JP7385138B2 - 発光素子の製造方法 - Google Patents
発光素子の製造方法 Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title claims description 16
- 239000004065 semiconductor Substances 0.000 claims description 156
- 239000012535 impurity Substances 0.000 claims description 68
- 230000004888 barrier function Effects 0.000 claims description 24
- 150000004767 nitrides Chemical class 0.000 claims description 21
- 238000000034 method Methods 0.000 claims description 16
- 239000007789 gas Substances 0.000 description 16
- 239000000758 substrate Substances 0.000 description 16
- 230000000052 comparative effect Effects 0.000 description 15
- 238000009792 diffusion process Methods 0.000 description 10
- 239000011777 magnesium Substances 0.000 description 9
- 239000002994 raw material Substances 0.000 description 9
- 229910002704 AlGaN Inorganic materials 0.000 description 8
- 230000003287 optical effect Effects 0.000 description 7
- 239000000203 mixture Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 229910052594 sapphire Inorganic materials 0.000 description 3
- 239000010980 sapphire Substances 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000012159 carrier gas Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- -1 for example Substances 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- 229910052749 magnesium Inorganic materials 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- RGGPNXQUMRMPRA-UHFFFAOYSA-N triethylgallium Chemical compound CC[Ga](CC)CC RGGPNXQUMRMPRA-UHFFFAOYSA-N 0.000 description 2
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 2
- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 2
- IBEFSUTVZWZJEL-UHFFFAOYSA-N trimethylindium Chemical compound C[In](C)C IBEFSUTVZWZJEL-UHFFFAOYSA-N 0.000 description 2
- 230000005641 tunneling Effects 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 229910002601 GaN Inorganic materials 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- QBJCZLXULXFYCK-UHFFFAOYSA-N magnesium;cyclopenta-1,3-diene Chemical compound [Mg+2].C1C=CC=[C-]1.C1C=CC=[C-]1 QBJCZLXULXFYCK-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910003465 moissanite Inorganic materials 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/15—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components with at least one potential-jump barrier or surface barrier specially adapted for light emission
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/04—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
- H01L33/06—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction within the light emitting region, e.g. quantum confinement structure or tunnel barrier
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02439—Materials
- H01L21/02455—Group 13/15 materials
- H01L21/02458—Nitrides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02494—Structure
- H01L21/02496—Layer structure
- H01L21/02505—Layer structure consisting of more than two layers
- H01L21/02507—Alternating layers, e.g. superlattice
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02538—Group 13/15 materials
- H01L21/0254—Nitrides
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0062—Processes for devices with an active region comprising only III-V compounds
- H01L33/0066—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound
- H01L33/007—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound comprising nitride compounds
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/025—Physical imperfections, e.g. particular concentration or distribution of impurities
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of group III and group V of the periodic system
- H01L33/32—Materials of the light emitting region containing only elements of group III and group V of the periodic system containing nitrogen
Description
次に、実施例1~3及び比較例について説明する。
実施例1~3の発光素子及び比較例の発光素子を下記のように作製し、実施例の発光素子1~3と比較例の発光素子とにおける光出力及び駆動電圧の値を評価した。
比較例の発光素子は、第2超格子層42を形成する際の成長温度が異なる以外は実施例1の発光素子と同じ条件で作製した発光素子である。比較例では、第2超格子層42を形成する際の成長温度を第1超格子層22を形成する際の成長温度と同じ温度で成長した。
10 基板
20 第1発光部
21 第1n型半導体層
22 第1超格子層
23 第1発光層
24 第1p型半導体層
30 トンネル接合部
30a 第1層
30b 第2層
40 第2発光部
41 第2n型半導体層
42 第2超格子層
43 第2発光層
44 第2p型半導体層
51 n側電極
52 p側電極
100 半導体構造体
Claims (5)
- n型不純物を含む第1n型半導体層を形成する工程と、
前記第1n型半導体層上に、第1成長温度で第1超格子層を形成する工程と、
前記第1超格子層上に第1発光層を形成する工程と、
前記第1発光層上にp型不純物を含む第1p型半導体層を形成する工程と、
前記第1p型半導体層上にトンネル接合部を形成する工程と、
前記トンネル接合部上に、n型不純物を含む第2n型半導体層を形成する工程と、
前記第2n型半導体層上に第2成長温度で第2超格子層を形成する工程と、
前記第2超格子層上に第2発光層を形成する工程と、
前記第2発光層上にp型不純物を含む第2p型半導体層を形成する工程と、を有し、
前記第2成長温度は、前記第1成長温度よりも低く、かつ前記トンネル接合部を形成するときの成長温度よりも低い発光素子の製造方法。 - n型不純物を含む第1n型半導体層を形成する工程と、
前記第1n型半導体層上に、第1成長温度で第1超格子層を形成する工程と、
前記第1超格子層上に第1発光層を形成する工程と、
前記第1発光層上にp型不純物を含む第1p型半導体層を形成する工程と、
前記第1p型半導体層上にトンネル接合部を形成する工程と、
前記トンネル接合部上に、n型不純物を含む第2n型半導体層を形成する工程と、
前記第2n型半導体層上に第2成長温度で第2超格子層を形成する工程と、
前記第2超格子層上に第2発光層を形成する工程と、
前記第2発光層上にp型不純物を含む第2p型半導体層を形成する工程と、を有し、
前記第1発光層を形成する工程において、複数の第1井戸層と、前記第1井戸層よりもバンドギャップエネルギーが大きい複数の第1障壁層と、を含む前記第1発光層を形成し、
前記第2成長温度は、前記第1成長温度よりも低く、かつ前記第1井戸層を形成するときの成長温度よりも低い発光素子の製造方法。 - n型不純物を含む第1n型半導体層を形成する工程と、
前記第1n型半導体層上に、第1成長温度で第1超格子層を形成する工程と、
前記第1超格子層上に第1発光層を形成する工程と、
前記第1発光層上にp型不純物を含む第1p型半導体層を形成する工程と、
前記第1p型半導体層上にトンネル接合部を形成する工程と、
前記トンネル接合部上に、n型不純物を含む第2n型半導体層を形成する工程と、
前記第2n型半導体層上に第2成長温度で第2超格子層を形成する工程と、
前記第2超格子層上に第2発光層を形成する工程と、
前記第2発光層上にp型不純物を含む第2p型半導体層を形成する工程と、を有し、
前記第2発光層を形成する工程において、複数の第2井戸層と、前記第2井戸層よりもバンドギャップエネルギーが大きい複数の第2障壁層と、を含む前記第2発光層を形成し、
前記第2成長温度は、前記第1成長温度よりも低く、かつ前記第2井戸層を形成するときの成長温度よりも低い発光素子の製造方法。 - 前記第2成長温度は、前記第1成長温度よりも10℃以上30℃以下低い請求項1~3のいずれか1つに記載の発光素子の製造方法。
- 前記第2超格子層を形成する工程において、複数の窒化物半導体層を含む前記第2超格子層を形成し、
前記第2超格子層の前記複数の窒化物半導体層のうち、少なくとも1つの前記窒化物半導体層を、前記第1成長温度よりも低い成長温度で形成する請求項1~4のいずれか1つに記載の発光素子の製造方法。
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Citations (2)
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JP2008091459A (ja) | 2006-09-29 | 2008-04-17 | Rohm Co Ltd | Led照明装置及びその製造方法 |
JP2021106245A (ja) | 2019-12-27 | 2021-07-26 | 日亜化学工業株式会社 | 発光素子の製造方法 |
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JP2008091459A (ja) | 2006-09-29 | 2008-04-17 | Rohm Co Ltd | Led照明装置及びその製造方法 |
JP2021106245A (ja) | 2019-12-27 | 2021-07-26 | 日亜化学工業株式会社 | 発光素子の製造方法 |
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