JP2021534572A5 - - Google Patents

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Publication number
JP2021534572A5
JP2021534572A5 JP2021506675A JP2021506675A JP2021534572A5 JP 2021534572 A5 JP2021534572 A5 JP 2021534572A5 JP 2021506675 A JP2021506675 A JP 2021506675A JP 2021506675 A JP2021506675 A JP 2021506675A JP 2021534572 A5 JP2021534572 A5 JP 2021534572A5
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JP
Japan
Prior art keywords
layer
barrier layer
graphene barrier
tungsten
forming
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JP2021506675A
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English (en)
Japanese (ja)
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JP2021534572A (ja
JPWO2020036819A5 (https=
JP7611814B2 (ja
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Priority claimed from PCT/US2019/045872 external-priority patent/WO2020036819A1/en
Publication of JP2021534572A publication Critical patent/JP2021534572A/ja
Publication of JPWO2020036819A5 publication Critical patent/JPWO2020036819A5/ja
Publication of JP2021534572A5 publication Critical patent/JP2021534572A5/ja
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JP2021506675A 2018-08-11 2019-08-09 グラフェン拡散バリア Active JP7611814B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201862717824P 2018-08-11 2018-08-11
US62/717,824 2018-08-11
PCT/US2019/045872 WO2020036819A1 (en) 2018-08-11 2019-08-09 Graphene diffusion barrier

Publications (4)

Publication Number Publication Date
JP2021534572A JP2021534572A (ja) 2021-12-09
JPWO2020036819A5 JPWO2020036819A5 (https=) 2022-08-19
JP2021534572A5 true JP2021534572A5 (https=) 2022-08-19
JP7611814B2 JP7611814B2 (ja) 2025-01-10

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JP2021506675A Active JP7611814B2 (ja) 2018-08-11 2019-08-09 グラフェン拡散バリア

Country Status (7)

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US (2) US10916505B2 (https=)
JP (1) JP7611814B2 (https=)
KR (2) KR102637671B1 (https=)
CN (2) CN112514031A (https=)
SG (1) SG11202100359SA (https=)
TW (2) TWI807639B (https=)
WO (1) WO2020036819A1 (https=)

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