JP2021517101A - Ltcc基板およびその製造方法 - Google Patents
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Abstract
Description
(a)ガラスの各成分を一定の割合で秤量し、ボール・ミリングした後に乾燥させ、それから1250℃以上の温度で保温し、液体ガラスを均質化させることと、
(b)液体ガラスを取り出し、水にて焼入れし、それからボール・ミリングし、ガラス・ペーストを得て、ガラス・ペーストを乾燥させ、前記ガラス粉末を得ることとで行われる。
(1)ガラスと、SiO2と、Al2O3とを一定の割合で秤量し、ボール・ミリングし、ガラスと、SiO2と、Al2O3とを均一に混合させ、それから乾燥させて、LTCCセラミック粉末を得るステップと、
(2)ステップ(1)で得られたLTCCセラミック粉末に溶剤、分散剤、可塑剤、消泡剤及び接着剤を加え、ボール・ミリングして、セラミック・スラリーを得るステップと、
(3)ステップ(2)で得られたセラミック・スラリーを、フィルムとなるように流延し、積層した後に静水圧プレス処理を行い、それからグリーン・シートにカットするステップと、
(4)ステップ(3)で得られたグリーン・シートを焼結し、冷却させた後に前記LTCC基板を得るステップと、を含むLTCC基板の製造方法を提供する。
実施例1〜5および比較例1のLTCC基板の構成成分を表1に示す。前記ガラスがガラス粉末であり、前記ガラスが重量百分率でSiO2 45.8%、H3BO3 39.6%、K2CO3 3.3%、Na2CO3 3.6%、Li2CO3 0.7%、CaCO3 1.5%、SrCO3 1.1%、BaCO3 1.9%、Al2O3 1.2%、MgO 0.6%、TiO2 0.4%およびZnO 0.3%という成分からなる。
(a)ガラスの各成分を一定の割合で秤量し、メノウ製ボール・ミル・ポットを用いて、脱イオン水を媒体として、4h遊星ボール・ミリングを行って、排出し、100℃で12h乾燥させることと、
(b)乾燥した原料粉末を白金るつぼに投入し、高温炉に置いて、1250℃で2h保温し、液体ガラスを均質化させ、液体ガラスを高温で取り出し、脱イオン水にて焼入れすることと、
(c)上記焼入れしたガラスをメノウ製ボール・ミル・ポットに置いて、ジルコニア・ボールを仲介し、脱イオン水を媒体として、12h遊星ボール・ミリングを行って、ガラス・ペーストを得て、ガラス・ペーストを100℃で12h乾燥させて、乾燥したガラス粉末を得ることとで行われた。
(1)ガラス粉末と、SiO2と、Al2O3とを一定の割合で秤量し、メノウ製ボール・ミル・ポットにて、脱イオン水を媒体として、2h遊星ボール・ミリングを行って、粉体を均一に混合させ、さらに100℃で12h乾燥させ、LTCCセラミック粉末を得ることと、
(2)上記セラミック粉末に溶剤、分散剤、可塑剤、消泡剤及び接着剤を適量加え、横型ボール・ミル・ポットに置いて、28hボール・ミリングを行って、均一で安定したセラミック・スラリーを得ることと、
(3)上記セラミック・スラリーを、厚さが約60μmのフィルムとなるように流延し、積層した後に、約20MPaの圧力下で静水圧プレスをかけ、15mm*15mmの正方形のグリーン・シートにカットすることと、
(4)上記グリーン・シートを870℃で焼結し、30min保温した後に、炉とともに冷却させ、表面が平らなLTCC基板を得ることとで行われた。
実施例1〜5のLTCC基板の製造方法と比較して、ステップ(1)において、ガラス粉末およびAl2O3を一定の割合で秤量してメノウ製ボール・ミル・ポットに入れる点のみで異なる。
Claims (9)
- ガラスと、SiO2と、Al2O3とを含み、LTCC基板における前記SiO2の重量百分率は10%〜25%であることを特徴とするLTCC基板。
- 前記LTCC基板における前記SiO2の重量百分率は20%〜25%であることを特徴とする請求項1に記載のLTCC基板。
- 前記LTCC基板における前記SiO2の重量百分率は20%であることを特徴とする請求項2に記載のLTCC基板。
- 前記LTCC基板における、前記ガラスの重量百分率は50%〜60%であり、前記Al2O3の重量百分率は25〜40%であることを特徴とする請求項1に記載のLTCC基板。
- 前記ガラスは、重量百分率で、SiO2 45.8%、H3BO3 39.6%、K2CO3 3.3%、Na2CO3 3.6%、Li2CO3 0.7%、CaCO3 1.5%、SrCO3 1.1%、BaCO3 1.9%、Al2O3 1.2%、MgO 0.6%、TiO2 0.4%およびZnO 0.3%という成分からなることを特徴とする請求項1に記載のLTCC基板。
- 前記ガラスがガラス粉末であり、前記ガラス粉末の製造方法は、
(a)前記ガラスの各成分を一定の割合で秤量し、ボール・ミリングした後に乾燥させ、それから1250℃以上の温度で保温し、液体ガラスを均質化させることと、
(b)前記液体ガラスを取り出し、水にて焼入れし、それからボール・ミリングし、ガラス・ペーストを得て、前記ガラス・ペーストを乾燥させ、前記ガラス粉末を得ることと、で行われることを特徴とする請求項5に記載のLTCC基板。 - 請求項1〜6のいずれかに記載のLTCC基板の製造方法であって、
(1)ガラスと、SiO2と、Al2O3とを一定の割合で秤量し、ボール・ミリングし、前記ガラスと、前記SiO2と、前記Al2O3とを均一に混合させ、それから乾燥させて、LTCCセラミック粉末を得るステップと、
(2)ステップ(1)で得られた前記LTCCセラミック粉末に溶剤、分散剤、可塑剤、消泡剤及び接着剤を加え、ボール・ミリングして、セラミック・スラリーを得るステップと、
(3)ステップ(2)で得られた前記セラミック・スラリーを、フィルムとなるように流延し、積層した後に静水圧プレス処理を行い、それからグリーン・シートにカットするステップと、
(4)ステップ(3)で得られた前記グリーン・シートを焼結し、冷却させた後に前記LTCC基板を得るステップと、
を含むことを特徴とするLTCC基板の製造方法。 - 前記ステップ(3)において、前記フィルムの厚さが60μmであり、前記静水圧プレス処理の圧力が20MPaであることを特徴とする請求項7に記載のLTCC基板の製造方法。
- 前記ステップ(4)において、ステップ(3)で得られた前記グリーン・シートを870℃で焼結し、30min保温し、冷却させた後に前記LTCC基板を得ることを特徴とする請求項7に記載のLTCC基板の製造方法。
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CN113416066A (zh) * | 2021-07-02 | 2021-09-21 | 广东风华高新科技股份有限公司 | 一种ltcc基板及其制备方法与应用 |
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CN103086703A (zh) * | 2013-01-30 | 2013-05-08 | 云南云天化股份有限公司 | 用于制备高抗弯强度低温共烧陶瓷的材料及方法 |
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