JP2022060711A - コンタクトプローブ - Google Patents

コンタクトプローブ Download PDF

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Publication number
JP2022060711A
JP2022060711A JP2020168338A JP2020168338A JP2022060711A JP 2022060711 A JP2022060711 A JP 2022060711A JP 2020168338 A JP2020168338 A JP 2020168338A JP 2020168338 A JP2020168338 A JP 2020168338A JP 2022060711 A JP2022060711 A JP 2022060711A
Authority
JP
Japan
Prior art keywords
contact probe
contact
measured
metal conductor
end portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2020168338A
Other languages
English (en)
Japanese (ja)
Inventor
遼太 小路
Ryota Shoji
雅章 深澤
Masaaki Fukazawa
卓弥 小澤
Takuya Ozawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Totoku Electric Co Ltd
Original Assignee
Totoku Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Totoku Electric Co Ltd filed Critical Totoku Electric Co Ltd
Priority to JP2020168338A priority Critical patent/JP2022060711A/ja
Priority to KR1020227039236A priority patent/KR20230082598A/ko
Priority to CN202180025869.XA priority patent/CN115427820A/zh
Priority to PCT/JP2021/026089 priority patent/WO2022074888A1/ja
Priority to TW110129583A priority patent/TW202229878A/zh
Publication of JP2022060711A publication Critical patent/JP2022060711A/ja
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G01R1/06738—Geometry aspects related to tip portion
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06755—Material aspects
    • G01R1/06761—Material aspects related to layers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2896—Testing of IC packages; Test features related to IC packages

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Measuring Leads Or Probes (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
JP2020168338A 2020-10-05 2020-10-05 コンタクトプローブ Pending JP2022060711A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2020168338A JP2022060711A (ja) 2020-10-05 2020-10-05 コンタクトプローブ
KR1020227039236A KR20230082598A (ko) 2020-10-05 2021-07-12 컨택트 프로브
CN202180025869.XA CN115427820A (zh) 2020-10-05 2021-07-12 接触探针
PCT/JP2021/026089 WO2022074888A1 (ja) 2020-10-05 2021-07-12 コンタクトプローブ
TW110129583A TW202229878A (zh) 2020-10-05 2021-08-11 接觸探針

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2020168338A JP2022060711A (ja) 2020-10-05 2020-10-05 コンタクトプローブ

Publications (1)

Publication Number Publication Date
JP2022060711A true JP2022060711A (ja) 2022-04-15

Family

ID=81125364

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2020168338A Pending JP2022060711A (ja) 2020-10-05 2020-10-05 コンタクトプローブ

Country Status (5)

Country Link
JP (1) JP2022060711A (ko)
KR (1) KR20230082598A (ko)
CN (1) CN115427820A (ko)
TW (1) TW202229878A (ko)
WO (1) WO2022074888A1 (ko)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08166407A (ja) * 1994-10-14 1996-06-25 Kobe Steel Ltd 半導体素子チェック用プローブカード
JP2002131334A (ja) 2000-10-24 2002-05-09 Nec Yamaguchi Ltd プローブ針、プローブカード、及びプローブカードの作製方法
JP2007322369A (ja) 2006-06-05 2007-12-13 Totoku Electric Co Ltd コンタクトプローブ及びその製造方法
JP5027522B2 (ja) * 2007-02-09 2012-09-19 東京特殊電線株式会社 プローブユニット及びそのプローブユニットを用いたコンタクトプローブの使用方法
JP4539681B2 (ja) * 2007-06-04 2010-09-08 三菱電機株式会社 ウエハテスト用プローブカード
JP5144997B2 (ja) * 2007-09-21 2013-02-13 東京特殊電線株式会社 コンタクトプローブユニット及びその製造方法
JP5845678B2 (ja) 2011-07-21 2016-01-20 日本電産リード株式会社 検査用接触子及び検査用治具

Also Published As

Publication number Publication date
CN115427820A (zh) 2022-12-02
WO2022074888A1 (ja) 2022-04-14
KR20230082598A (ko) 2023-06-08
TW202229878A (zh) 2022-08-01

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