomes remarkable when it is 200 mm or more, and it becomes more remarkable when it is 300 mm or more.
- the diameter of the photosensitive glass molded body indicates the diameter when the photosensitive glass molded body is a circular plate, and the diameter of the side when the photosensitive glass molded body is a rectangular plate. Indicates the length.
- the pressure at the time of press molding is not particularly limited, and may be determined according to a desired size.
- the holding time during press molding is preferably about 3 to 7 minutes. If the holding time is too short, the photosensitive glass molded body tends to bend after the press molding is completed, and if the holding time is too long, the photosensitive glass molded body tends to be broken because there is a lot of internal distortion caused by stress. is there.
- the upper limit of the thickness of the photosensitive glass molded body obtained by press molding is preferably about 30 mm at the time of press molding or to prevent cracking in the subsequent process.
- distaltion removal process As described above, since the internal strain remains in the photosensitive glass molded body, there is a possibility that a crack or the like due to the internal strain (stress) may occur due to processing or the like in a subsequent process. Therefore, a process for removing internal distortion is performed (distortion removal step). Specifically, the photosensitive glass molded body is put into a heating furnace or the like, heated to the vicinity of Tg (465 ° C.), and gradually cooled from the temperature to room temperature. The rate of temperature decrease during slow cooling may be set as appropriate, but is preferably 1 ° C./h to 3 ° C./h. In the present embodiment, the temperature lowering rate is about 2 ° C./h. By gradually cooling from the vicinity of Tg to room temperature, the internal distortion of the photosensitive glass molded body is removed.
- the photosensitive glass molded body from which the internal strain has been removed is cut (sliced) so that the outer peripheral portion is removed and a plurality of wafers having a desired thickness are obtained.
- the surface of the sliced photosensitive glass molded body is polished to obtain a wafer.
- the obtained wafer is subjected to predetermined fine processing and used for an interposer, an IPD substrate, a gas electronic amplifier substrate, and the like.
- the present embodiment by holding the photosensitive glass material at a temperature equal to or higher than the liquidus temperature of the photosensitive glass, it is possible to redissolve crystals that have precipitated at the time of temperature rise. Therefore, press molding can be performed in a state where crystals are not deposited on the photosensitive glass material, and the photosensitive glass material can be stretched to a desired size. Since the photosensitive glass material that has been heated and softened to a temperature equal to or higher than the liquidus temperature is press-molded, the size can be easily increased as compared with the reheat press.
- the rate of temperature increase is set to the above rate in order to suppress the amount of precipitated crystals to such a level that it can be redissolved.
- press molding can be performed in a post process.
- the holding time is preferably determined according to the heat capacity of the photosensitive glass material.
- the photosensitive glass material that has been heated and softened to a temperature equal to or higher than the liquidus temperature is cooled. Thereafter, by performing press molding using a molding die maintained at a temperature higher than the Tg of the photosensitive glass, a photosensitive glass molded body having an enlarged size can be obtained.
- PEG3 has been described as an example of the photosensitive glass, but other photosensitive glass may be used. Even in this case, in consideration of the glass transition temperature (Tg), the yield point temperature (Ts), the liquidus temperature, etc., by remelting the photosensitive glass material, crystals are formed inside the photosensitive glass. A desired large-sized plate-shaped photosensitive glass molded body can be obtained without precipitation.
- the photosensitive glass material a block-shaped glass material cut out from PEG3 ingot glass manufactured by HOYA Corporation was used. The size of this glass material was 200 mm ⁇ 200 mm ⁇ 35 mm.
- PEG3 is a photosensitive glass having a composition of SiO 2 —Li 2 O—Al 2 O 3 , glass transition temperature (Tg) is 465 ° C., yield point temperature (Ts) is 515 ° C., and liquidus temperature is 995 ° C. Met.
- the photosensitive glass material was placed on a holding member made of diatomaceous earth and heated to Tg. Subsequently, the photosensitive glass material heated to Tg was put together with the holding member into a heating furnace held at 1000 ° C.
- the surface temperature of the photosensitive glass material put into the heating furnace was measured using a laser thermometer, the surface temperature reached 1000 ° C. in about one minute after putting into the heating furnace.
- the photosensitive glass material was held for 20 minutes after the surface temperature reached 1000 ° C.
- the softened photosensitive glass material was taken out of the heating furnace, left at room temperature for 30 seconds, and cooled to about 700 ° C. Subsequently, the photosensitive glass material cooled to about 700 ° C. was put into a lower mold heated to 500 ° C., and pressed with the upper mold to perform press molding of the photosensitive glass material. The pressing time was 3-7 minutes.
- the size of the photosensitive glass material (photosensitive glass molded body) after press molding was 320 mm ⁇ 320 mm ⁇ 20 mm. Moreover, when the cross section of this photosensitive glass was visually observed, it was confirmed that the cross section was transparent and crystals were not precipitated.
- the outer periphery of the obtained photosensitive glass molded body was removed, and further sliced into a thin plate with a wire saw.
- the surface of the sliced photosensitive glass molded body was polished to obtain a wafer.
- the wafer size was 300 mm ⁇ 300 mm ⁇ 0.9 mm.
- the resulting wafer was finely processed to form a through hole.
- the diameter of the through holes was 170 ⁇ m
- the arrangement pitch of the through holes was 280 ⁇ m
- the total number of through holes was 1544423.
- a crystallized portion (latent image) was formed on the wafer by exposure to ultraviolet rays, but the sensitivity to ultraviolet rays was not deteriorated and a good latent image could be formed.
- etching with hydrofluoric acid was performed to dissolve the latent image to form a through hole. However, the etching defect does not occur, and the through hole can be formed satisfactorily. Formation of a dent etc. was not seen.
Abstract
Description
固体状の感光性ガラス素材を加熱により軟化させる加熱工程と、
軟化した前記感光性ガラス素材を成形して、感光性ガラス成形体を得る成形工程と、を有し、
前記加熱工程において、加熱により前記感光性ガラス素材に析出した結晶を溶解させることを特徴とする感光性ガラス成形体の製造方法である。
前記冷却工程において、前記感光性ガラスの結晶化温度領域における降温速度が200℃/min以上であることが好ましい。
1.感光性ガラス
2.感光性ガラス成形体の製造方法
3.本実施形態の効果
4.変形例等
感光性ガラスとしては特に制限されないが、SiO2-Li2O-Al2O3系ガラスに、感光性成分としてのAu,Ag,Cuが含まれ、さらに増感剤としてのCeO2が含まれるガラスが例示される。具体的な組成として、SiO2:55~85質量%、Al2O3:2~20質量%、Li2O:5~15質量%であって、SiO2、Al2O3およびLi2Oの合計が感光性ガラス全体に対して85質量%以上含有されており、Au:0.001~0.05質量%、Ag:0.001~0.5質量%、Cu2O:0.001~1質量%を感光性成分とし、さらにCeO2:0.001~0.2質量%を増感剤として含有する組成が例示される。本実施形態では、感光性ガラスとして、HOYA株式会社製PEG3について述べる。
上述したように、感光性ガラスは結晶化しやすく、結晶化温度領域も広い。したがって、このような感光性ガラスをリヒートプレスにより成形しようとすると、結晶が容易に析出してしまう。特に、リヒートプレスでは、熱衝撃によるガラスの割れを防止するため、屈伏点温度(Ts)近傍まで徐々に加熱して成形することになる。感光性ガラスを、感光性ガラスのTs(515℃)近傍まで加熱する場合、比較的に緩やかに加熱すると、リチウムダイシリケートが析出する傾向にあり、それよりも急激に加熱すると、リチウムモノシリケートが析出する傾向にある。
続いて、感光性ガラス素材を保持部材上に載置して加熱する。保持部材は、加熱により軟化する感光性ガラス素材を保持して、後述する成形工程におけるプレス成形に投入するために用いられる。
保持時間が経過した後、感光性ガラス素材が炉から取り出され、感光性ガラス素材は冷却される(冷却工程)。昇温時と同様に、感光性ガラスの結晶化温度領域をできる限り速く通過させるために、感光性ガラス素材を急冷することが好ましい。具体的には、結晶化温度領域における降温速度が200℃/min以上となるように急冷することが好ましい。
本実施形態では、成形工程は冷却工程の直後に行われ、成形工程においても感光性ガラス素材は冷却される。具体的には、炉内から取り出され、700℃程度まで冷却された感光性ガラス素材を、上型と下型とから構成される成形型の下型に投入してプレス成形を行う。下型は500~600℃に加熱されており、感光性ガラス素材は、700℃から下型の温度まで冷却されると共に、プレス成形により径方向に引き伸ばされ、感光性ガラス素材よりもサイズが拡大された感光性ガラス成形体とされる。下型の温度は、感光性ガラスのTg(465℃)よりも高い温度になるように設定されている。このようにすることにより、感光性ガラス素材をより引き伸ばしやすくなり、大サイズの感光性ガラス成形体を得ることができる。
上述したように、感光性ガラス成形体には、内部歪みが残存しているため、後工程における加工等により、この内部歪み(応力)に起因する割れ等が生じる可能性がある。そのため、内部歪みを除去する処理を行う(歪み除去工程)。具体的には、感光性ガラス成形体を加熱炉等に投入してTg(465℃)近傍まで加熱し、その温度から室温まで徐冷する。徐冷時の降温速度は適宜設定すればよいが、1℃/h~3℃/hが好ましい。本実施形態では、降温速度を2℃/h程度とする。Tg近傍から室温まで徐冷することにより、感光性ガラス成形体の内部歪みが除去される。
内部歪みが除去された感光性ガラス成形体は外周部が除去され、さらに、所望の厚みを有するウエハーが複数得られるように切断(スライス)される。スライスされた感光性ガラス成形体の表面を研磨して、ウエハーを得る。得られたウエハーは、所定の微細加工が施され、インターポーザ、IPD用基板、ガス電子増幅器用基板等に用いられる。
本実施形態によれば、感光性ガラスの液相温度以上の温度で感光性ガラス素材を保持することにより、昇温時に析出した結晶を再溶解することができる。そのため、感光性ガラス素材に結晶が析出していない状態でプレス成形を行い、感光性ガラス素材を所望のサイズまで引き伸ばすことができる。液相温度以上の温度まで加熱されて軟化した感光性ガラス素材をプレス成形するため、リヒートプレスよりも容易にサイズを拡大することができる。しかも、結晶が析出していないため、貫通孔形成等の微細加工時に露光して形成される結晶化部分に対するエッチングを行っても、結晶化部分以外の部分がエッチングにより除去され、窪みが形成されることはない。
上述した実施形態では、感光性ガラスとして、PEG3を例にして説明したが、他の感光性ガラスであってもよい。この場合であっても、ガラス転移温度(Tg)、屈伏点温度(Ts)、液相温度等を考慮して、感光性ガラス素材をリメルティングプレスすることにより、感光性ガラスの内部に結晶を析出させることなく、所望の大サイズの板状感光性ガラス成形体を得ることができる。
感光性ガラス素材として、HOYA株式会社製PEG3のインゴットガラスから切り出されたブロック状のガラス素材を用いた。このガラス素材の寸法は、200mm×200mm×35mmであった。PEG3は、SiO2-Li2O-Al2O3の組成を有する感光性ガラスであり、ガラス転移温度(Tg)は465℃、屈伏点温度(Ts)は515℃、液相温度は995℃であった。
11…加熱により析出した結晶
12…結晶化部分
13…貫通孔
14…窪み
30…保持部材
Claims (8)
- 固体状の感光性ガラス素材を加熱により軟化させる加熱工程と、
軟化した前記感光性ガラス素材を成形して、感光性ガラス成形体を得る成形工程と、を有し、
前記加熱工程において、加熱により前記感光性ガラス素材に析出した結晶を溶解させる
ことを特徴とする感光性ガラス成形体の製造方法。 - 前記加熱工程において、感光性ガラスの液相温度以上の温度まで前記感光性ガラス素材を加熱し、該温度で保持することにより、前記結晶を溶解させることを特徴とする請求項1に記載の感光性ガラス成形体の製造方法。
- 前記感光性ガラスの液相温度以上の温度における保持時間を、前記感光性ガラス素材の熱容量に応じて決定することを特徴とする請求項2に記載の感光性ガラス成形体の製造方法。
- 前記加熱工程において、前記感光性ガラスの結晶化温度領域における昇温速度が200℃/min以上であることを特徴とする請求項1から3のいずれかに記載の感光性ガラス成形体の製造方法。
- 前記結晶を溶解させた後に、前記感光性ガラス素材を冷却する冷却工程をさらに有し、
前記冷却工程において、前記感光性ガラスの結晶化温度領域における降温速度が200℃/min以上であることを特徴とする請求項1から4のいずれかに記載の感光性ガラス成形体の製造方法。 - 前記感光性ガラス成形体に蓄積された歪みを除去する歪み除去工程をさらに有することを特徴とする請求項1から5のいずれかに記載の感光性ガラス成形体の製造方法。
- 前記加熱工程において、前記感光性ガラス素材を保持する保持部材を用いて、前記感光性ガラス素材を加熱することを特徴とする請求項1から6のいずれかに記載の感光性ガラス成形体の製造方法。
- 請求項1~7のいずれかに記載の感光性ガラス成形体の製造方法によって製造された感光性ガラス成形体。
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JP2017036199A (ja) * | 2015-05-18 | 2017-02-16 | ショット アクチエンゲゼルシャフトSchott AG | リドロー法による光構造化可能なガラス体の製造方法 |
JP2017036200A (ja) * | 2015-05-18 | 2017-02-16 | ショット アクチエンゲゼルシャフトSchott AG | 増感された感光性ガラスおよびその製造 |
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