JP2021533354A5 - - Google Patents

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Publication number
JP2021533354A5
JP2021533354A5 JP2021505385A JP2021505385A JP2021533354A5 JP 2021533354 A5 JP2021533354 A5 JP 2021533354A5 JP 2021505385 A JP2021505385 A JP 2021505385A JP 2021505385 A JP2021505385 A JP 2021505385A JP 2021533354 A5 JP2021533354 A5 JP 2021533354A5
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JP
Japan
Prior art keywords
sensor according
specific
coating structure
reflective material
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021505385A
Other languages
English (en)
Japanese (ja)
Other versions
JP2021533354A (ja
JP7177244B2 (ja
Filing date
Publication date
Priority claimed from IL260956A external-priority patent/IL260956B/en
Application filed filed Critical
Publication of JP2021533354A publication Critical patent/JP2021533354A/ja
Publication of JP2021533354A5 publication Critical patent/JP2021533354A5/ja
Application granted granted Critical
Publication of JP7177244B2 publication Critical patent/JP7177244B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2021505385A 2018-08-02 2019-08-01 電子検出のためのセンサ Active JP7177244B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
IL260956 2018-08-02
IL260956A IL260956B (en) 2018-08-02 2018-08-02 Electron detection sensor
PCT/IL2019/050872 WO2020026249A1 (en) 2018-08-02 2019-08-01 Sensor for electron detection

Publications (3)

Publication Number Publication Date
JP2021533354A JP2021533354A (ja) 2021-12-02
JP2021533354A5 true JP2021533354A5 (enExample) 2022-04-12
JP7177244B2 JP7177244B2 (ja) 2022-11-22

Family

ID=66624663

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021505385A Active JP7177244B2 (ja) 2018-08-02 2019-08-01 電子検出のためのセンサ

Country Status (7)

Country Link
US (1) US11355309B2 (enExample)
JP (1) JP7177244B2 (enExample)
KR (1) KR102415698B1 (enExample)
CN (1) CN112368605B (enExample)
IL (1) IL260956B (enExample)
TW (1) TWI790394B (enExample)
WO (1) WO2020026249A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IL260956B (en) * 2018-08-02 2022-01-01 Applied Materials Israel Ltd Electron detection sensor
JP7495939B2 (ja) * 2019-01-08 2024-06-05 アプライド マテリアルズ イスラエル リミテッド 走査電子顕微鏡およびオーバーレイ監視方法
JP7548833B2 (ja) * 2021-01-28 2024-09-10 浜松ホトニクス株式会社 発光素子、光検出モジュール、発光素子の製造方法、及び走査型電子顕微鏡

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02152153A (ja) * 1988-12-02 1990-06-12 Matsushita Electric Ind Co Ltd シンチレータ用光遮蔽膜の製造方法
JPH0750596B2 (ja) * 1988-12-05 1995-05-31 松下電器産業株式会社 シンチレータ及びその光遮蔽膜の製造方法
JPH07142022A (ja) * 1993-11-19 1995-06-02 Hitachi Ltd 集束イオンビーム装置及び荷電粒子検出器
US5990483A (en) * 1997-10-06 1999-11-23 El-Mul Technologies Ltd. Particle detection and particle detector devices
JP3867635B2 (ja) 2002-07-29 2007-01-10 豊田合成株式会社 シンチレータ
US7048872B2 (en) 2002-09-16 2006-05-23 The Regents Of The University Of California Codoped direct-gap semiconductor scintillators
US6996209B2 (en) 2003-10-27 2006-02-07 Ge Medical Systems Global Technology Company, Llc Scintillator coatings having barrier protection, light transmission, and light reflection properties
JP4365255B2 (ja) * 2004-04-08 2009-11-18 浜松ホトニクス株式会社 発光体と、これを用いた電子線検出器、走査型電子顕微鏡及び質量分析装置
US7285786B2 (en) * 2005-09-09 2007-10-23 Spectral Instruments, Inc. High-resolution scintillation screen for digital imaging
US8039806B2 (en) * 2008-05-06 2011-10-18 Saint-Gobain Ceramics & Plastics, Inc. Radiation detector device having an electrically conductive optical interface
JP2009289628A (ja) * 2008-05-30 2009-12-10 Hitachi High-Technologies Corp 飛行時間型質量分析装置
KR20100065658A (ko) * 2008-12-08 2010-06-17 삼성에스디아이 주식회사 발광 장치 및 이 발광 장치를 광원으로 사용하는 표시 장치
JP5602454B2 (ja) * 2009-09-02 2014-10-08 キヤノン株式会社 シンチレータ材料
GB0918629D0 (en) * 2009-10-23 2009-12-09 Thermo Fisher Scient Bremen Detection apparatus for detecting charged particles, methods for detecting charged particles and mass spectometer
WO2012066425A2 (en) * 2010-11-16 2012-05-24 Saint-Gobain Cristaux Et Detecteurs Scintillation compound including a rare earth element and a process of forming the same
CA2864354C (en) * 2012-02-14 2023-02-28 American Science And Engineering, Inc. X-ray inspection using wavelength-shifting fiber-coupled scintillation detectors
US9211565B2 (en) * 2012-02-28 2015-12-15 Carestream Health, Inc. Adhesive layer for digital detectors
US8829451B2 (en) * 2012-06-13 2014-09-09 Hermes Microvision, Inc. High efficiency scintillator detector for charged particle detection
JP6470915B2 (ja) * 2014-05-20 2019-02-13 株式会社アルバック 放射線像変換パネルの製造方法及び放射線像変換パネル
JP2015230195A (ja) * 2014-06-04 2015-12-21 株式会社日立ハイテクノロジーズ 荷電粒子線装置
JP6676372B2 (ja) * 2015-12-28 2020-04-08 株式会社Ｓ−Ｎａｎｏｔｅｃｈ Ｃｏ−Ｃｒｅａｔｉｏｎ シンチレータ及び電子検出器
JP6576257B2 (ja) * 2016-01-29 2019-09-18 株式会社日立ハイテクノロジーズ 荷電粒子検出器、及び荷電粒子線装置
US10535493B2 (en) * 2017-10-10 2020-01-14 Kla-Tencor Corporation Photocathode designs and methods of generating an electron beam using a photocathode
IL260956B (en) * 2018-08-02 2022-01-01 Applied Materials Israel Ltd Electron detection sensor

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