IL260956B - Electron detection sensor - Google Patents

Electron detection sensor

Info

Publication number
IL260956B
IL260956B IL260956A IL26095618A IL260956B IL 260956 B IL260956 B IL 260956B IL 260956 A IL260956 A IL 260956A IL 26095618 A IL26095618 A IL 26095618A IL 260956 B IL260956 B IL 260956B
Authority
IL
Israel
Prior art keywords
sensor
electron detection
electron
detection
Prior art date
Application number
IL260956A
Other languages
English (en)
Hebrew (he)
Other versions
IL260956A (en
Original Assignee
Applied Materials Israel Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Israel Ltd filed Critical Applied Materials Israel Ltd
Priority to IL260956A priority Critical patent/IL260956B/en
Priority to JP2021505385A priority patent/JP7177244B2/ja
Priority to US17/265,187 priority patent/US11355309B2/en
Priority to KR1020217006278A priority patent/KR102415698B1/ko
Priority to CN201980042576.5A priority patent/CN112368605B/zh
Priority to PCT/IL2019/050872 priority patent/WO2020026249A1/en
Priority to TW108127503A priority patent/TWI790394B/zh
Publication of IL260956A publication Critical patent/IL260956A/en
Publication of IL260956B publication Critical patent/IL260956B/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G01T1/2002—Optical details, e.g. reflecting or diffusing layers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G01T1/2006—Measuring radiation intensity with scintillation detectors using a combination of a scintillator and photodetector which measures the means radiation intensity
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/025—Detectors specially adapted to particle spectrometers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80—Constructional details
    • H10H20/85—Packages
    • H10H20/851—Wavelength conversion means
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80—Constructional details
    • H10H20/85—Packages
    • H10H20/851—Wavelength conversion means
    • H10H20/8511—Wavelength conversion means characterised by their material, e.g. binder
    • H10H20/8512—Wavelength conversion materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/02—Details
    • H01J2237/0203—Protection arrangements
    • H01J2237/0213—Avoiding deleterious effects due to interactions between particles and tube elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2443—Scintillation detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/24475—Scattered electron detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2448—Secondary particle detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
    • H01J2237/2803—Scanning microscopes characterised by the imaging method

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Measurement Of Radiation (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Photoreceptors In Electrophotography (AREA)
IL260956A 2018-08-02 2018-08-02 Electron detection sensor IL260956B (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
IL260956A IL260956B (en) 2018-08-02 2018-08-02 Electron detection sensor
JP2021505385A JP7177244B2 (ja) 2018-08-02 2019-08-01 電子検出のためのセンサ
US17/265,187 US11355309B2 (en) 2018-08-02 2019-08-01 Sensor for electron detection
KR1020217006278A KR102415698B1 (ko) 2018-08-02 2019-08-01 전자 검출을 위한 센서
CN201980042576.5A CN112368605B (zh) 2018-08-02 2019-08-01 用于电子检测的传感器
PCT/IL2019/050872 WO2020026249A1 (en) 2018-08-02 2019-08-01 Sensor for electron detection
TW108127503A TWI790394B (zh) 2018-08-02 2019-08-02 用於電子偵測的感測器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IL260956A IL260956B (en) 2018-08-02 2018-08-02 Electron detection sensor

Publications (2)

Publication Number Publication Date
IL260956A IL260956A (en) 2020-02-27
IL260956B true IL260956B (en) 2022-01-01

Family

ID=66624663

Family Applications (1)

Application Number Title Priority Date Filing Date
IL260956A IL260956B (en) 2018-08-02 2018-08-02 Electron detection sensor

Country Status (7)

Country Link
US (1) US11355309B2 (enExample)
JP (1) JP7177244B2 (enExample)
KR (1) KR102415698B1 (enExample)
CN (1) CN112368605B (enExample)
IL (1) IL260956B (enExample)
TW (1) TWI790394B (enExample)
WO (1) WO2020026249A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IL260956B (en) * 2018-08-02 2022-01-01 Applied Materials Israel Ltd Electron detection sensor
JP7495939B2 (ja) * 2019-01-08 2024-06-05 アプライド マテリアルズ イスラエル リミテッド 走査電子顕微鏡およびオーバーレイ監視方法
JP7548833B2 (ja) * 2021-01-28 2024-09-10 浜松ホトニクス株式会社 発光素子、光検出モジュール、発光素子の製造方法、及び走査型電子顕微鏡

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02152153A (ja) * 1988-12-02 1990-06-12 Matsushita Electric Ind Co Ltd シンチレータ用光遮蔽膜の製造方法
JPH0750596B2 (ja) * 1988-12-05 1995-05-31 松下電器産業株式会社 シンチレータ及びその光遮蔽膜の製造方法
JPH07142022A (ja) * 1993-11-19 1995-06-02 Hitachi Ltd 集束イオンビーム装置及び荷電粒子検出器
US5990483A (en) * 1997-10-06 1999-11-23 El-Mul Technologies Ltd. Particle detection and particle detector devices
JP3867635B2 (ja) 2002-07-29 2007-01-10 豊田合成株式会社 シンチレータ
US7048872B2 (en) 2002-09-16 2006-05-23 The Regents Of The University Of California Codoped direct-gap semiconductor scintillators
US6996209B2 (en) 2003-10-27 2006-02-07 Ge Medical Systems Global Technology Company, Llc Scintillator coatings having barrier protection, light transmission, and light reflection properties
JP4365255B2 (ja) * 2004-04-08 2009-11-18 浜松ホトニクス株式会社 発光体と、これを用いた電子線検出器、走査型電子顕微鏡及び質量分析装置
US7285786B2 (en) * 2005-09-09 2007-10-23 Spectral Instruments, Inc. High-resolution scintillation screen for digital imaging
US8039806B2 (en) * 2008-05-06 2011-10-18 Saint-Gobain Ceramics & Plastics, Inc. Radiation detector device having an electrically conductive optical interface
JP2009289628A (ja) * 2008-05-30 2009-12-10 Hitachi High-Technologies Corp 飛行時間型質量分析装置
KR20100065658A (ko) * 2008-12-08 2010-06-17 삼성에스디아이 주식회사 발광 장치 및 이 발광 장치를 광원으로 사용하는 표시 장치
JP5602454B2 (ja) * 2009-09-02 2014-10-08 キヤノン株式会社 シンチレータ材料
GB0918629D0 (en) * 2009-10-23 2009-12-09 Thermo Fisher Scient Bremen Detection apparatus for detecting charged particles, methods for detecting charged particles and mass spectometer
WO2012066425A2 (en) * 2010-11-16 2012-05-24 Saint-Gobain Cristaux Et Detecteurs Scintillation compound including a rare earth element and a process of forming the same
CA2864354C (en) * 2012-02-14 2023-02-28 American Science And Engineering, Inc. X-ray inspection using wavelength-shifting fiber-coupled scintillation detectors
US9211565B2 (en) * 2012-02-28 2015-12-15 Carestream Health, Inc. Adhesive layer for digital detectors
US8829451B2 (en) * 2012-06-13 2014-09-09 Hermes Microvision, Inc. High efficiency scintillator detector for charged particle detection
JP6470915B2 (ja) * 2014-05-20 2019-02-13 株式会社アルバック 放射線像変換パネルの製造方法及び放射線像変換パネル
JP2015230195A (ja) * 2014-06-04 2015-12-21 株式会社日立ハイテクノロジーズ 荷電粒子線装置
JP6676372B2 (ja) * 2015-12-28 2020-04-08 株式会社Ｓ−Ｎａｎｏｔｅｃｈ Ｃｏ−Ｃｒｅａｔｉｏｎ シンチレータ及び電子検出器
JP6576257B2 (ja) * 2016-01-29 2019-09-18 株式会社日立ハイテクノロジーズ 荷電粒子検出器、及び荷電粒子線装置
US10535493B2 (en) * 2017-10-10 2020-01-14 Kla-Tencor Corporation Photocathode designs and methods of generating an electron beam using a photocathode
IL260956B (en) * 2018-08-02 2022-01-01 Applied Materials Israel Ltd Electron detection sensor

Also Published As

Publication number Publication date
CN112368605B (zh) 2024-02-27
KR20210034670A (ko) 2021-03-30
TW202026665A (zh) 2020-07-16
KR102415698B1 (ko) 2022-07-05
TWI790394B (zh) 2023-01-21
IL260956A (en) 2020-02-27
US20210319976A1 (en) 2021-10-14
WO2020026249A1 (en) 2020-02-06
JP2021533354A (ja) 2021-12-02
US11355309B2 (en) 2022-06-07
CN112368605A (zh) 2021-02-12
JP7177244B2 (ja) 2022-11-22

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