JP7177244B2 - 電子検出のためのセンサ - Google Patents

電子検出のためのセンサ Download PDF

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Publication number
JP7177244B2
JP7177244B2 JP2021505385A JP2021505385A JP7177244B2 JP 7177244 B2 JP7177244 B2 JP 7177244B2 JP 2021505385 A JP2021505385 A JP 2021505385A JP 2021505385 A JP2021505385 A JP 2021505385A JP 7177244 B2 JP7177244 B2 JP 7177244B2
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Prior art keywords
scintillator
sensor
active area
coating
reflective material
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Japanese (ja)
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JP2021533354A5 (enExample
JP2021533354A (ja
Inventor
イタイ アスリン
ヤコブ レヴィン
ガイ エイタン
Original Assignee
アプライド マテリアルズ イスラエル リミテッド
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G01T1/2002—Optical details, e.g. reflecting or diffusing layers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G01T1/2006—Measuring radiation intensity with scintillation detectors using a combination of a scintillator and photodetector which measures the means radiation intensity
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/025—Detectors specially adapted to particle spectrometers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80—Constructional details
    • H10H20/85—Packages
    • H10H20/851—Wavelength conversion means
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80—Constructional details
    • H10H20/85—Packages
    • H10H20/851—Wavelength conversion means
    • H10H20/8511—Wavelength conversion means characterised by their material, e.g. binder
    • H10H20/8512—Wavelength conversion materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/02—Details
    • H01J2237/0203—Protection arrangements
    • H01J2237/0213—Avoiding deleterious effects due to interactions between particles and tube elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2443—Scintillation detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/24475—Scattered electron detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2448—Secondary particle detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
    • H01J2237/2803—Scanning microscopes characterised by the imaging method

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Measurement Of Radiation (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Photoreceptors In Electrophotography (AREA)
JP2021505385A 2018-08-02 2019-08-01 電子検出のためのセンサ Active JP7177244B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
IL260956 2018-08-02
IL260956A IL260956B (en) 2018-08-02 2018-08-02 Electron detection sensor
PCT/IL2019/050872 WO2020026249A1 (en) 2018-08-02 2019-08-01 Sensor for electron detection

Publications (3)

Publication Number Publication Date
JP2021533354A JP2021533354A (ja) 2021-12-02
JP2021533354A5 JP2021533354A5 (enExample) 2022-04-12
JP7177244B2 true JP7177244B2 (ja) 2022-11-22

Family

ID=66624663

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021505385A Active JP7177244B2 (ja) 2018-08-02 2019-08-01 電子検出のためのセンサ

Country Status (7)

Country Link
US (1) US11355309B2 (enExample)
JP (1) JP7177244B2 (enExample)
KR (1) KR102415698B1 (enExample)
CN (1) CN112368605B (enExample)
IL (1) IL260956B (enExample)
TW (1) TWI790394B (enExample)
WO (1) WO2020026249A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IL260956B (en) * 2018-08-02 2022-01-01 Applied Materials Israel Ltd Electron detection sensor
JP7495939B2 (ja) * 2019-01-08 2024-06-05 アプライド マテリアルズ イスラエル リミテッド 走査電子顕微鏡およびオーバーレイ監視方法
JP7548833B2 (ja) * 2021-01-28 2024-09-10 浜松ホトニクス株式会社 発光素子、光検出モジュール、発光素子の製造方法、及び走査型電子顕微鏡

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005298603A (ja) 2004-04-08 2005-10-27 Hamamatsu Photonics Kk 発光体と、これを用いた電子線検出器、走査型電子顕微鏡及び質量分析装置
JP2010135293A (ja) 2008-12-08 2010-06-17 Samsung Sdi Co Ltd 発光装置及びこの発光装置を光源として使用する表示装置
JP2015230195A (ja) 2014-06-04 2015-12-21 株式会社日立ハイテクノロジーズ 荷電粒子線装置
JP2017120192A (ja) 2015-12-28 2017-07-06 国立大学法人島根大学 シンチレータ及び電子検出器

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02152153A (ja) * 1988-12-02 1990-06-12 Matsushita Electric Ind Co Ltd シンチレータ用光遮蔽膜の製造方法
JPH0750596B2 (ja) * 1988-12-05 1995-05-31 松下電器産業株式会社 シンチレータ及びその光遮蔽膜の製造方法
JPH07142022A (ja) * 1993-11-19 1995-06-02 Hitachi Ltd 集束イオンビーム装置及び荷電粒子検出器
US5990483A (en) * 1997-10-06 1999-11-23 El-Mul Technologies Ltd. Particle detection and particle detector devices
JP3867635B2 (ja) 2002-07-29 2007-01-10 豊田合成株式会社 シンチレータ
US7048872B2 (en) 2002-09-16 2006-05-23 The Regents Of The University Of California Codoped direct-gap semiconductor scintillators
US6996209B2 (en) 2003-10-27 2006-02-07 Ge Medical Systems Global Technology Company, Llc Scintillator coatings having barrier protection, light transmission, and light reflection properties
US7285786B2 (en) * 2005-09-09 2007-10-23 Spectral Instruments, Inc. High-resolution scintillation screen for digital imaging
US8039806B2 (en) * 2008-05-06 2011-10-18 Saint-Gobain Ceramics & Plastics, Inc. Radiation detector device having an electrically conductive optical interface
JP2009289628A (ja) * 2008-05-30 2009-12-10 Hitachi High-Technologies Corp 飛行時間型質量分析装置
JP5602454B2 (ja) * 2009-09-02 2014-10-08 キヤノン株式会社 シンチレータ材料
GB0918629D0 (en) * 2009-10-23 2009-12-09 Thermo Fisher Scient Bremen Detection apparatus for detecting charged particles, methods for detecting charged particles and mass spectometer
WO2012066425A2 (en) * 2010-11-16 2012-05-24 Saint-Gobain Cristaux Et Detecteurs Scintillation compound including a rare earth element and a process of forming the same
CA2864354C (en) * 2012-02-14 2023-02-28 American Science And Engineering, Inc. X-ray inspection using wavelength-shifting fiber-coupled scintillation detectors
US9211565B2 (en) * 2012-02-28 2015-12-15 Carestream Health, Inc. Adhesive layer for digital detectors
US8829451B2 (en) * 2012-06-13 2014-09-09 Hermes Microvision, Inc. High efficiency scintillator detector for charged particle detection
JP6470915B2 (ja) * 2014-05-20 2019-02-13 株式会社アルバック 放射線像変換パネルの製造方法及び放射線像変換パネル
JP6576257B2 (ja) * 2016-01-29 2019-09-18 株式会社日立ハイテクノロジーズ 荷電粒子検出器、及び荷電粒子線装置
US10535493B2 (en) * 2017-10-10 2020-01-14 Kla-Tencor Corporation Photocathode designs and methods of generating an electron beam using a photocathode
IL260956B (en) * 2018-08-02 2022-01-01 Applied Materials Israel Ltd Electron detection sensor

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005298603A (ja) 2004-04-08 2005-10-27 Hamamatsu Photonics Kk 発光体と、これを用いた電子線検出器、走査型電子顕微鏡及び質量分析装置
JP2010135293A (ja) 2008-12-08 2010-06-17 Samsung Sdi Co Ltd 発光装置及びこの発光装置を光源として使用する表示装置
JP2015230195A (ja) 2014-06-04 2015-12-21 株式会社日立ハイテクノロジーズ 荷電粒子線装置
JP2017120192A (ja) 2015-12-28 2017-07-06 国立大学法人島根大学 シンチレータ及び電子検出器

Also Published As

Publication number Publication date
IL260956B (en) 2022-01-01
CN112368605B (zh) 2024-02-27
KR20210034670A (ko) 2021-03-30
TW202026665A (zh) 2020-07-16
KR102415698B1 (ko) 2022-07-05
TWI790394B (zh) 2023-01-21
IL260956A (en) 2020-02-27
US20210319976A1 (en) 2021-10-14
WO2020026249A1 (en) 2020-02-06
JP2021533354A (ja) 2021-12-02
US11355309B2 (en) 2022-06-07
CN112368605A (zh) 2021-02-12

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