JP2021517353A5 - - Google Patents

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JP2021517353A5
JP2021517353A5 JP2020545695A JP2020545695A JP2021517353A5 JP 2021517353 A5 JP2021517353 A5 JP 2021517353A5 JP 2020545695 A JP2020545695 A JP 2020545695A JP 2020545695 A JP2020545695 A JP 2020545695A JP 2021517353 A5 JP2021517353 A5 JP 2021517353A5
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JP
Japan
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spectral characteristic
pulse
light beam
discrete
characteristic adjuster
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JP2020545695A
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Japanese (ja)
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JP2021517353A (ja
JP7044894B2 (ja
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Priority claimed from PCT/US2019/020415 external-priority patent/WO2019190700A1/en
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Publication of JP2021517353A5 publication Critical patent/JP2021517353A5/ja
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JP2020545695A 2018-03-30 2019-03-01 パルス光ビームのスペクトル特性選択及びパルスタイミング制御 Active JP7044894B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201862650896P 2018-03-30 2018-03-30
US62/650,896 2018-03-30
US201862663308P 2018-04-27 2018-04-27
US62/663,308 2018-04-27
PCT/US2019/020415 WO2019190700A1 (en) 2018-03-30 2019-03-01 Spectral feature selection and pulse timing control of a pulsed light beam

Publications (3)

Publication Number Publication Date
JP2021517353A JP2021517353A (ja) 2021-07-15
JP2021517353A5 true JP2021517353A5 (enExample) 2021-08-26
JP7044894B2 JP7044894B2 (ja) 2022-03-30

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JP2020545695A Active JP7044894B2 (ja) 2018-03-30 2019-03-01 パルス光ビームのスペクトル特性選択及びパルスタイミング制御

Country Status (6)

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US (2) US11526083B2 (enExample)
JP (1) JP7044894B2 (enExample)
KR (2) KR102462465B1 (enExample)
CN (2) CN111937256B (enExample)
TW (1) TWI703411B (enExample)
WO (1) WO2019190700A1 (enExample)

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TWI749546B (zh) 2019-05-14 2021-12-11 美商希瑪有限責任公司 用於調變光源波長的裝置及方法
JP7382424B2 (ja) 2019-05-22 2023-11-16 サイマー リミテッド ライアビリティ カンパニー 複数の深紫外光発振器のための制御システム
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CN114730134B (zh) * 2019-11-08 2025-10-10 西默有限公司 用于控制辐射脉冲的突发的辐射系统
JP7411097B2 (ja) * 2020-03-23 2024-01-10 サイマー リミテッド ライアビリティ カンパニー パルス光ビームの予測制御
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