CN112368605B - 用于电子检测的传感器 - Google Patents

用于电子检测的传感器 Download PDF

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Publication number
CN112368605B
CN112368605B CN201980042576.5A CN201980042576A CN112368605B CN 112368605 B CN112368605 B CN 112368605B CN 201980042576 A CN201980042576 A CN 201980042576A CN 112368605 B CN112368605 B CN 112368605B
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sensor
scintillator
coating
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thickness
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Chinese (zh)
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CN112368605A (zh
Inventor
I·阿苏林
J·列文
G·埃坦
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Applied Materials Israel Ltd
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Applied Materials Israel Ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G01T1/2002—Optical details, e.g. reflecting or diffusing layers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G01T1/2006—Measuring radiation intensity with scintillation detectors using a combination of a scintillator and photodetector which measures the means radiation intensity
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/025—Detectors specially adapted to particle spectrometers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80—Constructional details
    • H10H20/85—Packages
    • H10H20/851—Wavelength conversion means
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80—Constructional details
    • H10H20/85—Packages
    • H10H20/851—Wavelength conversion means
    • H10H20/8511—Wavelength conversion means characterised by their material, e.g. binder
    • H10H20/8512—Wavelength conversion materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/02—Details
    • H01J2237/0203—Protection arrangements
    • H01J2237/0213—Avoiding deleterious effects due to interactions between particles and tube elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2443—Scintillation detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/24475—Scattered electron detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2448—Secondary particle detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
    • H01J2237/2803—Scanning microscopes characterised by the imaging method

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Measurement Of Radiation (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Photoreceptors In Electrophotography (AREA)
CN201980042576.5A 2018-08-02 2019-08-01 用于电子检测的传感器 Active CN112368605B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
IL260956 2018-08-02
IL260956A IL260956B (en) 2018-08-02 2018-08-02 Electron detection sensor
PCT/IL2019/050872 WO2020026249A1 (en) 2018-08-02 2019-08-01 Sensor for electron detection

Publications (2)

Publication Number Publication Date
CN112368605A CN112368605A (zh) 2021-02-12
CN112368605B true CN112368605B (zh) 2024-02-27

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ID=66624663

Family Applications (1)

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CN201980042576.5A Active CN112368605B (zh) 2018-08-02 2019-08-01 用于电子检测的传感器

Country Status (7)

Country Link
US (1) US11355309B2 (enExample)
JP (1) JP7177244B2 (enExample)
KR (1) KR102415698B1 (enExample)
CN (1) CN112368605B (enExample)
IL (1) IL260956B (enExample)
TW (1) TWI790394B (enExample)
WO (1) WO2020026249A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IL260956B (en) * 2018-08-02 2022-01-01 Applied Materials Israel Ltd Electron detection sensor
JP7495939B2 (ja) * 2019-01-08 2024-06-05 アプライド マテリアルズ イスラエル リミテッド 走査電子顕微鏡およびオーバーレイ監視方法
JP7548833B2 (ja) * 2021-01-28 2024-09-10 浜松ホトニクス株式会社 発光素子、光検出モジュール、発光素子の製造方法、及び走査型電子顕微鏡

Citations (5)

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JPH11160438A (ja) * 1997-10-06 1999-06-18 El Mul Technol Ltd 粒子の検出及び粒子検出器装置
WO2005097945A1 (ja) * 2004-04-08 2005-10-20 Hamamatsu Photonics K.K. 発光体と、これを用いた電子線検出器、走査型電子顕微鏡及び質量分析装置
CN102668017A (zh) * 2009-10-23 2012-09-12 塞莫费雪科学（不来梅）有限公司 检测带电粒子的检测装置、检测带电粒子的方法以及质谱仪
CN103336294A (zh) * 2008-05-06 2013-10-02 圣戈本陶瓷及塑料股份有限公司 具有导电性的光学界面的辐射检测器装置
CN107193034A (zh) * 2012-02-14 2017-09-22 美国科技工程公司 使用波长偏移光纤耦合闪烁检测器进行x 射线检查

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JPH02152153A (ja) * 1988-12-02 1990-06-12 Matsushita Electric Ind Co Ltd シンチレータ用光遮蔽膜の製造方法
JPH0750596B2 (ja) * 1988-12-05 1995-05-31 松下電器産業株式会社 シンチレータ及びその光遮蔽膜の製造方法
JPH07142022A (ja) * 1993-11-19 1995-06-02 Hitachi Ltd 集束イオンビーム装置及び荷電粒子検出器
JP3867635B2 (ja) 2002-07-29 2007-01-10 豊田合成株式会社 シンチレータ
US7048872B2 (en) 2002-09-16 2006-05-23 The Regents Of The University Of California Codoped direct-gap semiconductor scintillators
US6996209B2 (en) 2003-10-27 2006-02-07 Ge Medical Systems Global Technology Company, Llc Scintillator coatings having barrier protection, light transmission, and light reflection properties
US7285786B2 (en) * 2005-09-09 2007-10-23 Spectral Instruments, Inc. High-resolution scintillation screen for digital imaging
JP2009289628A (ja) * 2008-05-30 2009-12-10 Hitachi High-Technologies Corp 飛行時間型質量分析装置
KR20100065658A (ko) * 2008-12-08 2010-06-17 삼성에스디아이 주식회사 발광 장치 및 이 발광 장치를 광원으로 사용하는 표시 장치
JP5602454B2 (ja) * 2009-09-02 2014-10-08 キヤノン株式会社 シンチレータ材料
WO2012066425A2 (en) * 2010-11-16 2012-05-24 Saint-Gobain Cristaux Et Detecteurs Scintillation compound including a rare earth element and a process of forming the same
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US8829451B2 (en) * 2012-06-13 2014-09-09 Hermes Microvision, Inc. High efficiency scintillator detector for charged particle detection
JP6470915B2 (ja) * 2014-05-20 2019-02-13 株式会社アルバック 放射線像変換パネルの製造方法及び放射線像変換パネル
JP2015230195A (ja) * 2014-06-04 2015-12-21 株式会社日立ハイテクノロジーズ 荷電粒子線装置
JP6676372B2 (ja) * 2015-12-28 2020-04-08 株式会社Ｓ−Ｎａｎｏｔｅｃｈ Ｃｏ−Ｃｒｅａｔｉｏｎ シンチレータ及び電子検出器
JP6576257B2 (ja) * 2016-01-29 2019-09-18 株式会社日立ハイテクノロジーズ 荷電粒子検出器、及び荷電粒子線装置
US10535493B2 (en) * 2017-10-10 2020-01-14 Kla-Tencor Corporation Photocathode designs and methods of generating an electron beam using a photocathode
IL260956B (en) * 2018-08-02 2022-01-01 Applied Materials Israel Ltd Electron detection sensor

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11160438A (ja) * 1997-10-06 1999-06-18 El Mul Technol Ltd 粒子の検出及び粒子検出器装置
WO2005097945A1 (ja) * 2004-04-08 2005-10-20 Hamamatsu Photonics K.K. 発光体と、これを用いた電子線検出器、走査型電子顕微鏡及び質量分析装置
CN103336294A (zh) * 2008-05-06 2013-10-02 圣戈本陶瓷及塑料股份有限公司 具有导电性的光学界面的辐射检测器装置
CN102668017A (zh) * 2009-10-23 2012-09-12 塞莫费雪科学（不来梅）有限公司 检测带电粒子的检测装置、检测带电粒子的方法以及质谱仪
CN107193034A (zh) * 2012-02-14 2017-09-22 美国科技工程公司 使用波长偏移光纤耦合闪烁检测器进行x 射线检查

Also Published As

Publication number Publication date
IL260956B (en) 2022-01-01
KR20210034670A (ko) 2021-03-30
TW202026665A (zh) 2020-07-16
KR102415698B1 (ko) 2022-07-05
TWI790394B (zh) 2023-01-21
IL260956A (en) 2020-02-27
US20210319976A1 (en) 2021-10-14
WO2020026249A1 (en) 2020-02-06
JP2021533354A (ja) 2021-12-02
US11355309B2 (en) 2022-06-07
CN112368605A (zh) 2021-02-12
JP7177244B2 (ja) 2022-11-22

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