JP2022079200A - 発光素子 - Google Patents
発光素子 Download PDFInfo
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- JP2022079200A JP2022079200A JP2020190238A JP2020190238A JP2022079200A JP 2022079200 A JP2022079200 A JP 2022079200A JP 2020190238 A JP2020190238 A JP 2020190238A JP 2020190238 A JP2020190238 A JP 2020190238A JP 2022079200 A JP2022079200 A JP 2022079200A
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- 239000004065 semiconductor Substances 0.000 claims abstract description 65
- 239000012535 impurity Substances 0.000 claims abstract description 37
- 239000000203 mixture Substances 0.000 claims abstract description 31
- 150000004767 nitrides Chemical class 0.000 claims abstract description 26
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 13
- 229910052733 gallium Inorganic materials 0.000 claims abstract description 12
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 3
- 238000000605 extraction Methods 0.000 abstract description 8
- 229910002704 AlGaN Inorganic materials 0.000 description 15
- 239000007789 gas Substances 0.000 description 13
- 239000000758 substrate Substances 0.000 description 12
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 239000013078 crystal Substances 0.000 description 5
- 230000007547 defect Effects 0.000 description 5
- 230000006378 damage Effects 0.000 description 4
- 230000031700 light absorption Effects 0.000 description 4
- 239000011777 magnesium Substances 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 229910052594 sapphire Inorganic materials 0.000 description 3
- 239000010980 sapphire Substances 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 229910052749 magnesium Inorganic materials 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical group C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 2
- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical group C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229910021478 group 5 element Inorganic materials 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table
- H01L33/32—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table containing nitrogen
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/04—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table
- H01L33/32—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table containing nitrogen
- H01L33/325—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table containing nitrogen characterised by the doping materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/025—Physical imperfections, e.g. particular concentration or distribution of impurities
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/04—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
- H01L33/06—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction within the light emitting region, e.g. quantum confinement structure or tunnel barrier
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/12—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a stress relaxation structure, e.g. buffer layer
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Led Devices (AREA)
Abstract
【解決手段】発光素子1は、n型コンタクト層12と、n型コンタクト層上に設けられた中間層20とを含むn側半導体層10と、中間層上に設けられた活性層30と、活性層上に設けられたp側半導体層40とを備える。中間層は、第1層21と第2層22とからなる積層部23を少なくとも1つ含み、第1層は、n型不純物とAlとGaとを含むn型窒化物半導体層であり、第2層は、AlとGaとを含み、第1層よりもn型不純物濃度が低く、第1層の厚さよりも厚い窒化物半導体層である。第1層のAl組成比は、第2層のAl組成比よりも高い。
【選択図】図1
Description
図2における右側の縦軸は、サンプルAの順方向電圧Vfを基準(0)にした順方向電圧Vfの変化量を表し、この特性は図2において折れ線グラフで表される。
図3における左側の縦軸は、サンプルAの発光効率を基準(0%)にした発光効率の増加量を表し、この特性は図3において棒グラフで表される。
図3における右側の縦軸は、サンプルAのESD(Electro Static Discharge)破壊率を基準(0)にしたESD破壊率の変化量を表し、この特性は図3において折れ線グラフで表される。
Claims (10)
- n型コンタクト層と、前記n型コンタクト層上に設けられた中間層とを含むn側半導体層と、
前記中間層上に設けられた活性層と、
前記活性層上に設けられたp側半導体層と、
を備え、
前記中間層は、第1層と第2層とからなる積層部を少なくとも1つ含み、
前記第1層は、n型不純物とAlとGaとを含むn型窒化物半導体層であり、
前記第2層は、AlとGaとを含み、前記第1層よりもn型不純物濃度が低く、前記第1層の厚さよりも厚い窒化物半導体層であり、
前記第1層のAl組成比は、前記第2層のAl組成比よりも高い発光素子。 - 前記中間層は、複数の前記積層部を含む請求項1に記載の発光素子。
- 複数の前記第1層のうち、前記活性層に最も近い位置にある前記第1層のAl組成比は、他の前記第1層のAl組成比よりも高い請求項2に記載の発光素子。
- 複数の前記第1層のうち、前記活性層に最も近い位置にある前記第1層のn型不純物濃度は、他の前記第1層のn型不純物濃度よりも高い請求項2または3に記載の発光素子。
- 前記中間層は、前記活性層に最も近い位置にある前記第1層と、前記活性層との間に設けられ、前記活性層に最も近い位置にある前記第1層よりもn型不純物濃度が低く、AlとGaとを含む窒化物半導体層をさらに含む請求項4に記載の発光素子。
- 複数の前記第2層のうち、前記活性層に最も近い位置にある前記第2層のn型不純物濃度は、他の前記第2層のn型不純物濃度よりも高い請求項2~5のいずれか1つに記載の発光素子。
- 前記n型不純物はシリコンである請求項1~6のいずれか1つに記載の発光素子。
- 前記第2層の厚さは、前記第1層の厚さの10倍以上である請求項1~7のいずれか1つに記載の発光素子。
- 前記第2層の厚さは、50nm以上100nm以下である請求項1~8のいずれか1つに記載の発光素子。
- 前記第1層は、Ala1Ga1-a1N(0<a1<1)からなり、
前記第2層は、Ala2Ga1-a2N(0<a2<1)からなり、
前記第1層のAl組成比a1及び前記第2層のAl組成比a2は、0.01以下である請求項1~9のいずれか1つに記載の発光素子。
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JP2020190238A JP7333504B2 (ja) | 2020-11-16 | 2020-11-16 | 発光素子 |
US17/507,058 US12009454B2 (en) | 2020-11-16 | 2021-10-21 | Light emitting device |
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JP2020190238A JP7333504B2 (ja) | 2020-11-16 | 2020-11-16 | 発光素子 |
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JP2022079200A true JP2022079200A (ja) | 2022-05-26 |
JP7333504B2 JP7333504B2 (ja) | 2023-08-25 |
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Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1041549A (ja) * | 1996-04-22 | 1998-02-13 | Toshiba Electron Eng Corp | 発光素子及びその製造方法 |
JPH11177175A (ja) * | 1997-05-26 | 1999-07-02 | Nichia Chem Ind Ltd | 窒化物半導体素子 |
JP2000286509A (ja) * | 1998-11-17 | 2000-10-13 | Nichia Chem Ind Ltd | 窒化物半導体素子 |
JP2009088506A (ja) * | 2007-10-02 | 2009-04-23 | Epivalley Co Ltd | Iii族窒化物半導体発光素子 |
KR20120088983A (ko) * | 2011-02-01 | 2012-08-09 | 엘지이노텍 주식회사 | 발광소자 |
JP2012227220A (ja) * | 2011-04-15 | 2012-11-15 | Sanken Electric Co Ltd | 半導体装置 |
-
2020
- 2020-11-16 JP JP2020190238A patent/JP7333504B2/ja active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1041549A (ja) * | 1996-04-22 | 1998-02-13 | Toshiba Electron Eng Corp | 発光素子及びその製造方法 |
JPH11177175A (ja) * | 1997-05-26 | 1999-07-02 | Nichia Chem Ind Ltd | 窒化物半導体素子 |
JP2000286509A (ja) * | 1998-11-17 | 2000-10-13 | Nichia Chem Ind Ltd | 窒化物半導体素子 |
JP2009088506A (ja) * | 2007-10-02 | 2009-04-23 | Epivalley Co Ltd | Iii族窒化物半導体発光素子 |
KR20120088983A (ko) * | 2011-02-01 | 2012-08-09 | 엘지이노텍 주식회사 | 발광소자 |
JP2012227220A (ja) * | 2011-04-15 | 2012-11-15 | Sanken Electric Co Ltd | 半導体装置 |
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JP7333504B2 (ja) | 2023-08-25 |
US20220158025A1 (en) | 2022-05-19 |
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