JP2021502611A - 基板の製造方法 - Google Patents
基板の製造方法 Download PDFInfo
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- JP2021502611A JP2021502611A JP2020526227A JP2020526227A JP2021502611A JP 2021502611 A JP2021502611 A JP 2021502611A JP 2020526227 A JP2020526227 A JP 2020526227A JP 2020526227 A JP2020526227 A JP 2020526227A JP 2021502611 A JP2021502611 A JP 2021502611A
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- beads
- photosensitive resin
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Architecture (AREA)
- Structural Engineering (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Mathematical Physics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Ceramic Engineering (AREA)
- Dispersion Chemistry (AREA)
- Liquid Crystal (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Materials For Photolithography (AREA)
Abstract
Description
基板基材層として、対角線の長さが55インチである正四角形のPET(polyethylene terephthalate)基材層上に結晶質のITO(Indium Tin Oxide)電極層を形成し、その上にスペーサーを形成した。スペーサーは、感光性樹脂組成物であって、コラムスペーサーの製造に使用される通常の紫外線硬化型アクリレート系列バインダー(トリメチロールプロパントリアクリレート(trimethylolpropane tricarylate)モノマーおよびイソボルニルアクリレート(isobornyl acrylate)モノマーを主成分として含む混合物)および開始剤(Ciba社のDarocur TPOおよびDarocur 1173の混合物)の混合物(UVレジン)に大きさ(粒径)が約10μm程度の有機ビーズ(ポリスチレンとポリメチルメタクリレ−トの混合物である球状のアクリルビーズ)を、前記UVレジン100重量部対比約2重量部の比率で混合した感光性樹脂組成物を使用して形成した。前記組成物を前記PET基材層のITO電極層上に略10μm程度の厚さでコーティングし、遮光パターンマスクを前記組成物層に接触させた状態で紫外線を照射して前記組成物を硬化させた。その後、未硬化した感光性樹脂組成物層をIPA(isopropyl alcohol)を使用して除去(現像)してスペーサーを形成した。図3は、このように形成したスペーサーの写真である。このように形成されたスペーサーの中で図4に示されたような地点(L1〜L3、C1〜C3およびR1〜R3)に形成されたスペーサーの高さを測定した。前記高さは、3D Laser Scanning Microscope(Keyence、VK−X210、X1,000倍率)を使用して測定し、下記の表1に表した。図4に示された各地点は、前記PET基材層の表面上に、略同じ間隔で中間、右側および左側のそれぞれで選択された三個の地点である。
ビーズが含まれていない感光性樹脂組成物を使用したことを除いては、実施例1と同様にしてスペーサーを製造し、各地点での大きさを測定して下記の表1に示した。
20、50:感光性樹脂組成物層
30:マスク
40:スペーサー
501:ビーズ
Claims (13)
- 基板基材層の表面に形成された感光性樹脂組成物層を露光および現像してスペーサーを製造する段階を含む基板の製造方法であって、
前記基板基材層の表面に形成された感光性樹脂組成物層は、感光性樹脂およびビーズを含む、基板の製造方法。 - 露光段階は、マスクを媒介として感光性樹脂組成物層に光を照射する段階を含む、請求項1に記載の基板の製造方法。
- 露光段階はマスクを感光性樹脂組成物層に接触させた状態で遂行する、請求項2に記載の基板の製造方法。
- 感光性樹脂は、エポキシ樹脂、アクリル樹脂、オキセタン樹脂またはチオール−エン樹脂である、請求項1から3のいずれか一項に記載の基板の製造方法。
- ビーズは、球状、柱状、多角形または無定形の形態を有する、請求項1から4のいずれか一項に記載の基板の製造方法。
- ビーズの大きさは1μm〜50μmの範囲内である、請求項1から5のいずれか一項に記載の基板の製造方法。
- ビーズは、アクリルビーズ、シリコンビーズ、シリカビーズ、タルクビーズ、ウレタンビーズ、エポキシビーズ、ゼオライトビーズまたはポリスチレンビーズである、請求項1から6のいずれか一項に記載の基板の製造方法。
- 感光性樹脂組成物層は、感光性樹脂100重量部対比0.01〜10重量部のビーズを含む、請求項1から7のいずれか一項に記載の基板の製造方法。
- 基板基材層と感光性樹脂組成物層の間に電極層が形成されている、請求項1から8のいずれか一項に記載の基板の製造方法。
- 基板基材層と感光性樹脂組成物層の間に遮光層が形成されている、請求項1から8のいずれか一項に記載の基板の製造方法。
- 感光性樹脂組成物層は色素をさらに含む、請求項1から10のいずれか一項に記載の基板の製造方法。
- ロール・ツー・ロール工程で進行される、請求項1から11のいずれか一項に記載の基板の製造方法。
- スペーサーの製造後に配向膜を形成する段階をさらに遂行する、請求項1から12のいずれか一項に記載の基板の製造方法。
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